Projection optical unit for microlithography and method for producing a structured component

ABSTRACT

A projection optical unit for microlithography includes a plurality of mirrors and has a numerical aperture having a value larger than 0.5. The plurality of mirrors includes at least three grazing incidence mirrors, which deflect a chief ray of a central object field point with an angle of incidence of greater than 45°. Different polarized light beams passing the projection optical unit are rotated in their polarization direction by different angles of rotation. The projection optical unit includes first and second groups of mirrors. The second group of mirrors includes the final two mirrors of the plurality of mirrors at the image side. A linear portion in the pupil dependence of the total geometrical polarization rotation of the projection optical unit is less than 20% of a linear portion in the pupil dependence of the geometrical polarization rotation of the second group of mirrors.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a continuation of, and claims benefit under 35 USC 120 to, international application PCT/EP2020/066866, filed Jun. 18, 2020, which claims benefit under 35 USC 119 of German Application No. 10 2019 208 961.5 filed on Jun. 19, 2019. The entire disclosure of these applications are incorporated by reference herein.

FIELD

The disclosure relates to a projection optical unit for microlithography and a method for producing a structured component.

BACKGROUND

Microlithographic projection exposure apparatuses are used for producing microstructured components, such as, for example, integrated circuits or LCDs. Such a projection exposure apparatus includes an illumination device (=illumination optical unit) and a projection lens (=projection optical unit). In the microlithography process, the image of a mask (=reticle) illuminated with the aid of the illumination device is projected, via the projection lens, onto a substrate (e.g. a silicon wafer) coated with a light-sensitive layer (photoresist) and arranged in the image plane of the projection lens, in order to transfer the mask structure to the light-sensitive coating of the substrate.

Various approaches are known for specifically setting or correcting the polarization distribution in the illumination device or in the projection lens in order to optimize the imaging contrast. For example, it is known, both in the illumination device and in the projection lens, to set a tangential polarization distribution for high-contrast imaging. “Tangential polarization” (or “TE polarization”) is understood to mean a polarization distribution in which the planes of vibration of the electric field strength vectors of the individual linearly polarized light rays are oriented approximately perpendicularly to the radius directed toward the centre of the pupil. For example, in an imaging process with high aperture a preferred polarization distribution can be configured such that the diffraction orders are tangentially polarized in the wafer plane in order to avoid a loss of contrast due to the so-called vector-effect. The expression “vector effect”, which occurs in imaging processes with high apertures, is used to describe the situation in which the vector of the electric field has, in the image region, different directions for different diffraction orders even if the polarization state is the same, which results from the fact that the p-polarized components (TM-components) of the vector of the electric field are no longer parallel to each other, so that imaging contrast depends on the polarization state.

An issue arising in operation of a microlithographic projection exposure apparatus is that due to different reasons optical retardations occur in the optical system, which may for example vary dependent on the location on a pupil plane and which may cause a contrast loss and an accompanying deterioration of the performance of the optical system. “Retardation” means the difference in optical path length for orthogonal polarization Eigenstates of the Jones pupil characterizing the optical system.

One of the possible reasons for such an undesired optical retardation occurring in the optical system is a geometric effect also referred to as “spin-redirection phase” or “Berry phase”. The effect can be traced back to the fact that, in an optical system, the coordinate system for a given polarization state is rotated for skew light beams, i.e. beams which leave the meridional plane, from the entry area to the exit area of the optical system. As a result of this rotation of the coordinate system, a polarized beam is likewise rotated in its preferred polarization direction, even if there is no optical rotator in the system and also if there is no polarization rotation due to s/p-splitting or using a polarizer.

A quantitative value for the geometric rotation associated with a ray path in an optical system is obtained by projecting the k-vectors of the ray path onto the unit sphere of directions and calculating the solid angle enclosed by the contour (see Tavrov et al.: “Method to evaluate the geometrical spin-redirection phase for a nonplanar ray”, J. Opt. Soc. Am. A 16 (4) 1999, pp. 919-921). In general, the input and output ray of an imaging optical system are not parallel to each other and the contour is not closed. Whereas Tavrov implicitly links the input and output rays directly with a geodesic line on the direction sphere, it is generally more appropriate for an imaging system with parallel image and object plane and non-unity magnification to include the normal to the image plane as an additional point on the direction sphere, linking the input and output ray with two additional geodesics via the image normal. This definition will be used below, also for the evaluation of systems with small deviations from exact parallelism of image and object planes, and for the evaluation of ray paths in an optical subsystem including the image plane.

As a result of the afore-discussed polarization rotation, a preferred polarization distribution (e.g. tangential polarization) initially adjusted is not be maintained throughout the projection optical unit, with the consequence of a contrast loss and an accompanying deterioration of the performance of the optical system. The issue can be significant in optical systems with relatively high values of the numerical aperture (NA) due to increasing incidence angles of the light beams on the respective mirrors of the projection optical unit.

Reference is made only in an exemplary fashion to WO 2019/057803 A1.

SUMMARY

The present disclosure seeks to provide a projection optical unit for microlithography and a method for producing a structured component which reduce undesired contrast loss and accompanying deterioration of the performance of the optical system.

In an aspect, a projection optical unit for microlithography according to the disclosure includes a plurality of mirrors for guiding imaging light along an imaging beam path from an object field located in an object plane to an image field located in an image plane with a numerical aperture having a value larger than 0.5, wherein the plurality of mirrors include at least three mirrors for grazing incidence (GI mirrors), which deflect a chief ray of a central object field point with an angle of incidence of more than 45°, wherein different polarized light beams passing the projection optical unit in operation from the object field to the image field are rotated in their polarization direction by different angles of rotation due to a geometrical polarization rotation, wherein the projection optical unit includes a first group of mirrors and a second group of mirrors, the second group of mirrors consisting of the final two mirrors of the plurality of mirrors at the image side, wherein a linear portion in the pupil dependence of the total geometrical polarization rotation (|Z3A+Z3B|) of the projection optical unit is smaller than 20% of a linear portion in the pupil dependence of the geometrical polarization rotation (|Z3B|) of the second group of mirrors.

Further, the disclosure includes the concept of configuring a projection optical unit, in which due to a relatively high value of numerical aperture skew light beams leaving the meridional plane pass the optical system with comparatively large values of the incidence angles on the mirrors, in a specifically targeted manner such that a “first order portion” or “linear portion” increasing linearly from centre to edge of the exit pupil of the above-mentioned rotation of the polarization state occurring due to the geometric effect being referred to as “spin-redirection phase” or “Berry phase”, is almost eliminated.

The disclosure furthermore involves the consideration that, while the specific design of the final two mirrors at the image side which are denoted here and in the following as “second group of mirrors (Mn−1, Mn)” or “part B” are basically predetermined (regarding position, orientation and curvature of the mirrors) by the desired optical requirements, for example regarding the numerical aperture (NA), design freedom is restricted to the remaining mirrors, which are denoted here and in the following as “first group of mirrors (M1 . . . Mn−2)” or “part A”. Starting from this consideration, the disclosure includes the concept of configuring the first group of mirrors (M1 . . . Mn−2) (i.e. part A) in such a way (regarding position, orientation and curvature of the mirrors) that the resulting geometrical polarization rotation will substantially compensate for the geometrical polarization rotation in the second group of mirrors (Mn−1,Mn) (i.e. part B). In other words, “part A” in the projection optical unit is designed—regarding position, orientation and curvature of its mirrors—such that the resulting linear part in the pupil dependence of the geometrical polarization rotation Z3A is of substantial equal magnitude but of opposite sign compared to the resulting linear part in the pupil dependence of the geometrical polarization rotation Z3B in “part B”, in the second group of mirrors (Mn−1,Mn).

In the context of the present disclosure, the order of geometrical polarization rotation can be conveniently defined by Zernike polynomials as a function of pupil coordinates x and y in the exit pupil. The first few Zernike polynomials are defined as Z1=const., Z2=y, Z3=x, Z4=2x²+2y²−1, z5=y²−x2, Z6=2xy, Z7=(3x²+3y²−2)*x, etc. Since Z4 and Z5 vanish for symmetry reasons, the at least partial elimination of the “first order portion” or “linear portion” (i.e. the Z3-term) as described above makes the Z6 term remain as dominating Zernike polynomial. The above mentioned linear portion in the pupil dependence of the geometrical polarization rotation for first group of mirrors M1 . . . Mn−2 (i.e. part A) will be Z3A and the linear portion in the pupil dependence of the geometrical polarization rotation for second group of mirrors (Mn−1, Mn) (i.e. part B) will be Z3B. Then the above criterion can be written as |Z3A+Z3B|<0.2*|Z3B|.

According to an embodiment a linear portion in the pupil dependence of the geometrical polarization rotation (|Z3A+Z3B|) of the total projection optical unit is smaller than 15%, for example smaller than 5%, of a linear portion in the pupil dependence of the geometrical polarization rotation (|Z3B|) of the second group of mirrors (Mn−1,Mn).

According to an embodiment, for all light beams imaging a centre of the object field to a centre of the image field, the angle of rotation is less than 35°*NA^(4.5). This criterion, involving a NA-dependent upper limit of the angle of rotation, considers the fact that with higher values of the numerical aperture (NA) the effect of geometrical polarization rotation principally increases due to larger incidence angles of the light beams on the respective mirrors of the projection optical unit.

In an aspect, the disclosure also relates to a projection optical unit for microlithography, including: a plurality of mirrors for guiding imaging light along an imaging beam path from an object field located in an object plane to an image field located in an image plane with a numerical aperture (NA) having a value larger than 0.5, wherein the plurality of mirrors include at least three mirrors for grazing incidence (GI mirrors), which deflect a chief ray of a central object field point with an angle of incidence of more than 45°, wherein different polarized light beams passing the projection optical unit in operation from the object field to the image field are rotated in their polarization direction by different angles of rotation due to a geometrical polarization rotation, wherein for all light beams imaging a centre of the object field to a centre of the image field, the angle of rotation is less than 35°*NA^(4.5).

According to an embodiment, for all light beams imaging a centre of the object field to a centre of the image field, the angle of rotation is less than 30°*NA^(4.5), for example less than 25°*NA^(4.5).

According to an embodiment, the image side numerical aperture (NA) has a value larger than 0.6, for example more than 0.7.

According to an embodiment, for all light beams imaging a centre of the object field to a centre of the image field, the angle of rotation is less than 7°, such as less than 5°, for example less than 3°.

According to an embodiment, an imaging beam path from a centre of the object field through a location of the pupil plane having relative pupil coordinates (−1,0) or (1,0) in the exit pupil, respectively (said location corresponding to an intersection point of the x-axis and the edge of the pupil), to a centre of the image field has a geometrical polarization rotation less than 5°*NA^(4.5).

According to an embodiment, the geometrical polarization rotation averaged over all imaging beam paths that lie in the pupil plane inside a dipole of 20% pupil fill ratio is less than 5°*NA^(4.5).

According to an embodiment, a circumferential distribution of the angle of rotation in the pupil plane of the projection optical unit exhibits at least four zero crossings of the angle of rotation.

With the afore-described embodiments, the disclosure is furthermore based on the consideration that a rotation of the polarization state (i.e. an amount by which a polarized beam is rotated in its preferred polarization direction) may be basically accepted (and does not lead to a deterioration of the performance of the optical system) as long as comparatively low values of polarization rotation are provided in those pupil regions which are actually optically used in the polarized illumination setting. Since typically used polarized illumination settings (such as dipole settings or quadrupole settings) may include comparatively small illumination poles at opposite outer regions of the illumination pupil plane, the afore-mentioned consideration means that comparatively higher values of polarization rotation may be accepted in regions not belonging to the illumination poles.

FIGS. 9A-9C show exemplary embodiments in which the desired polarized illumination setting is either a horizontal dipole illumination setting 910 with y-polarization (FIG. 9A), a vertical dipole illumination setting 920 with x-polarization (FIG. 9B) or a quadrupole illumination setting 930 (FIG. 9C) with quasi-tangential polarization distribution, i.e. with a polarization distribution in which the oscillation direction of the electric field vector runs at least approximately perpendicular to the radius directed at the optical system axis (which runs in the z-direction with respect to the plotted coordinate system).

Starting from the afore-mentioned consideration, the disclosure includes the concept of configuring a projection optical unit in which—due to a relatively high value of numerical aperture—skew light beams leaving the meridional plane pass the optical system with comparatively large values of the incidence angle on the mirrors, in a specifically targeted manner such that a “linear portion” (which may also be denoted as “first order portion”) increasing linearly from centre to edge of the pupil plane of the above-mentioned rotation of the polarization state occurring due to the geometric effect being referred to as “spin-redirection phase” or “Berry phase” is almost eliminated.

By at least partial elimination of the afore-described linear portion of the polarization rotation, the disclosure specifically considers the fact that it is just this linear or first order portion of polarization rotation (i.e. the portion that increases linearly across the pupil) which can be harmful or detrimental to a maximum extent for typical polarized illumination settings such as dipole settings or quadrupole settings, since in such polarized illumination settings just those regions of the pupil which are situated at the outer edge of the pupil—and in which the angles of rotation of the polarization direction are relatively high—are optically used in operation of the projection optical unit.

As a further consequence of the (at least partial) elimination of the linear portion or first order portion of the above-mentioned rotation of the polarization state, only higher order portions of the geometrical rotation of the polarization state remain. Except for linear terms, the two lowest order terms are Z5 and Z6, Z5 being absent in the centre of the object field due to the symmetry of the system. After the elimination of linear terms, the dominance of Z6 is beneficial.

For typical illumination settings (such as dipole settings or quadrupole settings, see FIGS. 9A-9C) the amount of polarization rotation is small just in the regions of the illumination poles in the illumination pupil, while relatively higher values of the amount of polarization rotation existing in other regions of the illumination pupil can just be ignored since they are not optically used.

In other words, the disclosure includes the concept of at least partially eliminating a first order portion of geometrical polarization rotation (increasing linearly across the pupil) and thereby leaving only higher order portions of the rotation of polarization which can be favorable for typical polarized illumination settings by providing only relatively small rotation angles in the relevant illuminated (=optically used) pupil regions.

The above-described concept is not limited to the illumination settings shown in FIGS. 9A-9C. In other words, also for arbitrary other illumination settings the projection optical unit can be configured such that the amount of polarization rotation is small just in the optically used regions. Furthermore, the above-described concept is not limited to polarized illumination settings. In other words, also for non-polarized illumination settings an elimination or reduction of geometrical polarization rotation is basically desired and can be advantageously achieved according to the present disclosure.

In an aspect, the disclosure also relates to a projection optical unit for microlithography, including a plurality of mirrors for guiding imaging light along an imaging beam path from an object field located in an object plane creating an image field located in an image plane with a numerical aperture (NA) having a value larger than 0.5, wherein the plurality of mirrors include at least three mirrors for grazing incidence (GI mirrors), which deflect a chief ray of a central object field point with an angle of incidence of more than 45°, wherein different polarized light beams passing the projection optical unit in operation from the object field to the image field are rotated in their polarization direction due to a geometrical polarization rotation by different angles of rotation, wherein a circumferential distribution of the angle of rotation in the pupil plane of the projection optical unit exhibits at least four zero crossings of the value of the angle of rotation.

According to an embodiment, a circumferential distribution of the angle of rotation in the exit pupil of the projection optical unit exhibits a zero crossing within 30° of each of positive and negative x-axis.

According to an embodiment, a circumferential distribution of the angle of rotation in the exit pupil of the projection optical unit exhibits a zero crossing within 10° of each of positive and negative y-axis.

The disclosure furthermore relates to an optical system including an imaging optical unit as described above as well as an illumination optical unit for illuminating the illumination field, in which the object field is arranged.

The disclosure furthermore relates to a projection exposure apparatus including an optical system as described above and including a EUV light source for producing the imaging light.

In an aspect, the disclosure furthermore relates to method for producing a structured component, including the following method steps: providing a reticle and a wafer; projecting a structure on the reticle onto a light-sensitive layer of the wafer with the aid of the projection exposure apparatus as described above; and producing a structured component by producing a microstructure or nanostructure on the wafer.

Further embodiments of the disclosure can be gathered from the description and the claims.

BRIEF DESCRIPTION OF THE DRAWINGS

The disclosure will be explained in more detail below on the basis of exemplary embodiments depicted in the attached figures, in which:

FIG. 1 shows a schematic illustration of a projection exposure apparatus for EUV microlithography;

FIG. 2A shows a schematic side view of a projection optical unit being usable in the exposure apparatus according to FIG. 1, wherein mirror bodies are illustrated without holders and with zero thickness for the purpose of illustrating an imaging beam path between an object field and an image field;

FIG. 2B shows the distribution of the angles of rotation of the polarization direction for polarized light passing the projection optical unit of FIG. 2A in dependence on relative pupil coordinates;

FIG. 3A shows a schematic side view of a further embodiment of a projection optical unit which is usable in the projection exposure apparatus according to FIG. 1;

FIG. 3B shows the distribution of the angles of rotation due to geometrical polarization rotation for the embodiment of FIG. 3A;

FIGS. 4A-8B show side views of further embodiments of a projection optical unit or respective distributions of the angles of rotation due to geometrical polarization rotation, respectively; and

FIGS. 9A-9C show typical exemplary polarized illumination settings used in the projection exposure apparatus of FIG. 1.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

A microlithographic projection exposure apparatus 1 according to FIG. 1 has a light source 2 for illumination light or imaging light 3. The light source 2 is an EUV light source, which produces light in a wavelength range of e.g. between 5 nm and 30 nm, such as between 5 nm and 15 nm. The light source 2 can be a plasma-based light source (laser-produced plasma (LPP), gas-discharge produced plasma (GDP)) or else a synchrotron-based light source, for example a free electron laser (FEL). For example, the light source 2 may be a light source with a wavelength of 13.5 nm or a light source with a wavelength of 6.9 nm. Other EUV wavelengths are also possible. In general, even arbitrary wavelengths are possible for the illumination light 3 guided in the projection exposure apparatus 1, for example visible wavelengths or else other wavelengths which may find use in micro-lithography (for example, DUV, deep ultraviolet) and for which suitable laser light sources and/or LED light sources are available (e.g. 365 nm, 248 nm, 193 nm, 157 nm, 129 nm, 109 nm). A beam path of the illumination light 3 is depicted very schematically in FIG. 1.

An illumination optical unit 4 serves to guide the illumination light 3 from the light source 2 to an object field 5 in an object plane OP. Using a projection optical unit or imaging optical unit 7, the object field 5 is imaged into an image field 9 in an image plane IP with a predetermined reduction scale.

In order to facilitate the description of the projection exposure apparatus 1 and the various embodiments of the projection optical unit 7, a Cartesian xyz-coordinate system is indicated in the drawing, from which system the respective positional relationship of the components illustrated in the figures is evident. In FIG. 1, the x-direction runs perpendicular to the plane of the drawing into the latter. The y-direction runs towards the right, and the z-direction runs downward. In the projection optical unit 7, the object field 5 and the image field 9 may have a bent or curved embodiment and, for example, an embodiment shaped like a partial ring. A basic form of a marginal contour of the object field 5 or of the image field 9 has a corresponding bend. Alternatively, it is possible to embody the object field 5 and the image field 9 with a rectangular shape. The object field 5 and the image field 9 have an x/y-aspect ratio of greater than 1. Therefore, the object field 5 has a longer object field dimension in the x-direction and a shorter object field dimension in the y-direction.

In the embodiment of the projection optical unit 7 according to FIG. 1, the image plane IP is arranged parallel to the object plane OP. What is imaged in this case is a section of a reflection mask 13, also referred to as reticle, coinciding with the object field 5. The reticle 13 is carried by a reticle holder 14. The reticle holder 14 is displaced relative to the object field 5. The imaging by way of the projection optical unit 7 is implemented on the surface of a substrate in the form of a wafer 15, which is carried by a wafer holder 16. The wafer holder 16 is displaced relative to the image field 9.

FIG. 1 schematically illustrates, between the reticle 13 and the projection optical unit 7, a ray beam 8 of the illumination light 3 that enters into the projection optical unit 7 and, between the projection optical unit 7 and the wafer 15, a ray beam 8 of the illumination light 3 that emerges from the projection optical unit 7. An image field-side numerical aperture (NA) of the projection optical unit 7 is not reproduced to scale in FIG. 1.

The projection exposure apparatus 1 is of the scanner type. Both the reticle 13 and the wafer 15 are scanned in the y-direction during the operation of the projection exposure apparatus 1. A stepper type of the projection exposure apparatus 1, in which a stepwise displacement of the reticle 13 and of the wafer 15 in the y-direction is effected between individual exposures of the wafer 15, is also possible. These displacements are effected by an appropriate actuation of the respective displacement drives (not shown).

FIG. 2A shows a projection optical unit 200 according to a first embodiment of the disclosure in a side view. The plane of the drawing of FIG. 2A is parallel to the y-z-plane corresponding to FIG. 1. The beam path of imaging light 201 includes a chief ray 202 of a central object field point and, as further individual rays 203 and 204, includes aperture or coma rays that delimit the edge of the beam path in the y-z-plane, which is also referred to as meridional plane. The extent of an imaging beam path of the imaging light 201 between the object field in the object plane OP and the image field in the image plane IP is illustrated. Furthermore, the rough position of a pupil plane PP is illustrated.

The projection optical unit 200 according to FIG. 2A has a total of eleven mirrors, which are numbered consecutively by “M1” to “M11” in the order of the beam path of the imaging light 201, proceeding from the object field. FIG. 2A illustrates, in a sectional view through the projection optical unit 200 the mirror bodies of the mirrors M1-M11. These mirror bodies carry mirror reflection surfaces used for reflecting the imaging light 201. Proceeding from the object field in the object plane OP, the chief rays 202 include an angle chief ray angle of 5.5° with a normal to the object plane OP. Other such chief ray angles in the range between 3° and 8°, for example, are also possible.

The projection optical unit 200 according to FIG. 2A has an image-side numerical aperture (NA) of 0.75. Other image-side numerical apertures in the range between 0.4 and 0.9, for example, are also possible.

In the case of the projection optical unit 200 according to FIG. 2A, the mirrors M1, M10 and M11 are embodied as NI (=“normal incidence”) mirrors, that is to say as mirrors on which the imaging light 201 is incident with an angle of incidence that is less than 45°. Overall, the projection optical unit 200 according to FIG. 2A thus has three NI-mirrors M1, M10 and M11.

The mirrors M2-M9 are GI (=“grazing incidence”) mirrors, that is to say mirrors onto which the illumination light 201 impinges with angles of incidence that are greater than 45°, such as greater than 60°. A typical angle of incidence of the individual rays 203, 204 of the imaging light 201 on the mirrors M2-M9 for grazing incidence may lie in the region of 80°. Overall, the projection optical unit 200 according to FIG. 2A has exactly eight mirrors M2-M9 for grazing incidence. The mirrors M2-M8 reflect the imaging light 201 such that the angles of reflection of the individual rays 15 on the respective mirrors M2-M8 add up. Thus—in addition to an effect of influencing the imaging properties of the projection optical unit 200—, the mirrors M2-M8 all have the same direction of the mirror deflection effect, and the deflection effect for the chief ray 202 adds up in each case for the mirrors M2-M8. These mirrors M2-M8 can also be denoted as “basic GI mirrors”. The mirror M9 is arranged in such a way that its deflection effect acts in subtractive fashion for the chief ray 202 in relation to the deflection effect of the basic GI mirrors M2-M8. The projection optical unit 200 has exactly one such mirror M9 acting in subtractive fashion, which is the last GI mirror of the projection optical unit 200 in the imaging beam path upstream of the image field.

The mirrors M2-M9 for grazing incidence each have relatively large absolute values for the radius, that is to say they have a relatively small deviation from a planar surface. These mirrors M2-M9 for grazing incidence each have a comparatively weak refractive power, i.e., a lower beam-forming effect than a mirror which is concave or convex overall. The mirrors M2-M9 contribute to a specific imaging aberration correction and, for example, to a local imaging aberration correction. The mirrors M1-M11 carry a coating that optimizes the reflectivity of the mirrors M1-M11 for the imaging light 201. Here, this can be a single-layer ruthenium coating or a multilayer with, in each case, an uppermost layer made of, e.g., ruthenium. A coating including for example a layer of molybdenum or ruthenium can be used in the case of the GI mirrors M2-M9. The highly reflecting layers of mirrors M1, M10 and M11 for normal incidence can be configured as multiply layers, wherein successive layers can be manufactured from different materials. Alternating material layers can also be used. A typical multiply layer can have fifty bilayers, respectively made of a layer of molybdenum and a layer of silicon. These may contain additional separation layers made of e.g. carbon (C), boron carbide (B₄C) and can be terminated by a protective layer or a protective layer system toward the vacuum.

The mirrors of the projection optical unit 200 of FIG. 2A are embodied as free-form surfaces which cannot be described by a rotationally symmetric function, but by the following free-form surface equation:

$Z = {\frac{{c_{x}x^{2}} + {c_{y}y^{2}}}{1 + \sqrt{1 - {\left( {1 + k_{x}} \right)\left( {c_{x}x} \right)^{2}} - {\left( {1 + k_{y}} \right)\left( {c_{y}y} \right)^{2}}}} + {C_{1}x} + {C_{2}y} + {C_{3}x^{2}} + {C_{4}{xy}} + {C_{5}y^{2}} + {C_{6}x^{3}} + \ldots + {C_{9}y^{3}} + {C_{10}x^{4}} + \ldots + {C_{12}x^{2}y^{2}} + \ldots + {C_{14}y^{4}} + {C_{15}x^{5}} + \ldots + {C_{20}y^{5}} + {C_{21}x^{6}} + \ldots + {C_{24}x^{3}y^{3}} + \ldots + {C_{27}y^{6}} + \ldots}$

Z is the sag of the free-form surface at the point x, y, with x²+y²=r². Here, r is the distance from the reference axis of the free-form surface equation (x=0, y=0). In the free-form surface equation (1), C₁, C₂, C₃ . . . denote the coefficients of the free-form surface series expansion in powers of x and y. In the case of a conical base area, c_(x), c_(y) are constants corresponding to the vertex curvature of a corresponding asphere. Thus, c_(x)=1/Rx and c_(y)=1/Ry applies. k_(x) and k_(y) each correspond to a conical constant of a corresponding asphere. Thus, equation (1) describes a biconical free-form surface.

The optical design data of the reflection surfaces of the mirrors M1-M11 in the projection optical unit 200 of FIG. 2A can be gathered from Tables 1-5. Table 1 provides several basic data of the design data of the projection optical unit 200. Table 2 indicates vertex point radii (Radius_(x), Radius_(y)) and refractive power values (Power_(x), Power_(y)) for the optical surfaces of the optical components. Negative radii values denote curves that are concave toward the incident illumination light at the intersection of the respective surface with the considered plane (x-z-plane, y-z-plane) that is spanned by a surface normal at the vertex point with the respective direction of curvature (x, y). The two radii Radius_(x), Radius_(y) may have explicitly different signs. The vertex points at each optical surface are defined as points of incidence of a guide ray which travels from an object field centre to the image field along a plane of symmetry x=0, i.e. the plane of the drawing of FIG. 2A (meridional plane). The refractive powers Power_(x), Power_(y) at the vertex points are defined as:

${Power}_{x} = {- \frac{2 \cdot {\cos({AOI})}}{{Radius}_{x}}}$ ${Power}_{y} = {- \frac{2}{{Radius}_{y} \cdot {\cos({AOI})}}}$

Here, AOI denotes an angle of incidence of the guide ray with respect to the surface normal.

Table 3 indicates the Decentring (location and angle) of the respective mirror surface as well as of the object field, the aperture stop and the image field with respect to the surface normal on the object field in the object plane OP, the surface normal being in the centre of the object plane OP. Table 4 indicates the free form coefficients of the surfaces. Table 5 indicates the coordinates of the aperture stop edge.

As already discussed in the introductory part of the present application, an undesired optical retardation occurs in the projection optical unit 200 of FIG. 2A for skew light beams leaving the meridional plane and passing the projection optical unit from the entry area to the exit area due to geometric effect of “spin redirection phase” or “Berry phase”, having the consequence that without appropriate counter-measures an initially adjusted polarization distribution (e.g. tangential polarization distribution) won't be maintained until the image plane or wafer plane, and a loss in contrast resulting in a deterioration of the optical performance of the projection exposure apparatus is achieved.

FIG. 2B represents a diagram showing values of the angle of rotation due to this geometrical polarization rotation across the exit pupil (defined as the image of the aperture stop at the image field side of the optical system) and in relative pupil coordinates obtained for the embodiment of FIG. 2A. For the relative pupil coordinate (1,0), an angle of rotation for this geometrical polarization rotation having value of 16.45° is obtained. Furthermore, a circumferential distribution of the angle of rotation in the pupil plane of the projection optical unit exhibits four zero crossings of the value of the angle of rotation.

FIG. 3A shows an embodiment of a projection optical unit 300 according to the disclosure which can be used instead of the projection optical unit 7 in the projection exposure apparatus 1 of FIG. 1. The principle design of the projection optical unit 300 is similar to projection optical unit 200 of FIG. 2A, for example regarding number of GI- or NI-mirrors, respectively. Components which correspond to those already explained above in relation to FIG. 2A are denoted by the same reference signs and are not discussed again in detail.

The optical design data of the reflection surfaces of the mirrors in the projection optical unit 300 of FIG. 3A can be gathered from Tables 6-10. The optical design data of the reflection surfaces of the mirrors M1-M11 in the projection optical unit 300 of FIG. 3A can be gathered from Tables 6-10. Table 6 provides several basic data of the design data of the projection optical unit 300. Table 7 indicates vertex point radii (Radius_(x), Radius_(y)) and refractive power values (Power_(x), Power_(y)) for the optical surfaces of the optical components. Table 8 indicates the Decentring (location and angle) of the respective mirror surface as well as of the object field, the aperture stop and the image field with respect to the surface normal on the object field in the object plane OP, the surface normal being in the centre of the object plane OP. Table 9 indicates the free form coefficients of the surfaces. Table 10 indicates the coordinates of the aperture stop edge.

FIG. 3B represents a diagram showing the distribution of the angle of rotation due to the geometrical polarization rotation from the entrance area to the exit area of the projection optical unit 300 according to the embodiment of FIG. 3A across the exit pupil and in relative pupil coordinates (said coordinates being 0 at the centre of the exit pupil and 1 at the outer edge of the exit pupil). For relative pupil coordinate (1,0), an angle of rotation having a value of 0.95° is achieved. Tables summarizing the respective values for the angle of rotation and also for the above-discussed criterion |Z3A+Z3B|<0.2*|Z3B| for all embodiments of the present disclosure are given at the end of specification as Tables 36 and 37, respectively.

Furthermore, a circumferential distribution of the angle of rotation in the pupil plane of the projection optical unit exhibits four zero crossings of the value of the angle of rotation. More specifically, a circumferential distribution of the angle of rotation in the pupil plane of the projection optical unit 300 exhibits a zero crossing on both positive and negative x-axis, respectively, and also a zero crossing on both positive and negative y-axis, respectively.

It can be gathered from the diagram of FIG. 3B that the value of the angle of rotation is low for relative pupil coordinates (−1,0) and (1,0), i.e. in “three o'clock-” and “nine o'clock” regions of the exit pupil, whereas relatively the higher values of the angle of rotation around 6° are obtained for other regions (namely 1:30 o'clock and 10:30 o'clock of the exit pupil). However, considering that typical polarized illumination settings used in the projection exposure apparatus of FIG. 1 look as schematically shown in FIG. 9A-9C, it can be seen that the achieved undesired polarization rotation is kept low just for the optically used region of the pupil (i.e. the illumination poles), while the relatively larger values of the angle of rotation obtained for the other regions of the pupil correspond to non-used regions and therefore have no negative impact on the optical performance of the system.

FIG. 4A shows a further embodiment of a projection optical unit 400 according to the disclosure which can be used instead of the projection optical unit 7 in the projection exposure apparatus 1 of FIG. 1. The optical design data of the reflection surfaces of the mirrors in the projection optical unit 400 of FIG. 4A can be gathered from Tables 11-15. Table 11 provides several basic data of the design data of the projection optical unit 400. Table 12 indicates vertex point radii (Radius_(x), Radius_(y)) and refractive power values (Power_(x), Power_(y)) for the optical surfaces of the optical components. Table 13 indicates the Decentring (location and angle) of the respective mirror surface as well as of the object field, the aperture stop and the image field with respect to the surface normal on the object field in the object plane OP, the surface normal being in the centre of the object plane OP. Table 14 indicates the free form coefficients of the surfaces. Table 15 indicates the coordinates of the aperture stop edge.

The projection optical unit 400 according to FIG. 4A has a total of eight mirrors, which are numbered consecutively by M1-M8 in the order of the beam path of the imaging light, proceeding from the object field. In the case of the projection optical unit 400 according to FIG. 4A, the mirrors M1, M4, M7 and M8 are embodied as normal incidence mirrors as defined above. Overall, the projection optical unit 400 according to FIG. 4A thus has four normal incidence mirrors M1, M4, M7 and M8. The mirrors M2, M3, M5 and M6 are mirrors for grazing incidence of the illumination light as defined above. A typical angle of incidence of the individual rays of the imaging light 401 on the mirrors for grazing incidence may lie in the region of 80°. Overall, the projection optical unit 400 according to FIG. 4A has exactly four mirrors M2, M3, M5 and M6 for grazing incidence.

FIG. 4B represents a diagram showing the distribution of the angle of rotation due to the geometrical polarization rotation from the entrance area to the exit area of the projection optical unit 400 according to the embodiment of FIG. 4A across the exit pupil and in relative pupil coordinates (said coordinates being 0 at the centre of the exit pupil and 1 at the outer edge of the exit pupil). For relative pupil coordinate (1,0), an angle of rotation having a value of 7.03° is achieved. Furthermore, a circumferential distribution of the angle of rotation in the pupil plane of the projection optical unit exhibits four zero crossings of the value of the angle of rotation.

FIG. 5A shows a further embodiment of a projection optical unit 500 according to the disclosure which can be used instead of the projection optical unit 7 in the projection exposure apparatus 1 of FIG. 1. Components which correspond to those already explained above in relation to FIG. 4A are denoted by the same reference signs and are not discussed again in detail.

The principle design of the projection optical unit 500 is similar to projection optical unit 400 of FIG. 4A, for example regarding number of GI- or NI-mirrors, respectively. The optical design data of the reflection surfaces of the mirrors in the projection optical unit 500 of FIG. 5A can be gathered from Tables 16-20. Table 16 provides several basic data of the design data of the projection optical unit 500. Table 17 indicates vertex point radii (Radius_(x), Radius_(y)) and refractive power values (Power_(x), Power_(y)) for the optical surfaces of the optical components. Table 18 indicates the Decentring (location and angle) of the respective mirror surface as well as of the object field, the aperture stop and the image field with respect to the surface normal on the object field in the object plane OP, the surface normal being in the centre of the object plane. Table 19 indicates the free form coefficients of the surfaces. Table 20 indicates the coordinates of the aperture stop edge.

FIG. 5B represents a diagram showing the distribution of the angle of rotation due to the geometrical polarization rotation from the entrance area to the exit area of the projection optical unit 500 according to the embodiment of FIG. 5A across the exit pupil and in relative pupil coordinates (said coordinates being 0 at the centre of the exit pupil and 1 at the outer edge of the exit pupil). For relative pupil coordinate (1,0), an angle of rotation having a value of 1.55° is achieved. Furthermore, it can be gathered from the diagram of FIG. 5B that the value of the angle of rotation is low for relative pupil coordinates (−1,0) and (1,0), i.e. in “three o'clock-” and “nine o'clock-”regions of the exit pupil.

A circumferential distribution of the angle of rotation in the pupil plane of the projection optical unit exhibits four zero crossings of the value of the angle of rotation. More specifically, a circumferential distribution of the angle of rotation in the pupil plane of the projection optical unit 500 exhibits a zero crossing close to, i.e. within 10° on the circumference of both positive and negative x-axis, respectively, and also a zero crossing on both positive and negative y-axis, respectively.

Relatively the higher values of the angle of rotation around (4-6°) are obtained for other regions (namely 1:30 o'clock and 10:30 o'clock of the pupil). However, as already discussed above, considering that typical polarized illumination settings used in the projection exposure apparatus of FIG. 1 look as schematically shown in FIG. 9A-9C, it can be seen that the achieved undesired polarization rotation is kept low just for the optically used region of the pupil (i.e. the illumination poles), while the relatively larger values of the angle of rotation obtained for the other regions of the pupil correspond to non-used regions and therefore have no negative impact on the optical performance of the system.

FIG. 6A shows a further embodiment of a projection optical unit 600. The optical design data of the reflection surfaces of the mirrors in the projection optical unit of FIG. 6A can be gathered from Tables 21-25. Table 21 provides several basic data of the design data of the projection optical unit 600. Table 22 indicates vertex point radii (Radius_(x), Radius_(y)) and refractive power values (Power_(x), Power_(y)) for the optical surfaces of the optical components. Table 23 indicates the Decentring (location and angle) of the respective mirror surface as well as of the object field, the aperture stop and the image field with respect to the surface normal on the object field in the object plane OP, the surface normal being in the centre of the object plane. Table 24 indicates the free form coefficients of the surfaces. Table 25 indicates the coordinates of the aperture stop edge.

The projection optical unit 600 according to FIG. 6A has a total of nine mirrors, which are numbered consecutively by M1 to M9 in the order of the beam path of the imaging light, proceeding from the object field. In the case of the projection optical unit according to FIG. 6A, the mirrors M1, M8 and M9 are embodied as normal incidence mirrors, that is to say as mirrors on which the imaging light 601 is incident with an angle of incidence that is less than 45°. Overall, the projection optical unit 600 according to FIG. 6A thus has three normal incidence mirrors M1, M8 and M9. The mirrors M2 to M7 are mirrors for grazing incidence of the illumination light as defined above. A typical angle of incidence of the individual rays of the imaging light 601 on the mirrors M2 to M7 for grazing incidence lies in the region of 80°. Overall, the projection optical unit 600 according to FIG. 6A has exactly six mirrors M2 to M7 for grazing incidence.

FIG. 6B represents a diagram showing the distribution of the angle of rotation due to the geometrical polarization rotation from the entrance area to the exit area of the projection optical unit 600 according to the embodiment of FIG. 6A across the exit pupil and in relative pupil coordinates (said coordinates being 0 at the centre of the exit pupil and 1 at the outer edge of the exit pupil). For relative pupil coordinate (1,0), an angle of rotation having a value of 2.76° is achieved.

Furthermore, a circumferential distribution of the angle of rotation in the pupil plane of the projection optical unit exhibits four zero crossings of the value of the angle of rotation. More specifically, a circumferential distribution of the angle of rotation in the pupil plane of the projection optical unit 600 exhibits a zero crossing within 30° of both positive and negative x-axis, respectively, and also a zero crossing within 10° of both positive and negative y-axis respectively.

FIG. 7A shows a further embodiment of a projection optical unit 700. The optical design data of the reflection surfaces of the mirrors in the projection optical unit of FIG. 7A can be gathered from Tables 26-30. Table 26 provides several basic data of the design data of the projection optical unit 700. Table 27 indicates vertex point radii (Radius_(x), Radius_(y)) and refractive power values (Power_(x), Power_(y)) for the optical surfaces of the optical components. Table 28 indicates the Decentring (location and angle) of the respective mirror surface as well as of the object field, the aperture stop and the image field with respect to the surface normal on the object field in the object plane OP, the surface normal being in the centre of the object plane. Table 29 indicates the free form coefficients of the surfaces. Table 30 indicates the coordinates of the aperture stop edge.

In the case of the projection optical unit 700 according to FIG. 7A, the mirrors M1, M9 and M10 are embodied as NI-mirrors as defined above. Overall, the projection optical unit 700 according to FIG. 7A thus has three NI-mirrors M1, M9 and M10. The mirrors M2-M8 are GI-mirrors as defined above. Overall, the projection optical unit 700 according to FIG. 7A has exactly seven mirrors M2-M8 for grazing incidence.

FIG. 7B represents a diagram showing the distribution of the angle of rotation due to the geometrical polarization rotation from the entrance area to the exit area of the projection optical unit 700 according to the embodiment of FIG. 7A across the exit pupil and in relative pupil coordinates (said coordinates being 0 at the centre of the exit pupil and 1 at the outer edge of the exit pupil). For relative pupil coordinate (1,0) an angle of rotation having a value of less than 0.01° is achieved. Furthermore, a circumferential distribution of the angle of rotation in the pupil plane of the projection optical unit exhibits four zero crossings of the value of the angle of rotation. More specifically, a circumferential distribution of the angle of rotation in the pupil plane of the projection optical unit 700 exhibits a zero crossing on both positive and negative x-axis within 30°, respectively, and also a zero crossing on both positive and negative y-axis within 10°, respectively.

FIG. 8A shows a further embodiment of a projection optical unit 800. The optical design data of the reflection surfaces of the mirrors in the projection optical unit of FIG. 8A can be gathered from Tables 31-35. Table 31 provides several basic data of the design data of the projection optical unit 800. Table 32 indicates vertex point radii (Radius_(x), Radius_(y)) and refractive power values (Power_(x), Power_(y)) for the optical surfaces of the optical components. Table 33 indicates the Decentring (location and angle) of the respective mirror surface as well as of the object field, the aperture stop and the image field with respect to the surface normal on the object field in the object plane OP, the surface normal being in the centre of the object plane. Table 34 indicates the free form coefficients of the surfaces. Table 35 indicates the coordinates of the aperture stop edge.

The principle design of the projection optical unit 800 is similar to projection optical unit 400 of FIG. 4A or projection optical unit 500 of FIG. 5A, for example regarding number of GI- or NI-mirrors, respectively. However, the projection optical unit 800 has a numerical aperture of NA=0.55.

FIG. 8B represents a diagram showing the distribution of the angle of rotation due to the geometrical polarization rotation from the entrance area to the exit area of the projection optical unit 800 according to the embodiment of FIG. 8A across the exit pupil and in relative pupil coordinates (said coordinates being 0 at the centre of the exit pupil and 1 at the outer edge of the exit pupil). For relative pupil coordinate (1,0) an angle of rotation having a value of less than 0.01° is achieved. Furthermore, a circumferential distribution of the angle of rotation in the pupil plane of the projection optical unit exhibits four zero crossings of the value of the angle of rotation. More specifically, a circumferential distribution of the angle of rotation in the pupil plane of the projection optical unit 800 exhibits a zero crossing on both positive and negative x-axis, respectively, and also a zero crossing on both positive and negative y-axis, respectively.

TABLE 36 Whole System final two mirrors Ratio projection (=“A + B”) (=“B”) |Z3A + Z3B|/ optical unit |Z3| |Z6| |Z3| |Z6| |Z3B| FIG. 2A 12.59 8.71 16.42 7.62 0.766 FIG. 3A 1.98 5.30 17.72 5.36 0.112 FIG. 4A 8.46 6.68 12.90 5.72 0.655 FIG. 5A 2.57 5.69 14.75 5.21 0.174 FIG. 6A 1.53 5.73 13.28 5.28 0.116 FIG. 7A 0.13 1.63 8.43 1.94 0.015 FIG. 8A 0.16 1.14 9.78 0.99 0.016 WO 2019/057803 11.96 4.51 8.27 2.81 1.445 A1 FIG. 3 WO 2019/057803 19.06 5.22 8.16 2.19 2.337 A1 FIG. 5 WO 2019/057803 5.95 1.47 6.99 1.84 0.852 A1 FIG. 4

As can be gathered from Table 36, the criterion |Z3A+Z3B|<0.2*|Z3B| is fulfilled for the embodiments of FIG. 3A, FIG. 5A, FIG. 6A, FIG. 7A and FIG. 8A. As already discussed before, this means that the resulting geometrical polarization rotation in the first part A (including first group of mirrors (M1 . . . Mn−2)) will substantially compensate for the geometrical polarization rotation in the part B (including second group of mirrors (Mn−1, Mn)). Furthermore, even in the embodiments of FIG. 2A and FIG. 4A significant improvements regarding this compensation are achieved if compared with the prior art according to WO 2019/057803 A1.

TABLE 37 Absolute value of geometrical projection polarization rotation at optical unit relative pupil coordinates (−1, 0) 35°*NA^(4.5) FIG. 2A 16.45° 9.59° FIG. 3A 0.95° 9.59° FIG. 4A 7.03° 9.59° FIG. 5A 1.55° 9.59° FIG. 6A 2.76° 9.59° FIG. 7A 0.00° 2.38° FIG. 8A 0.00° 2.38° WO 2019/057803 A1 13.09° 2.38° FIG. 3 WO 2019/057803 A1 6.28° 2.38° FIG. 4 WO 2019/057803 A1 18.34° 2.38° FIG. 5

Even though the disclosure has been described on the basis of specific embodiments, numerous variations and alternative embodiments are evident to the person skilled in the art, e.g. through combination and/or exchange of features of individual embodiments. Accordingly, it goes without saying for the person skilled in the art that such variations and alternative embodiments are concomitantly encompassed by the present disclosure, and the scope of the disclosure is restricted only within the meaning of the accompanying patent claims and the equivalents thereof.

Design Data for FIG. 2A

TABLE 1 for projection optical unit 200 of FIG. 2A: Numerical Aperture 0.75 Magnification in x-direction 0.233 Magnification in y-direction 0.125 Chief Ray angle 5.50° Wavelength 13.5 nm Image field size in x-direction 26.0 mm Image field size in y-direction 1.0 mm Average Wavefront-RMS 8.57 mλ

TABLE 2 for projection optical unit 200 of FIG. 2A: Radii of Surfaces Radius_(x) Power_(x) Radius_(y) Power_(y) [mm] [1/mm] [mm] [1/mm] M01 −5865.81523622 0.00032883 −2067.88312069 0.00093278 M02 −63374.79828420 0.00000395 21837.47821316 −0.00001146 M03 −8366.11833895 0.00004865 4289.09824586 −0.00009489 M04 −5869.08993915 0.00004517 −12503.51063260 0.00002120 M05 −1600.48535592 0.00029099 −3932.63888021 0.00011843 M06 −975.96408516 0.00047086 −1810.95688936 0.00025376 M07 −1283.34039039 0.00021340 7378.23227667 −0.00003712 M08 −5673.23901632 0.00009446 −3258.25153471 0.00016447 M09 −4558.08819792 0.00014250 2055.71799723 −0.00031595 M10 −12523.98260704 0.00013011 345.59408179 −0.00471510 M11 −966.31588781 0.00205638 −770.02679127 0.00258057

TABLE 3 for projection optical unit 200 of FIG. 2A: Decentring (location, angle) of surfaces Dx [mm] Dy [mm] Dz [mm] Reticle 0.000000000 0.000000000 0.000000000 M01 0.000000000 206.342031983 2142.943936469 M02 0.000000000 751.141443466 968.297457580 M03 0.000000000 1108.062138516 663.676987878 M04 0.000000000 1635.726818408 442.413885804 M05 0.000000000 2111.326138465 406.569727272 M06 0.000000000 2679.156490918 589.348742919 M07 0.000000000 2934.877558834 814.689341392 M08 0.000000000 3039.101069571 1089.907055701 M09 0.000000000 3022.041362790 1355.258392494 M10 0.000000000 3428.901782539 2177.702268715 Stop 0.000000000 3402.152487320 2082.218345511 M11 −0.000000000 3255.897127319 1560.147186330 Wafer 0.000000000 3255.896114501 2296.253294176 αx [°] αy [°] αz [°] Reticle 0.000000000 0.000000000 0.000000000 M01 9.690902525 0.000000000 0.000000000 M02 −52.798949070 180.000000000 0.000000000 M03 148.385382126 0.000000000 0.000000000 M04 −13.529777533 180.000000000 0.000000000 M05 186.766417434 0.000000000 0.000000000 M06 29.614629045 180.000000000 0.000000000 M07 235.322492812 0.000000000 0.000000000 M08 81.468563046 180.000000000 0.000000000 M09 78.678541182 0.000000000 0.000000000 M10 −20.985690966 0.000000000 180.000000000 Stop 164.350076886 −0.000000000 −0.000000000 M11 172.175077860 −0.000000000 0.000000000 Wafer 0.000078834 0.000000000 180.000000000

TABLE 4 for projection optical unit 200 of FIG. 2a: Free form coefficients of surfaces Coefficient Formula M01 M02 M03 C7 x² y −1.2467075401e−08 −1.3348773466e−08  7.2872626293e−08 C9 y³ −2.6953264654e−08 5.4522752705e−08 2.6169253486e−08 C10 x⁴ −2.8831646046e−12 1.1120232774e−10 8.3530873147e−11 C12 x² y²  8.7150874395e−11 −4.0947377819e−11  −6.8360178422e−11  C14 y⁴ −1.0666167107e−13 1.4339596189e−10 −3.6577598249e−10  C16 x⁴ y −2.7441641255e−14 −5.3346116597e−14  −3.0710710509e−13  C18 x² y³ −1.2726847989e−13 −7.9668038501e−14  −3.3418102422e−13  C20 y⁵  3.4096328456e−14 3.7541752225e−13 3.4404548810e−13 C21 x⁶  2.5253493969e−18 7.0684786785e−17 −8.4079475057e−17  C23 x⁴ y² −4.9978048857e−18 −1.4520801323e−16  −1.3998707586e−16  C25 x² y⁴  2.1956981883e−17 −8.4757253555e−18  9.1295648997e−16 C27 y⁶  6.1687302543e−16 1.0524429937e−15 −1.8570296448e−16  C29 x⁶ y  1.8197881520e−20 −2.4040215447e−19  −2.1766284207e−20  C31 x⁴ y³  2.1373260866e−19 −5.2926133326e−19  2.2749446644e−18 C33 x² y⁵ −6.9752427252e−19 6.3832431855e−20 −1.2828010170e−18  C35 y⁷  3.8267458162e−20 2.9024294606e−18 1.0653505056e−18 C36 x⁸ −1.4480426797e−23 −2.7727925287e−22  −2.0063721628e−22  C38 x⁶ y² −1.4406031959e−22 −2.3939935190e−22  1.1337619611e−21 C40 x⁴ y⁴  4.7370199633e−22 −3.7474615537e−22  −1.6921160199e−21  C42 x² y⁶  1.7248831546e−22 2.9766960337e−22 1.0472902500e−20 C44 y⁸ −4.0532377358e−20 4.5184111748e−21 2.1987645795e−20 C46 x⁸ y  1.8455150442e−25 5.1241278232e−24 2.7550084650e−25 C48 x⁶ y³  1.1327621011e−24 1.4806901695e−23 −1.7730948982e−23  C50 x⁴ y⁵ −3.3882508058e−26 1.6805001248e−23 −4.9544283590e−23  C52 x² y⁷ −1.4219723243e−23 −3.4237769863e−24  2.9346082042e−23 C54 y⁹  1.4149924319e−23 −8.4824871060e−24  1.3561832619e−22 C55 x¹⁰  4.9751179229e−28 6.3407118335e−27 2.8338518017e−27 C57 x⁸ y²  4.7112576339e−27 −6.9025162063e−27  −1.2277211414e−27  C59 x⁶ y⁴ −4.5961567305e−27 2.7190597791e−26 −5.2905365082e−26  C61 x⁴ y⁶ −5.5773662955e−26 5.2462314959e−26 −2.5445274816e−25  C63 x² y⁸  2.0082504680e−25 −6.1081784301e−26  −5.9730875595e−25  C65 y¹⁰  2.2199203861e−24 −4.8557028558e−26  −2.3348782296e−24  C67 x¹⁰ y −3.7476656440e−30 −7.6485672979e−29  1.4947673172e−29 C69 x⁸ y³ −2.3612566194e−29 −2.4774184419e−28  2.2980316977e−28 C71 x⁶ y⁵  2.2187607217e−29 −3.8120053547e−28  1.3217596278e−27 C73 x⁴ y⁷  5.6100070166e−28 −2.4974317927e−28  2.3177009413e−27 C75 x² y⁹  2.0618081612e−27 −2.6148149268e−28  −5.5909056888e−27  C77 y¹¹ −2.7963329316e−27 2.0179748939e−29 −8.7279402890e−27  C78 x¹² −7.4572827042e−33 −4.4335237142e−32  −1.9168206138e−33  C80 x¹⁰ y² −8.5474716742e−32 1.4379898868e−31 −4.2609800121e−32  C82 x⁸ y⁴ −9.7649702863e−32 −2.1619359366e−31  7.2298850863e−31 C84 x⁶ y⁶  1.0909533068e−30 −1.4261848410e−30  5.5278484571e−30 C86 x⁴ y⁸  4.3562596563e−31 −1.1108019099e−30  1.3375757200e−29 C88 x² y¹⁰ −1.8513248324e−29 −2.6661306772e−32  2.8874205794e−29 C90 y¹² −7.9907007621e−29 6.5273825658e−31 9.7434965821e−29 C92 x¹² y  4.6491819082e−35 6.2946912638e−34 −1.8258273973e−34  C94 x¹⁰ y³  3.2696788977e−34 2.3921661224e−33 −1.9530306250e−33  C96 x⁸ y⁵  3.2943984047e−35 4.8919543389e−33 −1.6350292078e−32  C98 x⁶ y⁷ −8.5405894077e−33 3.6166305683e−33 −5.6396440055e−32  C100 x⁴ y⁹ −4.0709966516e−32 2.1558509865e−33 −4.6125475690e−32  C102 x² y¹¹ −1.0107878822e−31 2.5105814333e−33 3.2773437248e−31 C104 y¹³  1.2064533186e−31 2.2238147891e−33 3.2764546096e−31 C105 x¹⁴  6.3869752879e−38 1.9267680796e−37 −6.1173550883e−38  C107 x¹² y²  9.1504573841e−37 −1.4859024048e−36  2.7620723221e−37 C109 x¹⁰ y⁴  3.3617202635e−36 3.1707721165e−37 −5.6617008379e−36  C111 x⁸ y⁶ −6.1736717784e−36 1.7203953853e−35 −6.3584720655e−35  C113 x⁶ y⁸ −3.0501766360e−35 2.6161789349e−35 −2.4679393483e−34  C115 x⁴ y¹⁰  1.3612671094e−34 1.5370839273e−35 −3.6650099068e−34  C117 x² y¹²  8.7866861356e−34 3.6940452189e−36 −8.3324769412e−34  C119 y¹⁴  1.9021319268e−33 4.1320176184e−36 −2.2908549281e−33  C121 x¹⁴ y −3.1724176080e−40 −3.0807880840e−39  9.2385422123e−40 C123 x¹² y³ −2.3810083642e−39 −1.2424284034e−38  9.3884607054e−39 C125 x¹⁰ y⁵ −2.2954013538e−39 −2.9276025660e−38  1.0258041544e−37 C127 x⁸ y⁷  6.8833317428e−38 −1.3241913303e−38  5.0251757855e−37 C129 x⁶ y⁹  4.8297911637e−37 1.3699222053e−38 1.3274285064e−36 C131 x⁴ y¹¹  1.4452002485e−36 1.1315058418e−38 −4.9607731988e−37  C133 x² y¹³  2.7654094061e−36 −1.8600600480e−38  −9.5896503707e−36  C135 y¹⁵ −2.6915220538e−36 4.8587893131e−39 −7.7241296372e−36  C136 x¹⁶ −3.2793717012e−43 −6.3852937662e−43  3.2595223358e−43 C138 x¹⁴ y² −5.5830068597e−42 8.3494970336e−42 −6.5706319173e−43  C140 x¹² y⁴ −3.4791199924e−41 1.0109081574e−41 2.6770336445e−41 C142 x¹⁰ y⁶ −4.3291872187e−41 −8.5936562967e−41  3.9604946354e−40 C144 x⁸ y⁸  1.6767359119e−40 −1.9152785634e−40  2.1226841939e−39 C146 x⁶ y¹⁰ −5.6292179529e−40 −1.4700794960e−40  5.4757816113e−39 C148 x⁴ y¹² −7.1918752381e−39 −3.3947448651e−41  4.8572679588e−39 C150 x² y¹⁴ −2.3139623471e−38 −8.2864415218e−41  9.1762922206e−39 C152 y¹⁶ −2.8589050266e−38 2.8656510927e−42 2.7944022154e−38 C154 x¹⁶ y  1.1477662036e−45 7.9930480890e−45 −2.2605783918e−45  C156 x¹⁴ y³  9.2616541272e−45 3.4010054371e−44 −2.3674050015e−44  C158 x¹² y⁵  1.2851129925e−44 8.3336097293e−44 −3.2024594546e−43  C160 x¹⁰ y⁷ −2.7867510516e−43 −4.8400370596e−44  −1.9990836609e−42  C162 x⁸ y⁹ −2.6947148783e−42 −2.8140377193e−43  −7.9826907998e−42  C164 x⁶ y¹¹ −1.0858659838e−41 −2.0682298229e−43  −1.4165695961e−41  C166 x⁴ y¹³ −2.4853387780e−41 2.9582280271e−44 3.1801923441e−41 C168 x² y¹⁵ −3.9711405260e−41 −1.4308615014e−43  1.4697289355e−40 C170 y¹⁷  3.2641760546e−41 −2.4317654285e−45  1.0630088012e−40 C171 x¹⁸  9.3807609535e−49 1.6378787333e−48 −6.4808506262e−49  C173 x¹⁶ y²  1.8283088759e−47 −2.4206936389e−47  −1.1563651995e−49  C175 x¹⁴ y⁴  1.5953422359e−46 −6.2271486286e−47  −7.1113764658e−47  C177 x¹² y⁶  5.6583172524e−46 1.3937263454e−46 −1.2634373210e−45  C179 x¹⁰ y⁸  7.6229354122e−46 4.5318249979e−46 −8.5225093411e−45  C181 x⁸ y¹⁰  3.1739238245e−45 4.8998793816e−46 −3.3084943577e−44  C183 x⁶ y¹²  3.4177288975e−44 4.0161527675e−46 −5.7411650994e−44  C185 x⁴ y¹⁴  1.4252492265e−43 3.3762735692e−46 5.6542785431e−45 C187 x² y¹⁶  3.1868584702e−43 −1.2274024014e−46  5.0891077426e−44 C189 y¹⁸  2.3977551585e−43 −7.8790612609e−48  −1.2166288242e−43  C191 x¹⁸ y −1.7128948485e−51 −8.3805817185e−51  2.2125779066e−51 C193 x¹⁶ y³ −1.4883568540e−50 −3.7077347056e−50  2.4521093939e−50 C195 x¹⁴ y⁵ −2.3912620643e−50 −7.5292211098e−50  3.9284796942e−49 C197 x¹² y⁷  4.8593150694e−49 3.5431064161e−49 2.9667556677e−48 C199 x¹⁰ y⁹  5.6888315159e−48 1.3222909580e−48 1.5482033905e−47 C201 x⁸ y¹¹  3.0206266472e−47 1.6349217442e−48 4.9386213025e−47 C203 x⁶ y¹³  8.7406145932e−47 1.0908913057e−48 3.9694377865e−47 C205 x⁴ y¹⁵  1.7340860718e−46 5.1552747781e−49 −3.4005094327e−46  C207 x² y¹⁷  2.3521148980e−46 −4.6486529691e−50  −9.4109560003e−46  C209 y¹⁹ −1.6709407871e−46 −7.6701722815e−51  −6.3098039019e−46  C210 x²⁰ −1.1468848753e−54 −1.7457410846e−54  4.3570623621e−55 C212 x¹⁸ y² −2.5001515592e−53 2.8668298254e−53 1.7728301296e−54 C214 x¹⁶ y⁴ −2.7651704796e−52 1.1765705998e−52 8.2674940144e−53 C216 x¹⁴ y⁶ −1.5117327693e−51 1.3842730364e−52 1.5956297553e−51 C218 x¹² y⁸ −5.1705595202e−51 4.4714717095e−52 1.3173465132e−50 C220 x¹⁰ y¹⁰ −1.6792580509e−50 1.0920179092e−51 6.6249699918e−50 C222 x⁸ y¹² −8.3711007658e−50 1.1685063976e−51 1.9755952480e−49 C224 x⁶ y¹⁴ −3.6866845106e−49 6.7111631193e−52 1.7123109378e−49 C226 x⁴ y¹⁶ −1.0443243640e−48 2.5054124967e−52 −5.8864825581e−49  C228 x² y¹⁸ −1.8004435241e−48 −3.5724159060e−54  −1.3320070960e−48  C230 y²⁰ −8.3786576508e−49 −2.7757694088e−54  −3.4128789070e−49  Coefficient Formula M04 M05 M06 C7 x² y −3.6700133384e−08  1.7042974089e−07 −2.0480366437e−07 C9 y³ −5.7287310877e−08  1.8329534520e−07 −1.3351148892e−07 C10 x⁴ −1.3078966541e−11 −7.3246062700e−11 −3.6848147529e−11 C12 x² y² −1.4203917227e−10 −2.7831729760e−10  1.9290327097e−10 C14 y⁴  7.5743698221e−12  3.0191416398e−10 −4.4112925525e−10 C16 x⁴ y −5.1658206112e−14  2.0676363930e−13 −4.0530454997e−14 C18 x² y³  7.0418551844e−14 −7.8216923265e−13  3.9854901706e−13 C20 y⁵ −3.5747190902e−13  4.1867438787e−13 −1.1829911786e−12 C21 x⁶ −1.0754632158e−16 −7.3656042742e−17  3.5200753218e−17 C23 x⁴ y²  1.1215826578e−16  6.9545794086e−16  1.5296672235e−16 C25 x² y⁴ −1.1651146483e−15 −1.4026048310e−15  2.4919127685e−15 C27 y⁶  2.3649213987e−16  1.1661669079e−15 −2.7411025624e−15 C29 x⁶ y −4.9440628101e−20 −1.9250085058e−19 −2.8747932278e−19 C31 x⁴ y³ −1.4468724292e−18  1.5135432501e−18  1.0503981929e−18 C33 x² y⁵  7.0824206121e−19 −3.1788955639e−18  1.0399666150e−17 C35 y⁷ −2.6840255909e−18  5.7604630484e−18 −1.1014997984e−17 C36 x⁸  2.6294592498e−22 −1.9373546658e−22  7.6838924127e−23 C38 x⁶ y² −1.0350678913e−21 −2.4460077129e−22 −2.7847668393e−22 C40 x⁴ y⁴  5.0543353236e−22  1.6196049150e−21  3.8995189582e−21 C42 x² y⁶ −1.1205770492e−20 −2.4062532838e−20  4.1506251632e−20 C44 y⁸  2.1694724585e−21  2.9586095393e−20 −1.1491259381e−19 C46 x⁸ y  8.4213689375e−27 −8.9827517875e−25  2.0909924066e−24 C48 x⁶ y³ −1.7367668878e−24  4.1150494318e−24 −7.8425379783e−24 C50 x⁴ y⁵ −2.3985047039e−23  3.2236798153e−23  8.5843437502e−26 C52 x² y⁷  1.7287082428e−24 −1.3290724685e−22  4.4033566923e−22 C54 y⁹ −1.2823183278e−23  1.6040369832e−22  1.9095650545e−22 C55 x¹⁰  2.4238747769e−28  5.9096193178e−28 −8.1084224761e−28 C57 x⁸ y² −1.4982322594e−27 −6.5645236630e−27 −1.6423935345e−27 C59 x⁶ y⁴ −2.1390901048e−26 −5.5045862363e−27 −1.0430999339e−25 C61 x⁴ y⁶  1.6681724215e−26  2.9227815738e−25 −1.8895699255e−25 C63 x² y⁸ −7.0237136767e−26 −6.7722687188e−25  4.0505828100e−24 C65 y¹⁰  2.4333214003e−26 −2.3808964965e−25  2.3560154932e−23 C67 x¹⁰ y −1.6918059411e−30  5.8570977465e−30 −6.2239027538e−30 C69 x⁸ y³  1.8829768076e−29 −3.2613936578e−29  2.8552709311e−29 C71 x⁶ y⁵  1.4690425614e−28 −3.3152880116e−28 −2.4400121243e−29 C73 x⁴ y⁷ −8.0097778566e−30  1.5104915598e−27 −4.2676022696e−27 C75 x² y⁹  2.7148958160e−29 −2.1539397256e−28 −1.8896091404e−26 C77 y¹¹ −6.5704559491e−28 −1.6565619517e−27  8.1614231345e−26 C78 x¹² −1.0712008455e−32  2.4153132799e−33  1.4680669517e−32 C80 x¹⁰ y²  1.6238209942e−32  2.1031045010e−32  5.8354605559e−32 C82 x⁸ y⁴  1.5166353717e−31  2.0972339221e−31  1.3915893190e−30 C84 x⁶ y⁶ −8.6754341381e−32 −2.4841441959e−30  6.8829183770e−30 C86 x⁴ y⁸ −1.1110462694e−30  4.7852615681e−31 −5.4514331977e−29 C88 x² y¹⁰ −1.8159396617e−30  8.5175413179e−30 −6.6867616452e−28 C90 y¹² −1.2304810888e−30  1.6215783997e−29 −1.7864360072e−27 C92 x¹² y  6.3527779161e−36 −1.6974774937e−35  2.2745618876e−35 C94 x¹⁰ y³ −2.3849048526e−34  5.3268848016e−36  3.1502174681e−34 C96 x⁸ y⁵ −2.2036381819e−33  2.6749960357e−33  2.8708428491e−33 C98 x⁶ y⁷ −6.5336046556e−33 −1.6419378208e−33  1.1017588724e−32 C100 x⁴ y⁹ −6.3070218917e−33 −1.1596757316e−32  8.5522668869e−32 C102 x² y¹¹ −1.4693343154e−34 −7.2636980661e−32 −1.7366438020e−30 C104 y¹³  1.4976526361e−32 −2.7264782440e−32 −1.0089269760e−29 C105 x¹⁴  5.6308419542e−38 −3.2252557680e−38 −1.1454353459e−37 C107 x¹² y² −1.4108599096e−37  1.0729332416e−37 −4.9647410419e−37 C109 x¹⁰ y⁴ −2.5872606079e−36 −2.4047735053e−36 −9.7328562946e−36 C111 x⁸ y⁶ −1.1883017107e−35  6.0191831848e−36 −1.0369036968e−34 C113 x⁶ y⁸ −1.0443291919e−35  3.4710799755e−35 −1.2483255673e−34 C115 x⁴ y¹⁰  2.7590767087e−35  9.4769583335e−35  6.7445152276e−33 C117 x² y¹²  1.7266433307e−35  1.8927177921e−34  4.0443316595e−32 C119 y¹⁴  6.7915420727e−35 −6.9613090075e−35  6.5018048380e−32 C121 x¹⁴ y −5.0649726310e−41  2.3769845183e−41 −2.9051580950e−40 C123 x¹² y³  5.5259332201e−40  9.5354582017e−40 −4.8209218514e−39 C125 x¹⁰ y⁵  6.3817821378e−39 −7.6767231566e−39 −5.7637625524e−38 C127 x⁸ y⁷  3.9909861483e−38 −5.4329932699e−38 −3.0504362990e−37 C129 x⁶ y⁹  1.0102156483e−37 −1.7671082312e−37 −1.8703499935e−37 C131 x⁴ y¹¹  4.2886788351e−38 −1.5958102538e−37  2.6393608717e−35 C133 x² y¹³  4.9881331722e−38  1.1218556828e−37  2.1984786100e−34 C135 y¹⁵ −3.1960378941e−37 −9.3528611633e−39  4.8507459279e−34 C136 x¹⁶ −1.4358934165e−43  1.4701033587e−43  4.3882643258e−43 C138 x¹⁴ y²  3.9748427477e−43 −1.2195424014e−42  1.4153467198e−42 C140 x¹² y⁴  1.3749398106e−41  9.6469333394e−42  2.7823982873e−41 C142 x¹⁰ y⁶  1.0297847080e−40  3.6010638137e−41  5.0247433350e−40 C144 x⁸ y⁸  2.9601396795e−40  1.1763473394e−40  3.6995636298e−39 C146 x⁶ y¹⁰ −1.2777609073e−41  4.5950186874e−40 −1.2980567669e−38 C148 x⁴ y¹² −5.1048564764e−40 −7.7445091316e−40 −2.8355333367e−37 C150 x² y¹⁴ −5.0782162527e−40 −1.3193572817e−39 −9.4257509537e−37 C152 y¹⁶ −1.4579060460e−39  2.0799704512e−39 −1.5038541695e−36 C154 x¹⁶ y  2.0154821528e−46  2.6647580751e−47  1.7361446270e−45 C156 x¹⁴ y³  6.8874602347e−46 −3.4954067719e−45  2.3477810371e−44 C158 x¹² y⁵  1.9559473702e−44 −1.9389410142e−44  3.4450346821e−43 C160 x¹⁰ y⁷  7.1985425649e−44  2.3035504536e−44  3.4866968576e−42 C162 x⁸ y⁹ −2.8996546511e−43 −3.7446334389e−43  1.6108654591e−41 C164 x⁶ y¹¹ −1.4013647138e−42  5.3208318576e−43 −1.1037996511e−40 C166 x⁴ y¹³ −1.8193256206e−42  6.1157061180e−43 −2.0351301098e−39 C168 x² y¹⁵ −1.7091682461e−42  4.7103532526e−42 −8.2550488067e−39 C170 y¹⁷  2.5916836012e−42 −6.1904614785e−42 −1.5401598688e−38 C171 x¹⁸  2.0012595755e−49 −3.5645323616e−49 −6.9586090867e−49 C173 x¹⁶ y² −2.6735963566e−49  4.0070798473e−48  1.8520254700e−48 C175 x¹⁴ y⁴ −3.1437136099e−47 −6.4044322083e−48  4.4793398010e−48 C177 x¹² y⁶ −2.9944153145e−46 −3.0655564683e−47 −3.7032556350e−46 C179 x¹⁰ y⁸ −1.6660483412e−45  7.3432840763e−47 −7.0773712917e−45 C181 x⁸ y¹⁰ −3.2149495209e−45 −1.0382631617e−46 −2.6131092666e−44 C183 x⁶ y¹² −2.0639664214e−45 −1.3652668732e−46  3.1412245022e−43 C185 x⁴ y¹⁴  1.2286527783e−45 −1.5605497514e−45  1.7551025373e−42 C187 x² y¹⁶ −5.1188906429e−46  2.1531613890e−45  5.7465284774e−43 C189 y¹⁸  1.5227006124e−44 −1.3796309583e−44  8.7976462638e−42 C191 x¹⁸ y −3.2820014708e−52 −1.8126270057e−52 −2.9917983911e−51 C193 x¹⁶ y³ −6.6284086455e−51 −1.4583083501e−51 −3.9062227880e−50 C195 x¹⁴ y⁵ −1.6282458495e−49  2.9648369767e−50 −6.7483675395e−49 C197 x¹² y⁷ −1.3780473324e−48  2.0776249555e−50 −1.0037974646e−47 C199 x¹⁰ y⁹ −4.5911698188e−48 −8.8282447911e−50 −7.9990423389e−47 C201 x⁸ y¹¹ −5.4845962701e−48 −6.9971795329e−49 −2.1593654423e−46 C203 x⁶ y¹³  7.0379329679e−48  3.0513498842e−48  5.3872983443e−45 C205 x⁴ y¹⁵  1.1819083873e−48 −5.1618223070e−48  3.9160602719e−44 C207 x² y¹⁷  1.8192701726e−47 −1.7356530650e−47  1.1308312031e−43 C209 y¹⁹ −1.2454738189e−47  7.3456802311e−47  2.7995760313e−43 C210 x²⁰ −1.3790480398e−55  3.6328442047e−55  2.6839428824e−55 C212 x¹⁸ y² −1.2386681712e−54 −3.1444934676e−54 −9.7338901310e−54 C214 x¹⁶ y⁴ −8.8626427437e−54  1.3804123481e−53 −1.1555404922e−52 C216 x¹⁴ y⁶ −2.9238385754e−52 −7.2456197426e−53 −1.9677199453e−51 C218 x¹² y⁸ −1.3197597774e−51  6.7553728490e−53 −2.0738568955e−50 C220 x¹⁰ y¹⁰ −4.5486200869e−51  7.4420983603e−52 −1.4263767011e−49 C222 x⁸ y¹²  1.9351560669e−51 −2.6267265497e−51 −2.0530374273e−49 C224 x⁶ y¹⁴  2.0461363631e−53  5.0128044498e−51  1.3472678906e−47 C226 x⁴ y¹⁶  1.8658293344e−50 −4.6692918177e−51  7.2276371737e−47 C228 x² y¹⁸ −3.7612810227e−53  2.7593126858e−50  2.3234380683e−46 C230 y²⁰ −4.7360117086e−50 −8.3509865344e−50  5.6080959191e−46 Coefficient Formula M07 M08 M09 C7 x² y 2.8532185189e−07 2.4061929143e−07 −4.0775365688e−08 C9 y³ −4.5488655424e−07  2.2560132539e−07 −2.7379463806e−07 C10 x⁴ 1.3083632819e−11 5.9615095385e−11 −1.6038386672e−10 C12 x² y² −1.0484017643e−09  1.8554389819e−10 −1.0961343130e−09 C14 y⁴ 1.8996982820e−09 −3.5056498342e−10   3.3765922105e−11 C16 x⁴ y −4.6317598744e−13  4.4552157676e−13 −7.9855804676e−13 C18 x² y³ 3.2314583170e−12 2.8042795574e−12 −7.0220759554e−12 C20 y⁵ −4.5588666977e−11  1.8028731397e−12 −1.7398088518e−12 C21 x⁶ −1.9124329121e−16  −7.5794191403e−16   2.1893082964e−15 C23 x⁴ y² −3.5839736697e−15  −1.3549434157e−15  −6.5079186813e−15 C25 x² y⁴ −1.7483598425e−13  −1.4728274545e−15  −7.4386360584e−15 C27 y⁶ 2.3135062742e−14 −4.2680681592e−15   3.6373247624e−15 C29 x⁶ y −6.8891899026e−18  −3.9058789300e−18   3.3130026057e−17 C31 x⁴ y³ −2.3313296927e−16  1.1961183241e−17  1.6410032269e−17 C33 x² y⁵ 4.7971439136e−16 3.4678894092e−17 −3.6833219506e−17 C35 y⁷ −5.6401667395e−16  2.7103550207e−17 −7.9177802849e−17 C36 x⁸ −2.4317709323e−21  −5.0437952188e−21   9.2271219909e−20 C38 x⁶ y² −1.0919948308e−19  −3.2698263728e−20   5.8623247451e−19 C40 x⁴ y⁴ 1.6814114466e−18 −4.3596330218e−20   4.2800966543e−19 C42 x² y⁶ −1.5491795995e−18  −1.1015132994e−19  −3.6707024772e−20 C44 y⁸ −1.3330810569e−18  −1.3386882215e−19   1.5567218575e−18 C46 x⁸ y −4.2719693341e−24  −7.7580502574e−23   4.1643168273e−22 C48 x⁶ y³ 2.6085179331e−21 −1.7375813191e−22  −1.4473125427e−21 C50 x⁴ y⁵ 3.0702865156e−22 −3.1489144950e−23   4.5772089645e−22 C52 x² y⁷ 1.5560608864e−20 −1.7261355830e−22   1.3431030284e−20 C54 y⁹ 2.0392183142e−19 −9.6136536487e−22   3.8123400770e−21 C55 x¹⁰ 2.3667396340e−26 8.1464025681e−26 −1.1266508645e−23 C57 x⁸ y² 1.6441834920e−24 −3.5202628796e−25  −7.5082287435e−23 C59 x⁶ y⁴ 2.1973208099e−24 −1.3153022433e−24  −1.1736229718e−22 C61 x⁴ y⁶ 7.9295222982e−23 3.2895106760e−25 −5.3608955541e−23 C63 x² y⁸ 1.7951290560e−21 7.7371753570e−24 −4.7093624693e−23 C65 y¹⁰ 4.9842221371e−21 1.0332735138e−23 −3.2149245834e−22 C67 x¹⁰ y 3.5006540973e−28 3.5065031645e−27 −2.6452023300e−25 C69 x⁸ y³ −7.7978908619e−27  1.0076622074e−26  8.7993705331e−26 C71 x⁶ y⁵ −6.4046109658e−26  2.5775458725e−26 −5.3733599844e−26 C73 x⁴ y⁷ 5.1079962282e−24 7.2191087015e−26 −1.6730534114e−24 C75 x² y⁹ 2.6170987443e−23 1.2558423366e−25 −3.3782577747e−24 C77 y¹¹ 2.9102580743e−23 1.7571604472e−25 −7.7107111005e−25 C78 x¹² −6.1560955854e−31  1.0219202551e−30  5.0482378307e−28 C80 x¹⁰ y² −1.1960387607e−30  3.0561316671e−29  5.6666965393e−27 C82 x⁸ y⁴ −5.1048098909e−28  5.4323088747e−29  2.0082529763e−26 C84 x⁶ y⁶ 5.5428647630e−27 −1.5498400907e−29   2.7970284660e−26 C86 x⁴ y⁸ 3.4314118094e−26 −6.6503542465e−28  −3.6124989963e−28 C88 x² y¹⁰ 4.7589780997e−26 −1.6260553985e−27   1.7756985794e−26 C90 y¹² 1.0458848866e−25 −1.3207895158e−27   5.8458031137e−26 C92 x¹² y 4.0587948695e−33 −5.1246858224e−32   2.4689568452e−29 C94 x¹⁰ y³ −5.5847808284e−31  −2.5653473589e−31   1.4705738347e−29 C96 x⁸ y⁵ 5.7044473156e−30 −1.0423853264e−30   5.3209699385e−29 C98 x⁶ y⁷ −9.6738416644e−30  −3.0598206424e−30   2.9827578891e−28 C100 x⁴ y⁹ −3.4735527805e−28  −7.4491713306e−30   4.2190642278e−28 C102 x² y¹¹ −2.8747681291e−28  −1.0436545170e−29   4.9576477196e−28 C104 y¹³ 2.0091784512e−27 −1.3818919767e−29   4.5090759219e−29 C105 x¹⁴ 1.1781180905e−35 −3.9083713694e−35  −4.9461851945e−33 C107 x¹² y² −5.4539038778e−34  −7.8711283224e−34  −2.1857713698e−31 C109 x¹⁰ y⁴ 1.1388844809e−32 −2.0622400755e−33  −1.7953425704e−30 C111 x⁸ y⁶ −1.3059832507e−32  −3.1378843592e−33  −3.5775579951e−30 C113 x⁶ y⁸ −6.6933508266e−31  1.5092584011e−32 −2.0273059312e−30 C115 x⁴ y¹⁰ −3.2309336140e−30  8.7592354477e−32  1.3201409551e−30 C117 x² y¹² 3.0524852836e−30 1.3962418388e−31 −3.1603639681e−30 C119 y¹⁴ 3.7956761183e−29 8.8008755619e−32 −6.3449275640e−30 C121 x¹⁴ y −2.5977239860e−37  2.3806627730e−37 −1.0591625188e−33 C123 x¹² y³ 1.0575267671e−35 3.9257057969e−36 −2.5474094459e−33 C125 x¹⁰ y⁵ 2.6567643627e−35 2.8125507809e−35 −9.6488582526e−33 C127 x⁸ y⁷ 6.0875840438e−35 8.7459906478e−35 −3.7681886641e−32 C129 x⁶ y⁹ −5.9273079296e−34  2.5391347274e−34 −5.3184636610e−32 C131 x⁴ y¹¹ −1.3672746912e−32  5.1310138045e−34 −4.4608103749e−32 C133 x² y¹³ 1.0849430909e−31 5.8686515017e−34 −4.2025206053e−32 C135 y¹⁵ 2.9764915885e−31 6.9302136524e−34 −1.8025567635e−33 C136 x¹⁶ −1.4868324706e−40  3.7653743747e−40 −3.1560464586e−37 C138 x¹⁴ y² 8.7834773803e−39 8.9644061404e−39  3.2418813074e−36 C140 x¹² y⁴ −1.8186666449e−38  4.0023951750e−38  8.1661025301e−35 C142 x¹⁰ y⁶ 6.3756492177e−37 1.1755288684e−37  1.9899121823e−34 C144 x⁸ y⁸ 6.8459558752e−36 −1.1034126525e−37   1.3600982857e−34 C146 x⁶ y¹⁰ 3.2110883708e−36 −2.0244401837e−36  −5.2165695173e−35 C148 x⁴ y¹² 1.1247220878e−34 −6.1794907074e−36  −1.6512990821e−34 C150 x² y¹⁴ 3.5237290155e−34 −7.1439508929e−36   2.9259050293e−34 C152 y¹⁶ 2.0412100159e−33 −3.6663623348e−36   4.2570229073e−34 C154 x¹⁶ y 3.5226442484e−42 5.5497836943e−43  2.2839312371e−38 C156 x¹⁴ y³ −1.5026852629e−41  −3.8158536472e−41   1.5413958473e−37 C158 x¹² y⁵ 3.3477319470e−40 −3.9887675994e−40   7.9539790581e−37 C160 x¹⁰ y⁷ 2.7650671839e−39 −1.3140828354e−39   2.3334766479e−36 C162 x⁸ y⁹ 4.4084486895e−38 −3.8485353678e−39   3.9767574485e−36 C164 x⁶ y¹¹ 9.3779255481e−38 −1.0581937932e−38   3.5652043957e−36 C166 x⁴ y¹³ 6.7005164439e−37 −1.7459343209e−38   2.1998520562e−36 C168 x² y¹⁵ −1.9481519834e−36  −1.7080305021e−38   1.9576582125e−36 C170 y¹⁷ 1.5067103633e−35 −1.8882186006e−38   1.7003791706e−38 C171 x¹⁸ 1.1221979539e−45 −1.4085648329e−45   1.0372315894e−41 C173 x¹⁶ y² −2.4987344579e−44  −5.1149337979e−44   5.3677442869e−41 C175 x¹⁴ y⁴ 5.0718481838e−43 −4.5755063411e−43  −1.1527327624e−39 C177 x¹² y⁶ −3.2815562301e−42  −2.0591370434e−42  −3.1214916410e−39 C179 x¹⁰ y⁸ −5.1509407425e−42  −1.7230238588e−42   8.1784464444e−40 C181 x⁸ y¹⁰ 3.5116164120e−40 1.9339682054e−41  8.7974704909e−39 C183 x⁶ y¹² −5.5675766764e−40  9.7907779091e−41  1.2044497627e−38 C185 x⁴ y¹⁴ 1.0653260878e−39 2.1108425306e−40  8.1520586649e−39 C187 x² y¹⁶ −1.0983298570e−38  1.9129164959e−40 −1.4028989945e−38 C189 y¹⁸ 6.8785966369e−38 8.4563786361e−41 −1.5728602578e−38 C191 x¹⁸ y −1.1518624015e−47  4.4828523414e−48 −2.1740971925e−43 C193 x¹⁶ y³ 2.0315394054e−46 1.9599228957e−46 −3.3879454955e−42 C195 x¹⁴ y⁵ −6.4205012230e−48  2.3601065742e−45 −2.3066151220e−41 C197 x¹² y⁷ −3.3816251739e−44  8.6407775058e−45 −6.2922876931e−41 C199 x¹⁰ y⁹ 1.3864400870e−43 2.5461795097e−44 −1.0138255795e−40 C201 x⁸ y¹¹ 5.6556487854e−43 8.0865671348e−44 −1.3280183787e−40 C203 x⁶ y¹³ −4.5430668886e−42  1.9148720891e−43 −8.2004783079e−41 C205 x⁴ y¹⁵ 4.3211565576e−42 2.6176212924e−43 −4.1371365916e−41 C207 x² y¹⁷ −1.1709452832e−41  2.2262683550e−43 −3.8476398207e−41 C209 y¹⁹ 1.4466068136e−40 2.2196599756e−43 −2.2271882894e−43 C210 x²⁰ −3.3705777825e−51  1.4386485215e−51 −9.8620496373e−47 C212 x¹⁸ y² 4.1063237890e−50 1.4487598721e−49 −2.3864620918e−45 C214 x¹⁶ y⁴ 2.0602283424e−49 2.3959764053e−48 −1.6887149782e−44 C216 x¹⁴ y⁶ −7.6952707431e−48  1.3405885692e−47 −8.3003479966e−44 C218 x¹² y⁸ 6.7434148709e−48 2.1445643794e−47 −2.1132149507e−43 C220 x¹⁰ y¹⁰ −4.3109857131e−47  7.1774905594e−47 −4.1911829806e−43 C222 x⁸ y¹² 1.9038239784e−45 5.7148856507e−46 −5.7823356428e−43 C224 x⁶ y¹⁴ −1.7827656291e−44  −1.7808554360e−45  −3.6057237255e−43 C226 x⁴ y¹⁶ 4.9013971612e−44 2.9648434303e−45 −1.3969826714e−43 C228 x² y¹⁸ −6.2817784985e−44  2.1971707475e−45  2.7717101754e−43 C230 y²⁰ 1.5418141526e−43 8.6665502153e−46  2.5029080864e−43 Coefficient Formula M10 M11 C7 x² y −7.2276737044e−07  −2.4248080633e−09 C9 y³ 1.9638509950e−06 −1.4305723378e−08 C10 x⁴ 5.0808365188e−10 −3.4891057205e−11 C12 x² y² −1.7891952861e−09  −4.1226513952e−11 C14 y⁴ 4.8797105713e−09 −9.3842893895e−12 C16 x⁴ y 6.3443179564e−13  2.4639110383e−15 C18 x² y³ −6.7510879913e−12  −2.7467789312e−14 C20 y⁵ 1.6934828510e−11 −1.5841059563e−14 C21 x⁶ 6.0031216870e−16 −4.1195863300e−17 C23 x⁴ y² 7.8746683626e−15 −1.2654186546e−16 C25 x² y⁴ −1.8385869467e−15  −1.0456897452e−16 C27 y⁶ −1.8162554696e−14  −2.0913982009e−17 C29 x⁶ y −2.5732812724e−18   2.2085057294e−20 C31 x⁴ y³ −5.7262753994e−18  −1.8340026815e−20 C33 x² y⁵ 2.5523191940e−16 −5.6120704673e−20 C35 y⁷ −1.9776822082e−16  −2.4068607957e−20 C36 x⁸ 2.1656616935e−21 −5.3982002538e−23 C38 x⁶ y² 1.2120348738e−20 −2.4513523640e−22 C40 x⁴ y⁴ −4.0136050357e−19  −3.8244309182e−22 C42 x² y⁶ 1.8604813320e−18 −2.1623999236e−22 C44 y⁸ 2.7525380464e−18 −2.4940745372e−23 C46 x⁸ y −3.9215936758e−23  −1.3699844890e−26 C48 x⁶ y³ −8.0907144792e−23  −2.6534478957e−26 C50 x⁴ y⁵ −5.2010074072e−21  −1.2536237464e−25 C52 x² y⁷ −9.8472719893e−21  −7.6433497369e−26 C54 y⁹ 4.3222807965e−20 −1.9624141924e−26 C55 x¹⁰ −2.7063992998e−26  −1.7061257537e−28 C57 x⁸ y² −5.2088640305e−26  −1.6898653635e−28 C59 x⁶ y⁴ 4.5584719607e−24 −2.5546907646e−28 C61 x⁴ y⁶ 9.7234119869e−24 −1.5222655233e−28 C63 x² y⁸ −2.5517771215e−22  −4.7277118356e−29 C65 y¹⁰ 1.9120767833e−22 −1.2966557212e−28 C67 x¹⁰ y 1.0748577806e−27 −1.1629516838e−31 C69 x⁸ y³ 1.2112738929e−26  5.7921120419e−31 C71 x⁶ y⁵ 8.3396543785e−26  5.1751297365e−31 C73 x⁴ y⁷ 6.9099031223e−25 −2.5052559500e−31 C75 x² y⁹ −1.5269027299e−24  −6.6525823213e−31 C77 y¹¹ 9.5275101506e−25 −1.3845191117e−31 C78 x¹² 5.1324714334e−31  1.6217846426e−34 C80 x¹⁰ y² −4.1863924845e−30  −2.8531164120e−33 C82 x⁸ y⁴ −5.9117693811e−29  −8.4313905777e−33 C84 x⁶ y⁶ −7.2176695692e−28  −1.3408705049e−32 C86 x⁴ y⁸ 3.4633870187e−27 −1.0947672929e−32 C88 x² y¹⁰ −1.7777593668e−27  −4.2396896726e−33 C90 y¹² 9.6429480815e−27 −2.8461887992e−35 C92 x¹² y −1.7419522218e−32   1.3211537763e−36 C94 x¹⁰ y³ −2.9799864782e−31  −3.7321108569e−36 C96 x⁸ y⁵ −1.8080862900e−30  −6.2596404479e−36 C98 x⁶ y⁷ −1.3241203559e−29  −3.1613991441e−36 C100 x⁴ y⁹ −1.1295117391e−29   3.0361530620e−36 C102 x² y¹¹ 3.3947340077e−29  4.0363212334e−36 C104 y¹³ 2.8666964681e−29  4.7449512649e−37 C105 x¹⁴ −4.1912696608e−36   2.5463300051e−40 C107 x¹² y² 1.2914077639e−34  1.2470487570e−38 C109 x¹⁰ y⁴ 1.3778416995e−33  4.2293719038e−38 C111 x⁸ y⁶ 1.2866380630e−32  8.8592526989e−38 C113 x⁶ y⁸ 1.7929207751e−32  1.0403567494e−37 C115 x⁴ y¹⁰ −6.9295317615e−32   6.6253480276e−38 C117 x² y¹² 3.3870166074e−31  2.1244018299e−38 C119 y¹⁴ −1.2188516752e−31   1.0931298861e−39 C121 x¹⁴ y 1.6199803773e−37 −3.5768466511e−42 C123 x¹² y³ 3.5738089682e−36  1.5757224374e−41 C125 x¹⁰ y⁵ 2.7881061370e−35  3.0834397969e−41 C127 x⁸ y⁷ 1.6208683570e−34  2.6203475383e−41 C129 x⁶ y⁹ 6.1821159066e−34 −1.1373659475e−41 C131 x⁴ y¹¹ −4.3142066811e−35  −3.7747472707e−41 C133 x² y¹³ 3.5353866934e−34 −2.4666182874e−41 C135 y¹⁵ −6.1412086537e−34  −2.9874286186e−42 C136 x¹⁶ 1.7789636824e−41 −3.5633844409e−45 C138 x¹⁴ y² −1.6155206861e−39  −4.5190113713e−44 C140 x¹² y⁴ −2.1787447722e−38  −1.8099911204e−43 C142 x¹⁰ y⁶ −1.6106847823e−37  −4.5331724107e−43 C144 x⁸ y⁸ −7.6059659185e−37  −6.7659997014e−43 C146 x⁶ y¹⁰ −3.1549731203e−37  −6.1159560424e−43 C148 x⁴ y¹² −4.2255473754e−36  −3.1933036470e−43 C150 x² y¹⁴ −1.6786920618e−35  −8.9575491912e−44 C152 y¹⁶ −4.4462414083e−36  −7.9962525726e−45 C154 x¹⁶ y −8.1056676173e−43   4.4438171432e−48 C156 x¹⁴ y³ −2.1815592502e−41  −3.1151609316e−47 C158 x¹² y⁵ −2.1707761152e−40  −7.6121134541e−47 C160 x¹⁰ y⁷ −1.2509965264e−39  −9.6884401166e−47 C162 x⁸ y⁹ −6.4571773694e−39  −1.5141299973e−47 C164 x⁶ y¹¹ −1.1973201547e−38   1.0970530041e−46 C166 x⁴ y¹³ −1.6202865522e−38   1.3634023968e−46 C168 x² y¹⁵ −7.5298545113e−38   6.5246445126e−47 C170 y¹⁷ −3.7613593583e−38   7.6119197318e−48 C171 x¹⁸ −2.3565753881e−47   7.0626229884e−51 C173 x¹⁶ y² 9.7297211471e−45  7.8301002345e−50 C175 x¹⁴ y⁴ 1.6578794527e−43  3.6575530185e−49 C177 x¹² y⁶ 1.2962653200e−42  1.0713115655e−48 C179 x¹⁰ y⁸ 7.3590298746e−42  1.9455618251e−48 C181 x⁸ y¹⁰ 1.7175825509e−41  2.2708022765e−48 C183 x⁶ y¹² 2.6569320431e−41  1.6773586147e−48 C185 x⁴ y¹⁴ 1.4226823554e−40  7.4753331851e−49 C187 x² y¹⁶ 3.1791841821e−40  1.8778515863e−49 C189 y¹⁸ 6.5811411857e−43  1.8691141350e−50 C191 x¹⁸ y 1.6749669005e−48 −1.9020917199e−54 C193 x¹⁶ y³ 5.3819887429e−47  2.6820434340e−53 C195 x¹⁴ y⁵ 6.5154622602e−46  7.8952011078e−53 C197 x¹² y⁷ 4.2644921531e−45  1.3405840259e−52 C199 x¹⁰ y⁹ 2.4097270566e−44  5.3791720190e−53 C201 x⁸ y¹¹ 7.8996070218e−44 −1.4529698574e−52 C203 x⁶ y¹³ 1.6412324123e−43 −2.8034797399e−52 C205 x⁴ y¹⁵ 8.5286782455e−43 −2.2168110670e−52 C207 x² y¹⁷ 2.8108673555e−42 −8.3707388950e−53 C209 y¹⁹ 8.0790804290e−43 −9.8854298058e−54 C210 x²⁰ −3.3629356813e−53  −5.9249813053e−57 C212 x¹⁸ y² −2.2797468564e−50  −6.8774697517e−56 C214 x¹⁶ y⁴ −4.7952282029e−49  −3.6673570884e−55 C216 x¹⁴ y⁶ −4.4134777356e−48  −1.2085621357e−54 C218 x¹² y⁸ −2.7082181692e−47  −2.5573208652e−54 C220 x¹⁰ y¹⁰ −9.7650194659e−47  −3.6529054057e−54 C222 x⁸ y¹² −1.9029804017e−46  −3.4990964992e−54 C224 x⁶ y¹⁴ −1.6322286974e−46  −2.2054155436e−54 C226 x⁴ y¹⁶ 1.1092548814e−45 −8.7188486858e−55 C228 x² y¹⁸ 5.1507216625e−45 −2.0064846492e−55 C230 y²⁰ 1.8460550265e−45 −2.0161870178e−56

TABLE 5 for projection optical unit 200 of FIG. 2A: Coordinates of the stop edge x_(i) [mm] y_(i) [mm] x_(i+N/2) [mm] y_(i+N/2) [mm] −301.691108 145.979568 220.840885 −251.284488 −312.171692 139.990663 248.290035 −233.816847 −329.140258 128.511928 266.755827 −219.842735 −345.609747 114.537815 279.731788 −209.362150 −353.095879 106.552608 289.713297 −200.378792 −359.084784 99.565552 305.184636 −184.907453 −366.071841 90.083118 317.162447 −171.931492 −373.058897 78.105308 327.643031 −158.955530 −379.546878 64.131195 335.628238 −148.474946 −384.038557 50.656158 349.602351 −127.513777 −387.532085 35.683894 356.589407 −115.535966 −389.528387 20.212556 366.071841 −97.070175 −390.027462 13.724575 375.554274 −74.112704 −390.027462 −4.242141 380.045953 −60.637667 −389.528387 −12.726424 385.535783 −39.676498 −387.033009 −31.192215 387.532085 −28.696838 −383.539481 −48.160781 389.528387 −13.225499 −380.045953 −60.637667 390.027462 −3.243990 −374.556123 −76.608081 390.027462 14.223650 −369.565369 −89.084967 389.528387 20.711631 −363.576463 −102.060929 387.532085 35.683894 −357.088483 −114.537815 385.535783 45.166328 −351.099577 −125.018400 382.541330 55.646912 −339.121766 −143.484191 379.047802 65.129346 −324.648579 −162.948134 375.055199 74.112704 −312.171692 −177.421322 367.569067 87.587741 −289.713297 −200.378792 359.084784 99.565552 −279.731788 −209.362150 346.108823 114.038740 −263.761374 −222.338112 336.626389 122.523022 −250.286337 −232.319621 320.655975 134.500833 −224.833489 −248.789111 301.691108 145.979568 −215.351056 −254.278940 290.711448 151.469398 −197.384339 −263.761374 274.241958 158.955530 −173.428718 −274.741034 254.278940 166.441662 −156.959228 −281.229015 238.807602 171.432416 −132.005456 −289.713297 213.354754 178.419472 −114.038740 −294.704052 178.419472 185.905604 −93.077571 −299.694806 151.469398 190.397283 −77.107157 −302.689259 106.053533 195.887113 −57.144139 −305.683712 66.127497 198.881566 −31.192215 −308.179089 28.696838 200.378792 −7.236594 −309.177240 −28.197763 200.378792 7.236594 −309.177240 −46.164479 199.879717 31.192215 −308.179089 −82.097911 197.883415 64.131195 −304.685561 −120.526721 194.389887 82.596987 −301.691108 −157.957379 189.399132 98.068325 −298.696655 −186.404680 184.408378 118.031343 −293.705901 −217.347357 177.421322 138.493437 −287.716995 −246.792809 168.937039 160.951832 −279.731788 −265.258600 162.449058 175.924095 −273.742883 −275.240109 158.456455 191.395434 −266.755827 −287.716995 152.966625

TABLE 6 for projection optical unit 300 of FIG. 3A: Numerical Aperture 0.75 Magnification in x-direction 0.233 Magnification in y-direction 0.125 Chief Ray angle 5.50° Wavelength 13.5 nm Image field size in x-direction 26.0 mm Image field size in y-direction 1.0 mm Average Wavefront-RMS 7.88 mλ

TABLE 7 for projection optical unit 300 of FIG. 3A: Radii of surfaces Radius_(x) Power_(x) Radius_(y) Power_(y) [mm] [1/mm] [mm] [1/mm] M01 −5865.81523622 0.00032883 −2067.88312069 0.00093278 M02 −63374.79828420 0.00000395 21837.47821316 −0.00001146 M03 −8366.11833895 0.00004865 4289.09824586 −0.00009489 M04 −5869.08993915 0.00004517 −12503.51063260 0.00002120 M05 −1600.48535592 0.00029099 −3932.63888021 0.00011843 M06 −975.96408516 0.00047086 −1810.95688936 0.00025376 M07 −1283.34039039 0.00021340 7378.23227667 −0.00003712 M08 −5673.23901632 0.00009446 −3258.25153471 0.00016447 M09 −4558.08819792 0.00014250 2055.71799723 −0.00031595 M10 −12523.98260704 0.00013011 345.59408179 −0.00471510 M11 −966.31588781 0.00205638 −770.02679127 0.00258057

TABLE 8 for projection optical unit 300 of FIG. 3A: Decentring (location, angle) of surfaces D_(x) [mm] D_(y) [mm] D_(z) [mm] Reticle 0.000000000 0.000000000 0.000000000 M01 0.000000000 206.342031983 2142.943936469 M02 0.000000000 751.141443466 968.297457580 M03 0.000000000 1108.062138516 663.676987878 M04 0.000000000 1635.726818408 442.413885804 M05 0.000000000 2111.326138465 406.569727272 M06 0.000000000 2679.156490918 589.348742919 M07 0.000000000 2934.877558834 814.689341392 M08 0.000000000 3039.101069571 1089.907055701 M09 0.000000000 3022.041362790 1355.258392494 M10 0.000000000 3428.901782539 2177.702268715 Stop 0.000000000 3402.152487320 2082.218345511 M11 −0.000000000 3255.897127319 1560.147186330 Wafer 0.000000000 3255.896114501 2296.253294176 αx [°] αy [°] αz [°] Reticle 0.000000000 0.000000000 0.000000000 M01 9.690902525 0.000000000 0.000000000 M02 −52.798949070 180.000000000 0.000000000 M03 148.385382126 0.000000000 0.000000000 M04 −13.529777533 180.000000000 0.000000000 M05 186.766417434 0.000000000 0.000000000 M06 29.614629045 180.000000000 0.000000000 M07 235.322492812 0.000000000 0.000000000 M08 81.468563046 180.000000000 0.000000000 M09 78.678541182 0.000000000 0.000000000 M10 −20.985690966 0.000000000 180.000000000 Stop 164.350076886 −0.000000000 −0.000000000 M11 172.175077860 −0.000000000 0.000000000 Wafer 0.000078834 0.000000000 180.000000000

TABLE 9 for projection optical unit 300 of FIG. 3A: Free-form coefficients of surfaces Coefficient Formula M01 M02 M03 C7 x² y −1.2467075401e−08 −1.3348773466e−08  7.2872626293e−08 C9 y³ −2.6953264654e−08 5.4522752705e−08 2.6169253486e−08 C10 x⁴ −2.8831646046e−12 1.1120232774e−10 8.3530873147e−11 C12 x² y²  8.7150874395e−11 −4.0947377819e−11  −6.8360178422e−11  C14 y⁴ −1.0666167107e−13 1.4339596189e−10 −3.6577598249e−10  C16 x⁴ y −2.7441641255e−14 −5.3346116597e−14  −3.0710710509e−13  C18 x² y³ −1.2726847989e−13 −7.9668038501e−14  −3.3418102422e−13  C20 y⁵  3.4096328456e−14 3.7541752225e−13 3.4404548810e−13 C21 x⁶  2.5253493969e−18 7.0684786785e−17 −8.4079475057e−17  C23 x⁴ y² −4.9978048857e−18 −1.4520801323e−16  −1.3998707586e−16  C25 x² y⁴  2.1956981883e−17 −8.4757253555e−18  9.1295648997e−16 C27 y⁶  6.1687302543e−16 1.0524429937e−15 −1.8570296448e−16  C29 x⁶ y  1.8197881520e−20 −2.4040215447e−19  −2.1766284207e−20  C31 x⁴ y³  2.1373260866e−19 −5.2926133326e−19  2.2749446644e−18 C33 x² y⁵ −6.9752427252e−19 6.3832431855e−20 −1.2828010170e−18  C35 y⁷  3.8267458162e−20 2.9024294606e−18 1.0653505056e−18 C36 x⁸ −1.4480426797e−23 −2.7727925287e−22  −2.0063721628e−22  C38 x⁶ y² −1.4406031959e−22 −2.3939935190e−22  1.1337619611e−21 C40 x⁴ y⁴  4.7370199633e−22 −3.7474615537e−22  −1.6921160199e−21  C42 x² y⁶  1.7248831546e−22 2.9766960337e−22 1.0472902500e−20 C44 y⁸ −4.0532377358e−20 4.5184111748e−21 2.1987645795e−20 C46 x⁸ y  1.8455150442e−25 5.1241278232e−24 2.7550084650e−25 C48 x⁶ y³  1.1327621011e−24 1.4806901695e−23 −1.7730948982e−23  C50 x⁴ y⁵ −3.3882508058e−26 1.6805001248e−23 −4.9544283590e−23  C52 x² y⁷ −1.4219723243e−23 −3.4237769863e−24  2.9346082042e−23 C54 y⁹  1.4149924319e−23 −8.4824871060e−24  1.3561832619e−22 C55 x¹⁰  4.9751179229e−28 6.3407118335e−27 2.8338518017e−27 C57 x⁸ y²  4.7112576339e−27 −6.9025162063e−27  −1.2277211414e−27  C59 x⁶ y⁴ −4.5961567305e−27 2.7190597791e−26 −5.2905365082e−26  C61 x⁴ y⁶ −5.5773662955e−26 5.2462314959e−26 −2.5445274816e−25  C63 x² y⁸  2.0082504680e−25 −6.1081784301e−26  −5.9730875595e−25  C65 y¹⁰  2.2199203861e−24 −4.8557028558e−26  −2.3348782296e−24  C67 x¹⁰ y −3.7476656440e−30 −7.6485672979e−29  1.4947673172e−29 C69 x⁸ y³ −2.3612566194e−29 −2.4774184419e−28  2.2980316977e−28 C71 x⁶ y⁵  2.2187607217e−29 −3.8120053547e−28  1.3217596278e−27 C73 x⁴ y⁷  5.6100070166e−28 −2.4974317927e−28  2.3177009413e−27 C75 x² y⁹  2.0618081612e−27 −2.6148149268e−28  −5.5909056888e−27  C77 y¹¹ −2.7963329316e−27 2.0179748939e−29 −8.7279402890e−27  C78 x¹² −7.4572827042e−33 −4.4335237142e−32  −1.9168206138e−33  C80 x¹⁰ y² −8.5474716742e−32 1.4379898868e−31 −4.2609800121e−32  C82 x⁸ y⁴ −9.7649702863e−32 −2.1619359366e−31  7.2298850863e−31 C84 x⁶ y⁶  1.0909533068e−30 −1.4261848410e−30  5.5278484571e−30 C86 x⁴ y⁸  4.3562596563e−31 −1.1108019099e−30  1.3375757200e−29 C88 x² y¹⁰ −1.8513248324e−29 −2.6661306772e−32  2.8874205794e−29 C90 y¹² −7.9907007621e−29 6.5273825658e−31 9.7434965821e−29 C92 x¹² y  4.6491819082e−35 6.2946912638e−34 −1.8258273973e−34  C94 x¹⁰ y³  3.2696788977e−34 2.3921661224e−33 −1.9530306250e−33  C96 x⁸ y⁵  3.2943984047e−35 4.8919543389e−33 −1.6350292078e−32  C98 x⁶ y⁷ −8.5405894077e−33 3.6166305683e−33 −5.6396440055e−32  C100 x⁴ y⁹ −4.0709966516e−32 2.1558509865e−33 −4.6125475690e−32  C102 x² y¹¹ −1.0107878822e−31 2.5105814333e−33 3.2773437248e−31 C104 y¹³  1.2064533186e−31 2.2238147891e−33 3.2764546096e−31 C105 x¹⁴  6.3869752879e−38 1.9267680796e−37 −6.1173550883e−38  C107 x¹² y²  9.1504573841e−37 −1.4859024048e−36  2.7620723221e−37 C109 x¹⁰ y⁴  3.3617202635e−36 3.1707721165e−37 −5.6617008379e−36  C111 x⁸ y⁶ −6.1736717784e−36 1.7203953853e−35 −6.3584720655e−35  C113 x⁶ y⁸ −3.0501766360e−35 2.6161789349e−35 −2.4679393483e−34  C115 x⁴ y¹⁰  1.3612671094e−34 1.5370839273e−35 −3.6650099068e−34  C117 x² y¹²  8.7866861356e−34 3.6940452189e−36 −8.3324769412e−34  C119 y¹⁴  1.9021319268e−33 4.1320176184e−36 −2.2908549281e−33  C121 x¹⁴ y −3.1724176080e−40 −3.0807880840e−39  9.2385422123e−40 C123 x¹² y³ −2.3810083642e−39 −1.2424284034e−38  9.3884607054e−39 C125 x¹⁰ y⁵ −2.2954013538e−39 −2.9276025660e−38  1.0258041544e−37 C127 x⁸ y⁷  6.8833317428e−38 −1.3241913303e−38  5.0251757855e−37 C129 x⁶ y⁹  4.8297911637e−37 1.3699222053e−38 1.3274285064e−36 C131 x⁴ y¹¹  1.4452002485e−36 1.1315058418e−38 −4.9607731988e−37  C133 x² y¹³  2.7654094061e−36 −1.8600600480e−38  −9.5896503707e−36  C135 y¹⁵ −2.6915220538e−36 4.8587893131e−39 −7.7241296372e−36  C136 x¹⁶ −3.2793717012e−43 −6.3852937662e−43  3.2595223358e−43 C138 x¹⁴ y² −5.5830068597e−42 8.3494970336e−42 −6.5706319173e−43  C140 x¹² y⁴ −3.4791199924e−41 1.0109081574e−41 2.6770336445e−41 C142 x¹⁰ y⁶ −4.3291872187e−41 −8.5936562967e−41  3.9604946354e−40 C144 x⁸ y⁸  1.6767359119e−40 −1.9152785634e−40  2.1226841939e−39 C146 x⁶ y¹⁰ −5.6292179529e−40 −1.4700794960e−40  5.4757816113e−39 C148 x⁴ y¹² −7.1918752381e−39 −3.3947448651e−41  4.8572679588e−39 C150 x² y¹⁴ −2.3139623471e−38 −8.2864415218e−41  9.1762922206e−39 C152 y¹⁶ −2.8589050266e−38 2.8656510927e−42 2.7944022154e−38 C154 x¹⁶ y  1.1477662036e−45 7.9930480890e−45 −2.2605783918e−45  C156 x¹⁴ y³  9.2616541272e−45 3.4010054371e−44 −2.3674050015e−44  C158 x¹² y⁵  1.2851129925e−44 8.3336097293e−44 −3.2024594546e−43  C160 x¹⁰ y⁷ −2.7867510516e−43 −4.8400370596e−44  −1.9990836609e−42  C162 x⁸ y⁹ −2.6947148783e−42 −2.8140377193e−43  −7.9826907998e−42  C164 x⁶ y¹¹ −1.0858659838e−41 −2.0682298229e−43  −1.4165695961e−41  C166 x⁴ y¹³ −2.4853387780e−41 2.9582280271e−44 3.1801923441e−41 C168 x² y¹⁵ −3.9711405260e−41 −1.4308615014e−43  1.4697289355e−40 C170 y¹⁷  3.2641760546e−41 −2.4317654285e−45  1.0630088012e−40 C171 x¹⁸  9.3807609535e−49 1.6378787333e−48 −6.4808506262e−49  C173 x¹⁶ y²  1.8283088759e−47 −2.4206936389e−47  −1.1563651995e−49  C175 x¹⁴ y⁴  1.5953422359e−46 −6.2271486286e−47  −7.1113764658e−47  C177 x¹² y⁶  5.6583172524e−46 1.3937263454e−46 −1.2634373210e−45  C179 x¹⁰ y⁸  7.6229354122e−46 4.5318249979e−46 −8.5225093411e−45  C181 x⁸ y¹⁰  3.1739238245e−45 4.8998793816e−46 −3.3084943577e−44  C183 x⁶ y¹²  3.4177288975e−44 4.0161527675e−46 −5.7411650994e−44  C185 x⁴ y¹⁴  1.4252492265e−43 3.3762735692e−46 5.6542785431e−45 C187 x² y¹⁶  3.1868584702e−43 −1.2274024014e−46  5.0891077426e−44 C189 y¹⁸  2.3977551585e−43 −7.8790612609e−48  −1.2166288242e−43  C191 x¹⁸ y −1.7128948485e−51 −8.3805817185e−51  2.2125779066e−51 C193 x¹⁶ y³ −1.4883568540e−50 −3.7077347056e−50  2.4521093939e−50 C195 x¹⁴ y⁵ −2.3912620643e−50 −7.5292211098e−50  3.9284796942e−49 C197 x¹² y⁷  4.8593150694e−49 3.5431064161e−49 2.9667556677e−48 C199 x¹⁰ y⁹  5.6888315159e−48 1.3222909580e−48 1.5482033905e−47 C201 x⁸ y¹¹  3.0206266472e−47 1.6349217442e−48 4.9386213025e−47 C203 x⁶ y¹³  8.7406145932e−47 1.0908913057e−48 3.9694377865e−47 C205 x⁴ y¹⁵  1.7340860718e−46 5.1552747781e−49 −3.4005094327e−46  C207 x² y¹⁷  2.3521148980e−46 −4.6486529691e−50  −9.4109560003e−46  C209 y¹⁹ −1.6709407871e−46 −7.6701722815e−51  −6.3098039019e−46  C210 x²⁰ −1.1468848753e−54 −1.7457410846e−54  4.3570623621e−55 C212 x¹⁸ y² −2.5001515592e−53 2.8668298254e−53 1.7728301296e−54 C214 x¹⁶ y⁴ −2.7651704796e−52 1.1765705998e−52 8.2674940144e−53 C216 x¹⁴ y⁶ −1.5117327693e−51 1.3842730364e−52 1.5956297553e−51 C218 x¹² y⁸ −5.1705595202e−51 4.4714717095e−52 1.3173465132e−50 C220 x¹⁰ y¹⁰ −1.6792580509e−50 1.0920179092e−51 6.6249699918e−50 C222 x⁸ y¹² −8.3711007658e−50 1.1685063976e−51 1.9755952480e−49 C224 x⁶ y¹⁴ −3.6866845106e−49 6.7111631193e−52 1.7123109378e−49 C226 x⁴ y¹⁶ −1.0443243640e−48 2.5054124967e−52 −5.8864825581e−49  C228 x² y¹⁸ −1.8004435241e−48 −3.5724159060e−54  −1.3320070960e−48  C230 y²⁰ −8.3786576508e−49 −2.7757694088e−54  −3.4128789070e−49  Coefficient Formula M07 M08 M09 C7 x² y 2.8532185189e−07 2.4061929143e−07 −4.0775365688e−08 C9 y³ −4.5488655424e−07  2.2560132539e−07 −2.7379463806e−07 C10 x⁴ 1.3083632819e−11 5.9615095385e−11 −1.6038386672e−10 C12 x² y² −1.0484017643e−09  1.8554389819e−10 −1.0961343130e−09 C14 y⁴ 1.8996982820e−09 −3.5056498342e−10   3.3765922105e−11 C16 x⁴ y −4.6317598744e−13  4.4552157676e−13 −7.9855804676e−13 C18 x² y³ 3.2314583170e−12 2.8042795574e−12 −7.0220759554e−12 C20 y⁵ −4.5588666977e−11  1.8028731397e−12 −1.7398088518e−12 C21 x⁶ −1.9124329121e−16  −7.5794191403e−16   2.1893082964e−15 C23 x⁴ y² −3.5839736697e−15  −1.3549434157e−15  −6.5079186813e−15 C25 x² y⁴ −1.7483598425e−13  −1.4728274545e−15  −7.4386360584e−15 C27 y⁶ 2.3135062742e−14 −4.2680681592e−15   3.6373247624e−15 C29 x⁶ y −6.8891899026e−18  −3.9058789300e−18   3.3130026057e−17 C31 x⁴ y³ −2.3313296927e−16  1.1961183241e−17  1.6410032269e−17 C33 x² y⁵ 4.7971439136e−16 3.4678894092e−17 −3.6833219506e−17 C35 y⁷ −5.6401667395e−16  2.7103550207e−17 −7.9177802849e−17 C36 x⁸ −2.4317709323e−21  −5.0437952188e−21   9.2271219909e−20 C38 x⁶ y² −1.0919948308e−19  −3.2698263728e−20   5.8623247451e−19 C40 x⁴ y⁴ 1.6814114466e−18 −4.3596330218e−20   4.2800966543e−19 C42 x² y⁶ −1.5491795995e−18  −1.1015132994e−19  −3.6707024772e−20 C44 y⁸ −1.3330810569e−18  −1.3386882215e−19   1.5567218575e−18 C46 x⁸ y −4.2719693341e−24  −7.7580502574e−23   4.1643168273e−22 C48 x⁶ y³ 2.6085179331e−21 −1.7375813191e−22  −1.4473125427e−21 C50 x⁴ y⁵ 3.0702865156e−22 −3.1489144950e−23   4.5772089645e−22 C52 x² y⁷ 1.5560608864e−20 −1.7261355830e−22   1.3431030284e−20 C54 y⁹ 2.0392183142e−19 −9.6136536487e−22   3.8123400770e−21 C55 x¹⁰ 2.3667396340e−26 8.1464025681e−26 −1.1266508645e−23 C57 x⁸ y² 1.6441834920e−24 −3.5202628796e−25  −7.5082287435e−23 C59 x⁶ y⁴ 2.1973208099e−24 −1.3153022433e−24  −1.1736229718e−22 C61 x⁴ y⁶ 7.9295222982e−23 3.2895106760e−25 −5.3608955541e−23 C63 x² y⁸ 1.7951290560e−21 7.7371753570e−24 −4.7093624693e−23 C65 y¹⁰ 4.9842221371e−21 1.0332735138e−23 −3.2149245834e−22 C67 x¹⁰ y 3.5006540973e−28 3.5065031645e−27 −2.6452023300e−25 C69 x⁸ y³ −7.7978908619e−27  1.0076622074e−26  8.7993705331e−26 C71 x⁶ y⁵ −6.4046109658e−26  2.5775458725e−26 −5.3733599844e−26 C73 x⁴ y⁷ 5.1079962282e−24 7.2191087015e−26 −1.6730534114e−24 C75 x² y⁹ 2.6170987443e−23 1.2558423366e−25 −3.3782577747e−24 C77 y¹¹ 2.9102580743e−23 1.7571604472e−25 −7.7107111005e−25 C78 x¹² −6.1560955854e−31  1.0219202551e−30  5.0482378307e−28 C80 x¹⁰ y² −1.1960387607e−30  3.0561316671e−29  5.6666965393e−27 C82 x⁸ y⁴ −5.1048098909e−28  5.4323088747e−29  2.0082529763e−26 C84 x⁶ y⁶ 5.5428647630e−27 −1.5498400907e−29   2.7970284660e−26 C86 x⁴ y⁸ 3.4314118094e−26 −6.6503542465e−28  −3.6124989963e−28 C88 x² y¹⁰ 4.7589780997e−26 −1.6260553985e−27   1.7756985794e−26 C90 y¹² 1.0458848866e−25 −1.3207895158e−27   5.8458031137e−26 C92 x¹² y 4.0587948695e−33 −5.1246858224e−32   2.4689568452e−29 C94 x¹⁰ y³ −5.5847808284e−31  −2.5653473589e−31   1.4705738347e−29 C96 x⁸ y⁵ 5.7044473156e−30 −1.0423853264e−30   5.3209699385e−29 C98 x⁶ y⁷ −9.6738416644e−30  −3.0598206424e−30   2.9827578891e−28 C100 x⁴ y⁹ −3.4735527805e−28  −7.4491713306e−30   4.2190642278e−28 C102 x² y¹¹ −2.8747681291e−28  −1.0436545170e−29   4.9576477196e−28 C104 y¹³ 2.0091784512e−27 −1.3818919767e−29   4.5090759219e−29 C105 x¹⁴ 1.1781180905e−35 −3.9083713694e−35  −4.9461851945e−33 C107 x¹² y² −5.4539038778e−34  −7.8711283224e−34  −2.1857713698e−31 C109 x¹⁰ y⁴ 1.1388844809e−32 −2.0622400755e−33  −1.7953425704e−30 C111 x⁸ y⁶ −1.3059832507e−32  −3.1378843592e−33  −3.5775579951e−30 C113 x⁶ y⁸ −6.6933508266e−31  1.5092584011e−32 −2.0273059312e−30 C115 x⁴ y¹⁰ −3.2309336140e−30  8.7592354477e−32  1.3201409551e−30 C117 x² y¹² 3.0524852836e−30 1.3962418388e−31 −3.1603639681e−30 C119 y¹⁴ 3.7956761183e−29 8.8008755619e−32 −6.3449275640e−30 C121 x¹⁴ y −2.5977239860e−37  2.3806627730e−37 −1.0591625188e−33 C123 x¹² y³ 1.0575267671e−35 3.9257057969e−36 −2.5474094459e−33 C125 x¹⁰ y⁵ 2.6567643627e−35 2.8125507809e−35 −9.6488582526e−33 C127 x⁸ y⁷ 6.0875840438e−35 8.7459906478e−35 −3.7681886641e−32 C129 x⁶ y⁹ −5.9273079296e−34  2.5391347274e−34 −5.3184636610e−32 C131 x⁴ y¹¹ −1.3672746912e−32  5.1310138045e−34 −4.4608103749e−32 C133 x² y¹³ 1.0849430909e−31 5.8686515017e−34 −4.2025206053e−32 C135 y¹⁵ 2.9764915885e−31 6.9302136524e−34 −1.8025567635e−33 C136 x¹⁶ −1.4868324706e−40  3.7653743747e−40 −3.1560464586e−37 C138 x¹⁴ y² 8.7834773803e−39 8.9644061404e−39  3.2418813074e−36 C140 x¹² y⁴ −1.8186666449e−38  4.0023951750e−38  8.1661025301e−35 C142 x¹⁰ y⁶ 6.3756492177e−37 1.1755288684e−37  1.9899121823e−34 C144 x⁸ y⁸ 6.8459558752e−36 −1.1034126525e−37   1.3600982857e−34 C146 x⁶ y¹⁰ 3.2110883708e−36 −2.0244401837e−36  −5.2165695173e−35 C148 x⁴ y¹² 1.1247220878e−34 −6.1794907074e−36  −1.6512990821e−34 C150 x² y¹⁴ 3.5237290155e−34 −7.1439508929e−36   2.9259050293e−34 C152 y¹⁶ 2.0412100159e−33 −3.6663623348e−36   4.2570229073e−34 C154 x¹⁶ y 3.5226442484e−42 5.5497836943e−43  2.2839312371e−38 C156 x¹⁴ y³ −1.5026852629e−41  −3.8158536472e−41   1.5413958473e−37 C158 x¹² y⁵ 3.3477319470e−40 −3.9887675994e−40   7.9539790581e−37 C160 x¹⁰ y⁷ 2.7650671839e−39 −1.3140828354e−39   2.3334766479e−36 C162 x⁸ y⁹ 4.4084486895e−38 −3.8485353678e−39   3.9767574485e−36 C164 x⁶ y¹¹ 9.3779255481e−38 −1.0581937932e−38   3.5652043957e−36 C166 x⁴ y¹³ 6.7005164439e−37 −1.7459343209e−38   2.1998520562e−36 C168 x² y¹⁵ −1.9481519834e−36  −1.7080305021e−38   1.9576582125e−36 C170 y¹⁷ 1.5067103633e−35 −1.8882186006e−38   1.7003791706e−38 C171 x¹⁸ 1.1221979539e−45 −1.4085648329e−45   1.0372315894e−41 C173 x¹⁶ y² −2.4987344579e−44  −5.1149337979e−44   5.3677442869e−41 C175 x¹⁴ y⁴ 5.0718481838e−43 −4.5755063411e−43  −1.1527327624e−39 C177 x¹² y⁶ −3.2815562301e−42  −2.0591370434e−42  −3.1214916410e−39 C179 x¹⁰ y⁸ −5.1509407425e−42  −1.7230238588e−42   8.1784464444e−40 C181 x⁸ y¹⁰ 3.5116164120e−40 1.9339682054e−41  8.7974704909e−39 C183 x⁶ y¹² −5.5675766764e−40  9.7907779091e−41  1.2044497627e−38 C185 x⁴ y¹⁴ 1.0653260878e−39 2.1108425306e−40  8.1520586649e−39 C187 x² y¹⁶ −1.0983298570e−38  1.9129164959e−40 −1.4028989945e−38 C189 y¹⁸ 6.8785966369e−38 8.4563786361e−41 −1.5728602578e−38 C191 x¹⁸ y −1.1518624015e−47  −4.4828523414e−48  −2.1740971925e−43 C193 x¹⁶ y³ 2.0315394054e−46 1.9599228957e−46 −3.3879454955e−42 C195 x¹⁴ y⁵ −6.4205012230e−48  2.3601065742e−45 −2.3066151220e−41 C197 x¹² y⁷ −3.3816251739e−44  8.6407775058e−45 −6.2922876931e−41 C199 x¹⁰ y⁹ 1.3864400870e−43 2.5461795097e−44 −1.0138255795e−40 C201 x⁸ y¹¹ 5.6556487854e−43 8.0865671348e−44 −1.3280183787e−40 C203 x⁶ y¹³ −4.5430668886e−42  1.9148720891e−43 −8.2004783079e−41 C205 x⁴ y¹⁵ 4.3211565576e−42 2.6176212924e−43 −4.1371365916e−41 C207 x² y¹⁷ −1.1709452832e−41  2.2262683550e−43 −3.8476398207e−41 C209 y¹⁹ 1.4466068136e−40 2.2196599756e−43 −2.2271882894e−43 C210 x²⁰ −3.3705777825e−51  1.4386485215e−51 −9.8620496373e−47 C212 x¹⁸ y² 4.1063237890e−50 1.4487598721e−49 −2.3864620918e−45 C214 x¹⁶ y⁴ 2.0602283424e−49 2.3959764053e−48 −1.6887149782e−44 C216 x¹⁴ y⁶ −7.6952707431e−48  1.3405885692e−47 −8.3003479966e−44 C218 x¹² y⁸ 6.7434148709e−48 2.1445643794e−47 −2.1132149507e−43 C220 x¹⁰ y¹⁰ −4.3109857131e−47  −7.1774905594e−47  −4.1911829806e−43 C222 x⁸ y¹² 1.9038239784e−45 −5.7148856507e−46  −5.7823356428e−43 C224 x⁶ y¹⁴ −1.7827656291e−44  −1.7808554360e−45  −3.6057237255e−43 C226 x⁴ y¹⁶ 4.9013971612e−44 −2.9648434303e−45  −1.3969826714e−43 C228 x² y¹⁸ −6.2817784985e−44  −2.1971707475e−45   2.7717101754e−43 C230 y²⁰ 1.5418141526e−43 −8.6665502153e−46   2.5029080864e−43 Coefficient Formula M10 M11 C7 x² y −7.2276737044e−07  −2.4248080633e−09 C9 y³ 1.9638509950e−06 −1.4305723378e−08 C10 x⁴ 5.0808365188e−10 −3.4891057205e−11 C12 x² y² −1.7891952861e−09  −4.1226513952e−11 C14 y⁴ 4.8797105713e−09 −9.3842893895e−12 C16 x⁴ y 6.3443179564e−13  2.4639110383e−15 C18 x² y³ −6.7510879913e−12  −2.7467789312e−14 C20 y⁵ 1.6934828510e−11 −1.5841059563e−14 C21 x⁶ 6.0031216870e−16 −4.1195863300e−17 C23 x⁴ y² 7.8746683626e−15 −1.2654186546e−16 C25 x² y⁴ −1.8385869467e−15  −1.0456897452e−16 C27 y⁶ −1.8162554696e−14  −2.0913982009e−17 C29 x⁶ y −2.5732812724e−18   2.2085057294e−20 C31 x⁴ y³ −5.7262753994e−18  −1.8340026815e−20 C33 x² y⁵ 2.5523191940e−16 −5.6120704673e−20 C35 y⁷ −1.9776822082e−16  −2.4068607957e−20 C36 x⁸ 2.1656616935e−21 −5.3982002538e−23 C38 x⁶ y² 1.2120348738e−20 −2.4513523640e−22 C40 x⁴ y⁴ −4.0136050357e−19  −3.8244309182e−22 C42 x² y⁶ 1.8604813320e−18 −2.1623999236e−22 C44 y⁸ 2.7525380464e−18 −2.4940745372e−23 C46 x⁸ y −3.9215936758e−23  −1.3699844890e−26 C48 x⁶ y³ −8.0907144792e−23  −2.6534478957e−26 C50 x⁴ y⁵ −5.2010074072e−21  −1.2536237464e−25 C52 x² y⁷ −9.8472719893e−21  −7.6433497369e−26 C54 y⁹ 4.3222807965e−20 −1.9624141924e−26 C55 x¹⁰ −2.7063992998e−26  −1.7061257537e−28 C57 x⁸ y² −5.2088640305e−26  −1.6898653635e−28 C59 x⁶ y⁴ 4.5584719607e−24 −2.5546907646e−28 C61 x⁴ y⁶ 9.7234119869e−24 −1.5222655233e−28 C63 x² y⁸ −2.5517771215e−22  −4.7277118356e−29 C65 y¹⁰ 1.9120767833e−22 −1.2966557212e−28 C67 x¹⁰ y 1.0748577806e−27 −1.1629516838e−31 C69 x⁸ y³ 1.2112738929e−26  5.7921120419e−31 C71 x⁶ y⁵ 8.3396543785e−26  5.1751297365e−31 C73 x⁴ y⁷ 6.9099031223e−25 −2.5052559500e−31 C75 x² y⁹ −1.5269027299e−24  −6.6525823213e−31 C77 y¹¹ 9.5275101506e−25 −1.3845191117e−31 C78 x¹² 5.1324714334e−31  1.6217846426e−34 C80 x¹⁰ y² −4.1863924845e−30  −2.8531164120e−33 C82 x⁸ y⁴ −5.9117693811e−29  −8.4313905777e−33 C84 x⁶ y⁶ −7.2176695692e−28  −1.3408705049e−32 C86 x⁴ y⁸ 3.4633870187e−27 −1.0947672929e−32 C88 x² y¹⁰ −1.7777593668e−27  −4.2396896726e−33 C90 y¹² 9.6429480815e−27 −2.8461887992e−35 C92 x¹² y −1.7419522218e−32   1.3211537763e−36 C94 x¹⁰ y³ −2.9799864782e−31  −3.7321108569e−36 C96 x⁸ y⁵ −1.8080862900e−30  −6.2596404479e−36 C98 x⁶ y⁷ −1.3241203559e−29  −3.1613991441e−36 C100 x⁴ y⁹ −1.1295117391e−29   3.0361530620e−36 C102 x² y¹¹ 3.3947340077e−29  4.0363212334e−36 C104 y¹³ 2.8666964681e−29  4.7449512649e−37 C105 x¹⁴ −4.1912696608e−36   2.5463300051e−40 C107 x¹² y² 1.2914077639e−34  1.2470487570e−38 C109 x¹⁰ y⁴ 1.3778416995e−33  4.2293719038e−38 C111 x⁸ y⁶ 1.2866380630e−32  8.8592526989e−38 C113 x⁶ y⁸ 1.7929207751e−32  1.0403567494e−37 C115 x⁴ y¹⁰ −6.9295317615e−32   6.6253480276e−38 C117 x² y¹² 3.3870166074e−31  2.1244018299e−38 C119 y¹⁴ −1.2188516752e−31   1.0931298861e−39 C121 x¹⁴ y 1.6199803773e−37 −3.5768466511e−42 C123 x¹² y³ 3.5738089682e−36  1.5757224374e−41 C125 x¹⁰ y⁵ 2.7881061370e−35  3.0834397969e−41 C127 x⁸ y⁷ 1.6208683570e−34  2.6203475383e−41 C129 x⁶ y⁹ 6.1821159066e−34 −1.1373659475e−41 C131 x⁴ y¹¹ −4.3142066811e−35  −3.7747472707e−41 C133 x² y¹³ 3.5353866934e−34 −2.4666182874e−41 C135 y¹⁵ −6.1412086537e−34  −2.9874286186e−42 C136 X¹⁶ 1.7789636824e−41 −3.5633844409e−45 C138 x¹⁴ y² −1.6155206861e−39  −4.5190113713e−44 C140 x¹² y⁴ −2.1787447722e−38  −1.8099911204e−43 C142 x¹⁰ y⁶ −1.6106847823e−37  −4.5331724107e−43 C144 x⁸ y⁸ −7.6059659185e−37  −6.7659997014e−43 C146 x⁶ y¹⁰ −3.1549731203e−37  −6.1159560424e−43 C148 x⁴ y¹² −4.2255473754e−36  −3.1933036470e−43 C150 x² y¹⁴ −1.6786920618e−35  −8.9575491912e−44 C152 y¹⁶ −4.4462414083e−36  −7.9962525726e−45 C154 x¹⁶ y −8.1056676173e−43   4.4438171432e−48 C156 x¹⁴ y³ −2.1815592502e−41  −3.1151609316e−47 C158 x¹² y⁵ −2.1707761152e−40  −7.6121134541e−47 C160 x¹⁰ y⁷ −1.2509965264e−39  −9.6884401166e−47 C162 x⁸ y⁹ −6.4571773694e−39  −1.5141299973e−47 C164 x⁶ y¹¹ −1.1973201547e−38   1.0970530041e−46 C166 x⁴ y¹³ −1.6202865522e−38   1.3634023968e−46 C168 x² y¹⁵ −7.5298545113e−38   6.5246445126e−47 C170 y¹⁷ −3.7613593583e−38   7.6119197318e−48 C171 x¹⁸ −2.3565753881e−47   7.0626229884e−51 C173 x¹⁶ y² 9.7297211471e−45  7.8301002345e−50 C175 x¹⁴ y⁴ 1.6578794527e−43  3.6575530185e−49 C177 x¹² y⁶ 1.2962653200e−42  1.0713115655e−48 C179 x¹⁰ y⁸ 7.3590298746e−42  1.9455618251e−48 C181 x⁸ y¹⁰ 1.7175825509e−41  2.2708022765e−48 C183 x⁶ y¹² 2.6569320431e−41  1.6773586147e−48 C185 x⁴ y¹⁴ 1.4226823554e−40  7.4753331851e−49 C187 x² y¹⁶ 3.1791841821e−40  1.8778515863e−49 C189 y¹⁸ 6.5811411857e−43  1.8691141350e−50 C191 x¹⁸ y 1.6749669005e−48 −1.9020917199e−54 C193 x¹⁶ y³ 5.3819887429e−47  2.6820434340e−53 C195 x¹⁴ y⁵ 6.5154622602e−46  7.8952011078e−53 C197 x¹² y⁷ 4.2644921531e−45  1.3405840259e−52 C199 x¹⁰ y⁹ 2.4097270566e−44  5.3791720190e−53 C201 x⁸ y¹¹ 7.8996070218e−44 −1.4529698574e−52 C203 x⁶ y¹³ 1.6412324123e−43 −2.8034797399e−52 C205 x⁴ y¹⁵ 8.5286782455e−43 −2.2168110670e−52 C207 x² y¹⁷ 2.8108673555e−42 −8.3707388950e−53 C209 y¹⁹ 8.0790804290e−43 −9.8854298058e−54 C210 x²⁰ −3.3629356813e−53  −5.9249813053e−57 C212 x¹⁸ y² −2.2797468564e−50  −6.8774697517e−56 C214 x¹⁶ y⁴ −4.7952282029e−49  −3.6673570884e−55 C216 x¹⁴ y⁶ −4.4134777356e−48  −1.2085621357e−54 C218 x¹² y⁸ −2.7082181692e−47  −2.5573208652e−54 C220 x¹⁰ y¹⁰ −9.7650194659e−47  −3.6529054057e−54 C222 x⁸ y¹² −1.9029804017e−46  −3.4990964992e−54 C224 x⁶ y¹⁴ −1.6322286974e−46  −2.2054155436e−54 C226 x⁴ y¹⁶ 1.1092548814e−45 −8.7188486858e−55 C228 x² y¹⁸ 5.1507216625e−45 −2.0064846492e−55 C230 y²⁰ 1.8460550265e−45 −2.0161870178e−56

TABLE 10 for projection optical unit 300 of FIG. 3A: Coordinates of stop edge: x_(i) [mm] y_(i) [mm] x_(i+N/2) [mm] y_(i+N/2) [mm] −385.835606 42.993261 388.106548 31.142767 −384.385864 48.749308 388.924481 25.054013 −382.728677 54.389216 389.528426 18.860467 −380.865534 59.910851 389.916569 12.565580 −378.797898 65.312391 390.087034 6.173017 −376.527235 70.592338 390.037894 −0.313355 −374.055035 75.749522 389.767180 −6.889470 −371.382850 80.783102 389.272903 −13.551064 −368.512323 85.692559 388.553062 −20.293680 −365.445217 90.477684 387.605661 −27.112656 −362.183440 95.138562 386.428720 −34.003123 −358.729072 99.675547 385.020289 −40.959997 −355.084380 104.089245 383.378452 −47.977967 −351.251828 108.380479 381.501344 −55.051487 −347.234087 112.550270 379.387149 −62.174770 −343.034030 116.599808 377.034115 −69.341779 −338.654728 120.530422 374.440561 −76.546216 −334.099440 124.343566 371.604880 −83.781526 −329.371592 128.040784 368.525555 −91.040886 −324.474764 131.623703 365.201166 −98.317211 −319.412661 135.094006 361.630399 −105.603155 −314.189092 138.453422 357.812067 −112.891114 −308.807950 141.703710 353.745113 −120.173238 −303.273181 144.846651 349.428636 −127.441440 −297.588769 147.884036 344.861903 −134.687413 −291.758714 150.817658 340.044370 −141.902646 −285.787017 153.649310 334.975702 −149.078446 −279.677668 156.380772 329.655800 −156.205956 −273.434636 159.013817 324.084817 −163.276183 −267.061866 161.550199 318.263190 −170.280018 −260.563272 163.991653 312.191661 −177.208269 −253.942740 166.339894 305.871303 −184.051679 −247.204129 168.596612 299.303543 −190.800959 −240.351271 170.763472 292.490182 −197.446813 −233.387978 172.842110 285.433417 −203.979963 −226.318037 174.834130 278.135854 −210.391180 −219.145223 176.741104 270.600525 −216.671307 −211.873288 178.564567 262.830898 −222.811287 −204.505973 180.306018 254.830882 −228.802188 −197.046998 181.966912 246.604836 −234.635231 −189.500069 183.548663 238.157568 −240.301810 −181.868874 185.052638 229.494339 −245.793520 −174.157082 186.480159 220.620857 −251.102175 −166.368343 187.832498 211.543275 −256.219835 −158.506293 189.110875 202.268187 −261.138820 −150.574546 190.316461 192.802613 −265.851734 −142.576708 191.450370 183.153997 −270.351483 −134.516370 192.513666 173.330187 −274.631284 −126.397118 193.507355 163.339423 −278.684692 −118.222534 194.432389 153.190321 −282.505602 −109.996202 195.289662 142.891850 −286.088270 −101.721715 196.080013 132.453312 −289.427320 −93.402672 196.804220 121.884321 −292.517751 −85.042690 197.463005 111.194776 −295.354951 −76.645401 198.057029 100.394835 −297.934698 −68.214457 198.586893 89.494893 −300.253166 −59.753530 199.053137 78.505553 −302.306930 −51.266312 199.456240 67.437602 −304.092967 −42.756517 199.796618 56.301984 −305.608657 −34.227876 200.074626 45.109777 −306.851785 −25.684137 200.290552 33.872170 −307.820539 −17.129062 200.444624 22.600438 −308.513511 −8.566423 200.537002 11.305921 −308.929697 0.000000 200.567784 0.000000 −309.068492 8.566423 200.537002 −11.305921 −308.929697 17.129062 200.444624 −22.600438 −308.513511 25.684137 200.290552 −33.872170 −307.820539 34.227876 200.074626 −45.109777 −306.851785 42.756517 199.796618 −56.301984 −305.608657 51.266312 199.456240 −67.437602 −304.092967 59.753530 199.053137 −78.505553 −302.306930 68.214457 198.586893 −89.494893 −300.253166 76.645401 198.057029 −100.394835 −297.934698 85.042690 197.463005 −111.194776 −295.354951 93.402672 196.804220 −121.884321 −292.517751 101.721715 196.080013 −132.453312 −289.427320 109.996202 195.289662 −142.891850 −286.088270 118.222534 194.432389 −153.190321 −282.505602 126.397118 193.507355 −163.339423 −278.684692 134.516370 192.513666 −173.330187 −274.631284 142.576708 191.450370 −183.153997 −270.351483 150.574546 190.316461 −192.802613 −265.851734 158.506293 189.110875 −202.268187 −261.138820 166.368343 187.832498 −211.543275 −256.219835 174.157082 186.480159 −220.620857 −251.102175 181.868874 185.052638 −229.494339 −245.793520 189.500069 183.548663 −238.157568 −240.301810 197.046998 181.966912 −246.604836 −234.635231 204.505973 180.306018 −254.830882 −228.802188 211.873288 178.564567 −262.830898 −222.811287 219.145223 176.741104 −270.600525 −216.671307 226.318037 174.834130 −278.135854 −210.391180 233.387978 172.842110 −285.433417 −203.979963 240.351271 170.763472 −292.490182 −197.446813 247.204129 168.596612 −299.303543 −190.800959 253.942740 166.339894 −305.871303 −184.051679 260.563272 163.991653 −312.191661 −177.208269 267.061866 161.550199 −318.263190 −170.280018 273.434636 159.013817 −324.084817 −163.276183 279.677668 156.380772 −329.655800 −156.205956 285.787017 153.649310 −334.975702 −149.078446 291.758714 150.817658 −340.044370 −141.902646 297.588769 147.884036 −344.861903 −134.687413 303.273181 144.846651 −349.428636 −127.441440 308.807950 141.703710 −353.745113 −120.173238 314.189092 138.453422 −357.812067 −112.891114 319.412661 135.094006 −361.630399 −105.603155 324.474764 131.623703 −365.201166 −98.317211 329.371592 128.040784 −368.525555 −91.040886 334.099440 124.343566 −371.604880 −83.781526 338.654728 120.530422 −374.440561 −76.546216 343.034030 116.599808 −377.034115 −69.341779 347.234087 112.550270 −379.387149 −62.174770 351.251828 108.380479 −381.501344 −55.051487 355.084380 104.089245 −383.378452 −47.977967 358.729072 99.675547 −385.020289 −40.959997 362.183440 95.138562 −386.428720 −34.003123 365.445217 90.477684 −387.605661 −27.112656 368.512323 85.692559 −388.553062 −20.293680 371.382850 80.783102 −389.272903 −13.551064 374.055035 75.749522 −389.767180 −6.889470 376.527235 70.592338 −390.037894 −0.313355 378.797898 65.312391 −390.087034 6.173017 380.865534 59.910851 −389.916569 12.565580 382.728677 54.389216 −389.528426 18.860467 384.385864 48.749308 −388.924481 25.054013 385.835606 42.993261 −388.106548 31.142767 387.076366 37.123509 −387.076366 37.123509

Design Data for FIG. 4A

TABLE 11 for projection optical unit 400 of FIG. 4A: Numerical Aperture 0.75 Magnification in x-direction 0.250 Magnification in y-direction 0.125 Chief Ray angle 5.50° Wavelength 13.5 nm Image field size in x-direction 26 mm Image field size in y-direction 1 mm Average Wavefront-RMS 6.87 mλ

TABLE 12 for projection optical unit 400 of FIG. 4A: Radii of Surfaces Radius_(x) Power_(x) Radius_(y) Power_(y) [mm] [1/mm] [mm] [1/mm] M01 −3689.86177464 0.00052901 −1889.42699031 0.00103311 M02 2262.82803946 −0.00011284 18970.07022923 −0.00001346 M03 9289.99315567 −0.00007790 −4145.35851898 0.00017459 M04 −2781.52934966 0.00071116 −1634.09969128 0.00121052 M05 −66228.84296239 0.00000890 57980.90482880 −0.00001016 M06 20296.78796403 −0.00001267 −10074.33166421 0.00002552 M07 4607.97616416 −0.00038954 434.68724528 −0.00412939 M08 −984.23726449 0.00201689 −851.26294444 0.00233194

TABLE 13 for projection optical unit 400 of FIG. 4A: Decentring (location, angle) of surfaces D_(x) [mm] D_(y) [mm] D_(z) [mm] Reticle 0.000000000 0.000000000 0.000000000 M01 0.000000000 −215.495043511 2238.001595668 M02 0.000000000 −570.064547548 1090.549078471 M03 0.000000000 −1180.350914725 570.109066363 M04 0.000000000 −3044.361576313 258.680581926 M05 0.000000000 −2368.480962084 687.516145920 M06 0.000000000 −2030.465535471 1113.526237736 M07 −0.000000000 −1775.493177437 2381.352572167 Stop −0.000000000 −1799.080518072 2304.006588682 M08 0.000000000 −1981.747071377 1705.019003181 Wafer −0.000000000 −1981.750996952 2497.592638799 α_(x) [°] α_(y) [°] α_(z) [°] Reticle 0.000000000 0.000000000 0.000000000 M01 −5.835726662 0.000000000 0.000000000 M02 56.642714131 180.000000000 0.000000000 M03 204.970966472 0.000000000 0.000000000 M04 −69.060233763 180.000000000 0.000000000 M05 221.982213560 0.000000000 0.000000000 M06 65.099441448 180.000000000 0.000000000 M07 −14.165305433 −0.000000000 −0.000000000 Stop 3.082253291 180.000000000 −0.000000000 M08 −8.479631987 180.000000000 −0.000000000 Wafer 0.000283783 −0.000000000 0.000000000

TABLE 14 for projection optical unit 400 of FIG. 4A: Free form coefficients of surfaces Coefficient Formula M01 M02 M03 C7 x² y 3.9664864304e−08  6.2055423613e−09 −1.1664650656e−07  C9 y³ 1.1045629451e−09 −1.3685039357e−07 5.0942985965e−08 C10 x⁴ 1.7726692614e−11 −4.2291488739e−11 −7.7971336916e−11  C12 x² y² 2.4620783833e−11 −1.5070109961e−10 5.4145270950e−11 C14 y⁴ −1.7868222013e−11   2.2949722748e−10 −1.3548376981e−12  C16 x⁴ y 1.7074574712e−14  1.3694280350e−13 5.7964800377e−14 C18 x² y³ 1.3630323002e−14  1.5247912631e−13 2.8014537833e−14 C20 y⁵ −6.2700372245e−14  −1.2085266994e−12 −5.1630442224e−14  C21 x⁶ 1.4962804236e−17 −1.2611303104e−16 −9.8706120538e−17  C23 x⁴ y² 2.4197049221e−17 −2.8587966469e−16 1.4190136454e−17 C25 x² y⁴ 7.4055298794e−17 −1.5927431834e−17 −1.7204279550e−16  C27 y⁶ −9.0556677762e−17   5.2186461472e−15 1.3043537193e−16 C29 x⁶ y −8.6149869147e−21   1.0703352441e−19 1.8461596673e−19 C31 x⁴ y³ −1.6385881134e−20   5.1382075616e−19 −1.9974994625e−19  C33 x² y⁵ 5.7357245908e−20 −3.5720112725e−18 3.8590192262e−19 C35 y⁷ −1.9219901140e−19  −1.4876540285e−17 4.0737832415e−19 C36 x⁸ −2.5350813751e−24  −6.4073682498e−22 −2.6237229725e−23  C38 x⁶ y² −3.3572632366e−23   2.2261437236e−22 −3.0312148285e−22  C40 x⁴ y⁴ −3.7915462826e−22  −1.1097556559e−21 3.2794041434e−22 C42 x² y⁶ 9.3749923165e−22  2.4164873484e−20 1.4613379930e−21 C44 y⁸ 1.9166580897e−21  1.5681796957e−20 5.8145282726e−22 C46 x⁸ y 3.9258913875e−26  1.6677324438e−24 2.6768156456e−26 C48 x⁶ y³ −1.2266158092e−25  −4.3011792692e−24 1.3309136322e−25 C50 x⁴ y⁵ −3.0713642221e−25  −1.9012113015e−23 8.3934582291e−25 C52 x² y⁷ 9.3299290004e−24 −8.5481625873e−23 −4.0235974399e−24  C54 y⁹ 6.2497173471e−24 −1.0076883167e−22 −7.4365199849e−25  C55 x¹⁰ 3.3021902780e−29  7.8705825888e−27 4.8384775287e−28 C57 x⁸ y² 9.3919897258e−28  4.6884464602e−27 4.9905868933e−29 C59 x⁶ y⁴ 9.5452863382e−27  5.8964599175e−26 3.0740068878e−27 C61 x⁴ y⁶ 2.9385272024e−26  1.1944333777e−25 2.9322819934e−27 C63 x² y⁸ −2.7963147244e−26  −2.0527567448e−25 5.4272894367e−26 C65 y¹⁰ −1.0971768970e−25   1.8370235595e−24 2.7581455650e−26 C67 x¹⁰ y −1.9317514726e−31  −1.6338495986e−29 −1.4952974970e−30  C69 x⁸ y³ 2.4550580645e−31  6.4001166686e−29 4.5356690234e−30 C71 x⁶ y⁵ 1.6667635239e−29  1.8024186267e−28 4.3069853822e−29 C73 x⁴ y⁷ −5.6933443116e−29   6.2804071719e−28 2.7265072802e−28 C75 x² y⁹ −8.0026705242e−28   1.6248367164e−27 4.5837023777e−28 C77 y¹¹ −7.9389382555e−28  −1.0768757560e−26 5.7193284117e−29 C78 x¹² −2.9852448203e−34  −2.7674830986e−32 −2.2105103719e−33  C80 x¹⁰ y² −8.8613571441e−33  −6.5502438464e−32 −2.0543789034e−33  C82 x⁸ y⁴ −1.2071464115e−31  −9.1918193521e−31 1.4116944767e−32 C84 x⁶ y⁶ −6.4446367789e−31  −2.9712495921e−30 3.6677856214e−31 C86 x⁴ y⁸ −1.2231375293e−30  −2.0296693129e−30 −2.6824236079e−31  C88 x² y¹⁰ 1.0644328418e−30  2.2040482092e−29 −3.5978371022e−30  C90 y¹² 3.2700914419e−30  2.9427716513e−29 −3.4391806760e−30  C92 x¹² y 1.6876732821e−36  1.8985325314e−35 1.2087177200e−35 C94 x¹⁰ y³ 3.6637199170e−36 −6.1638833092e−34 −1.0880682011e−35  C96 x⁸ y⁵ −9.4278695533e−35  −3.3181807092e−33 −1.3540012059e−34  C98 x⁶ y⁷ −5.1385809247e−34  −1.0570183788e−32 −2.4927237785e−33  C100 x⁴ y⁹ 4.5008639763e−33 −4.4485963436e−32 −1.5806617912e−32  C102 x² y¹¹ 3.0176109024e−32 −2.1094761773e−31 −3.4942943877e−32  C104 y¹³ 2.7360883594e−32 −1.9921035218e−32 −1.5088204103e−32  C105 x¹⁴ 1.3881896314e−39  3.5685987973e−38 7.3296297351e−39 C107 x¹² y² 4.6848990951e−38  5.8271069137e−37 2.5128752682e−38 C109 x¹⁰ y⁴ 7.5193796292e−37  8.6831667968e−36 −1.3179184807e−38  C111 x⁸ y⁶ 6.1180573141e−36  4.4709083266e−35 −4.1962512541e−36  C113 x⁶ y⁸ 2.1191002541e−35  9.1281763302e−35 −2.2067328831e−35  C115 x⁴ y¹⁰ 3.3200878604e−35  1.8296825291e−34 −1.3867933484e−35  C117 x² y¹² −9.9290243986e−36   3.6272836091e−34 5.2399072970e−35 C119 y¹⁴ −4.1883091920e−35  −3.5117585872e−34 8.2299026873e−35 C121 x¹⁴ y −6.9307066555e−42   2.4855488479e−40 −4.6411241968e−41  C123 x¹² y³ −2.6494616783e−41   3.1956997008e−39 1.2068609299e−40 C125 x¹⁰ y⁵ 7.5957361796e−41  1.9868423491e−38 −4.3804039799e−40  C127 x⁸ y⁷ 2.8461488989e−39  9.3511865077e−38 −1.2305966184e−38  C129 x⁶ y⁹ 1.0245097841e−39  2.0540743098e−37 3.1127239566e−38 C131 x⁴ y¹¹ −1.1284015896e−37   5.3584395940e−37 4.0473661977e−37 C133 x² y¹³ −5.6961243590e−37   2.5225734553e−36 1.0170314653e−36 C135 y¹⁵ −4.3547148498e−37   2.6412018607e−36 5.0457678658e−37 C136 x¹⁶ −3.6439774609e−45  −1.5984693428e−43 −1.3028864809e−44  C138 x¹⁴ y² −1.3161405399e−43  −2.6404000112e−42 −5.1771423606e−44  C140 x¹² y⁴ −2.4059399466e−42  −3.8883173012e−41 −1.9513683039e−43  C142 x¹⁰ y⁶ −2.5072152548e−41  −2.8276083994e−40 5.3122445462e−42 C144 x⁸ y⁸ −1.3395462785e−40  −8.7831340365e−40 9.2566044483e−41 C146 x⁶ y¹⁰ −3.5147113550e−40  −1.1559106071e−39 3.7733428276e−40 C148 x⁴ y¹² −5.1065276334e−40  −4.2540756895e−39 8.5249561669e−40 C150 x² y¹⁴ −3.2629694036e−40  −1.3919168206e−38 7.6999450965e−40 C152 y¹⁶ −5.3937006908e−42  −8.9784947111e−39 −2.7456337260e−40  C154 x¹⁶ y 9.0556099491e−48 −5.1042612211e−46 6.2908267208e−47 C156 x¹⁴ y³ 5.5899410166e−47 −6.5745362795e−45 −5.3691243814e−46  C158 x¹² y⁵ 2.2711276662e−46 −4.9753431263e−44 −1.7371104867e−45  C160 x¹⁰ y⁷ −2.1342930323e−45  −3.2190115168e−43 7.1916152687e−44 C162 x⁸ y⁹ −2.0535904468e−44  −1.3335193119e−42 3.9603994342e−43 C164 x⁶ y¹¹ 7.9646881418e−44 −2.3332197593e−42 1.0355687111e−43 C166 x⁴ y¹³ 9.7005315946e−43  8.0391837581e−42 −4.3319926708e−42  C168 x² y¹⁵ 4.3198666300e−42  2.6816703361e−41 −1.0665168742e−41  C170 y¹⁷ 2.2454045636e−42  1.4889097355e−41 −5.3297460523e−42  C171 x¹⁸ 4.1872349782e−51  5.4820086405e−49 1.0589952876e−50 C173 x¹⁶ y² 1.5039378574e−49  5.4752404715e−48 −2.5213744367e−50  C175 x¹⁴ y⁴ 3.0846997272e−48  7.1812639805e−47 −1.5476848231e−48  C177 x¹² y⁶ 3.8747955413e−47  6.7163150949e−46 4.9641949310e−48 C179 x¹⁰ y⁸ 2.6861711567e−46  3.2071454862e−45 1.4187222151e−46 C181 x⁸ y¹⁰ 1.0794113751e−45  7.6631344165e−45 2.5896772316e−46 C183 x⁶ y¹² 2.3600289824e−45  8.5992025295e−45 −1.3984080841e−45  C185 x⁴ y¹⁴ 3.3824867926e−45 −4.6051479192e−45 −1.3159179846e−44  C187 x² y¹⁶ 5.9366602831e−45 −1.8967619610e−44 −2.0871517822e−44  C189 y¹⁸ 1.3124851518e−45 −9.7358055589e−45 −8.0348459291e−45  Coefficient Formula M04 M05 M06 C7 x² y −1.1889462116e−08 1.0803014811e−07 −1.5574183556e−08  C9 y³ −1.5175697959e−07 4.3360348778e−09 5.3980081958e−08 C10 x⁴ −9.7892441339e−13 2.7740619699e−11 8.2621358927e−11 C12 x² y²  7.4870553983e−12 −1.4171540184e−10  −4.9728632987e−11  C14 y⁴ −6.4586744649e−10 5.7196640861e−11 −1.0886295127e−10  C16 x⁴ y −4.2366437961e−15 −8.1278683426e−14  2.1492040193e−13 C18 x² y³ −7.2734591451e−14 2.1057968845e−13 2.3034720713e−13 C20 y⁵ −2.6020653763e−12 −1.2521389455e−13  2.4782937547e−14 C21 x⁶  8.5999864319e−19 −3.1563552296e−17  −1.0941821814e−16  C23 x⁴ y² −1.4881512436e−18 1.4616074314e−16 −7.7105511856e−17  C25 x² y⁴ −2.1194936878e−16 −4.3449855554e−16  8.2094305722e−16 C27 y⁶ −9.8302217171e−15 3.6207067553e−16 6.3094888352e−16 C29 x⁶ y −2.6433521307e−22 5.9772657790e−20 −3.3092440447e−19  C31 x⁴ y³ −5.5564149907e−20 −2.1731266213e−19  −4.4090423322e−18  C33 x² y⁵ −9.9017470705e−19 9.4786522341e−19 −4.7426364304e−18  C35 y⁷ −2.3777070226e−17 −5.1535348926e−19  6.9723762339e−18 C36 x⁸  6.6813877252e−25 −5.2215224448e−23  −3.4739652762e−21  C38 x⁶ y²  8.6440640368e−25 3.3675018090e−23 4.8123988276e−21 C40 x⁴ y⁴ −1.2673964184e−22 4.9033896043e−22 4.6492412183e−21 C42 x² y⁶ −6.8134578758e−21 −2.7551997096e−21  −7.0688634875e−20  C44 y⁸  1.2854629917e−19 7.0686436876e−22 −8.9714560391e−20  C46 x⁸ y  1.6763878105e−27 −1.2254482577e−26  1.1603989325e−22 C48 x⁶ y³ −2.7075044736e−26 −3.5558404940e−25  2.1320450004e−22 C50 x⁴ y⁵ −3.5075243593e−24 9.3166539883e−26 4.2001644961e−22 C52 x² y⁷ −1.1830246799e−22 1.2188584117e−23 5.6186066009e−22 C54 y⁹ −2.6980748707e−22 −2.3829220559e−23  −1.2883611668e−23  C55 x¹⁰ −1.1582252478e−30 8.4610577686e−28 2.4644341252e−25 C57 x⁸ y² −8.2897175732e−30 −1.1581364502e−27  5.5456411541e−25 C59 x⁶ y⁴ −1.4407421655e−27 2.8315688802e−27 4.6686712286e−25 C61 x⁴ y⁶ −4.6157453258e−26 −3.7557856277e−27  −8.2889130963e−25  C63 x² y⁸ −4.6106556973e−25 −5.0016852954e−26  2.9905817085e−24 C65 y¹⁰ −5.5399535762e−24 3.2078052289e−26 4.7069245023e−24 C67 x¹⁰ y −9.6284071855e−33 3.2051161267e−31 −1.1854523257e−26  C69 x⁸ y³ −3.2356105780e−32 −1.1437837778e−30  −3.1055605090e−26  C71 x⁶ y⁵  4.4119639162e−30 −1.5412277126e−29  −9.7498319337e−27  C73 x⁴ y⁷  3.9091741188e−28 −8.4281499833e−29  −2.8016099673e−26  C75 x² y⁹  6.9479390089e−27 1.5778014480e−28 −3.9176969581e−26  C77 y¹¹  6.0198776726e−26 1.2414625561e−27 −1.8566866418e−26  C78 x¹²  3.6349419194e−36 −6.6921373350e−33  −2.4421538154e−29  C80 x¹⁰ y²  4.1729286790e−35 2.2546804714e−32 −5.5220516976e−29  C82 x⁸ y⁴  5.7724338021e−33 −1.5770461456e−32  −1.9207176835e−28  C84 x⁶ y⁶  3.2018718641e−31 4.0411357406e−32 −2.6781274778e−30  C86 x⁴ y⁸  6.1575436610e−30 1.0254323778e−30 1.0521727248e−28 C88 x² y¹⁰ −5.5814158629e−30 5.9913658247e−31 −7.5255205721e−30  C90 y¹² −4.2953518841e−28 −4.5568375622e−30  −9.3353989747e−29  C92 x¹² y  1.4006338500e−38 5.1222870885e−36 5.2407289746e−31 C94 x¹⁰ y³ −1.0440574764e−37 1.9320249815e−35 2.6685224840e−30 C96 x⁸ y⁵ −6.6131517009e−36 2.4565309591e−34 1.2741390086e−30 C98 x⁶ y⁷ −1.1419505524e−33 2.5004499588e−34 8.1396825647e−33 C100 x⁴ y⁹ −5.7680409840e−32 −3.2102003843e−33  1.0137747949e−30 C102 x² y¹¹ −9.1987881432e−31 −9.6518164408e−33  1.3359390234e−30 C104 y¹³ −6.2198470157e−30 −2.7944107970e−32  8.7749131060e−31 C105 x¹⁴ −5.9120494565e−42 3.8300053718e−38 1.1728499580e−33 C107 x¹² y² −2.4093007298e−40 −3.1199325629e−37  2.9405516875e−33 C109 x¹⁰ y⁴ −1.6284601898e−38 −5.2657846642e−37  1.4813918263e−32 C111 x⁸ y⁶ −1.0410299806e−36 −3.1296272281e−37  1.1209030741e−32 C113 x⁶ y⁸ −4.2233158742e−35 −5.2350385460e−36  −6.2500433413e−34  C115 x⁴ y¹⁰ −6.1447694539e−34 −1.5849663524e−35  −5.9130605065e−33  C117 x² y¹² −8.2369651293e−34 3.0993794759e−35 −4.0625084492e−33  C119 y¹⁴  2.9199912939e−32 1.8492992593e−34 −1.1391763535e−33  C121 x¹⁴ y −2.7071762133e−44 −3.7321581238e−41  −1.4173430277e−35  C123 x¹² y³  3.6256378412e−44 1.1064940629e−39 −1.1250757036e−34  C125 x¹⁰ y⁵  1.4600372340e−42 −6.9750245073e−40  −1.0425115590e−34  C127 x⁸ y⁷  9.0782831568e−40 4.5229033687e−39 5.2578461470e−36 C129 x⁶ y⁹  1.0003019700e−37 6.8798542950e−39 1.0533190311e−35 C131 x⁴ y¹¹  3.7988957797e−36 2.4731227245e−37 −8.6703778059e−36  C133 x² y¹³  5.4947553803e−35 −4.2224002766e−38  −1.2987048831e−35  C135 y¹⁵  1.1253528568e−34 1.4804530732e−37 −1.1082931599e−35  C136 x¹⁶  3.8678720059e−48 −1.1066670268e−43  −2.8587141582e−38  C138 x¹⁴ y²  7.0383260333e−46 1.1902940737e−42 −1.3539989281e−37  C140 x¹² y⁴  2.6890733666e−44 1.6670323365e−42 −6.5422751577e−37  C142 x¹⁰ y⁶  1.6949956574e−42 4.8333599106e−42 −6.4919823692e−37  C144 x⁸ y⁸  8.6606310347e−41 −3.9949984749e−41  −3.1738838058e−37  C146 x⁶ y¹⁰  2.6604897748e−39 1.5072458274e−40 1.0403073986e−39 C148 x⁴ y¹²  3.2831967592e−38 −1.4250525172e−39  1.2195426274e−37 C150 x² y¹⁴  1.5039394485e−37 4.7788437190e−40 1.0255180160e−37 C152 y¹⁶ −9.6283082192e−37 −3.8433868056e−39  5.5383752125e−38 C154 x¹⁶ y  2.8828707289e−50 −2.4136997923e−47  1.6634061863e−40 C156 x¹⁴ y³  3.8846436889e−49 −6.7483325986e−45  1.7338050560e−39 C158 x¹² y⁵  1.9371977941e−48 −7.4424023720e−45  2.3172617240e−39 C160 x¹⁰ y⁷ −8.6604124188e−47 5.3436583245e−45 2.5345306257e−40 C162 x⁸ y⁹ −5.6778591913e−44 1.0505376916e−43 −3.4292687512e−40  C164 x⁶ y¹¹ −3.3978522403e−42 −7.0101093965e−43  −3.5483627028e−40  C166 x⁴ y¹³ −9.7554605682e−41 4.0255034003e−42 −2.7773437364e−40  C168 x² y¹⁵ −1.3327520563e−39 −2.6303587217e−42  −2.2741514003e−40  C170 y¹⁷  3.1013408614e−39 1.1593642183e−41 −1.0382269805e−40  C171 x¹⁸ −6.0549491816e−55 1.2769287730e−49 2.8050935096e−43 C173 x¹⁶ y² −6.4388733863e−52 2.6348258796e−50 2.3670096589e−42 C175 x¹⁴ y⁴ −2.2559491999e−50 1.2478527944e−47 1.1808940965e−41 C177 x¹² y⁶ −1.0586155072e−48 −1.0684278379e−47  1.1559775439e−41 C179 x¹⁰ y⁸ −6.6358098091e−47 1.4015976604e−47 8.5438875348e−42 C181 x⁸ y¹⁰ −2.6873632528e−45 −1.5206483006e−46  4.2300134143e−42 C183 x⁶ y¹² −6.4520861904e−44 1.0064641931e−45 9.6529658727e−43 C185 x⁴ y¹⁴ −7.4232686951e−43 −4.5512086095e−45  1.7865928108e−43 C187 x² y¹⁶ −5.6717504267e−42 4.0984120054e−45 1.7941238276e−43 C189 y¹⁸  2.8018721209e−41 −1.1626854779e−44  7.3214094903e−44 Coefficient Formula M07 M08 C7 x² y 5.8591450504e−07  6.2879666942e−09 C9 y³ 4.5919571917e−08  6.4928885423e−09 C10 x⁴ 3.0278887945e−10 −2.8734281770e−12 C12 x² y² 2.0192601662e−09 −4.3110568837e−11 C14 y⁴ 4.2968825080e−09 −1.6106818200e−11 C16 x⁴ y 1.0166565410e−12 −5.3467978515e−15 C18 x² y³ 6.6903130116e−12  4.4723393341e−15 C20 y⁵ −5.7693430208e−12   7.4075084342e−15 C21 x⁶ 1.1549252169e−16 −3.4436357830e−18 C23 x⁴ y² 7.4131307107e−15 −7.5631170879e−17 C25 x² y⁴ 1.9117910572e−14 −9.2557541833e−17 C27 y⁶ 5.4648984188e−14 −2.5313062887e−17 C29 x⁶ y 3.9397452144e−18 −1.1592200297e−20 C31 x⁴ y³ 2.6328937160e−17 −4.5478542013e−21 C33 x² y⁵ 5.1636896863e−17  1.5123239423e−20 C35 y⁷ −2.0310963665e−16   9.5012100765e−21 C36 x⁸ 1.8030046938e−21 −3.9699292308e−24 C38 x⁶ y² 2.5061459131e−20 −1.0402613623e−22 C40 x⁴ y⁴ 1.9000433399e−19 −2.1349820462e−22 C42 x² y⁶ 1.7947789498e−19 −1.5351425534e−22 C44 y⁸ 1.2389426842e−18 −3.5266942201e−23 C46 x⁸ y −2.3071811289e−25  −2.2416267429e−26 C48 x⁶ y³ 1.9548830734e−22 −2.6571944691e−26 C50 x⁴ y⁵ 2.8100207761e−22 −2.1107662863e−27 C52 x² y⁷ 1.5069274432e−21  1.5767740531e−26 C54 y⁹ 1.0958365245e−20 −8.0678812181e−28 C55 x¹⁰ −9.8175603540e−27  −4.5973070743e−29 C57 x⁸ y² −6.6086006917e−26  −1.8092104893e−28 C59 x⁶ y⁴ −2.2348322146e−24  −5.4700475971e−28 C61 x⁴ y⁶ −1.4759069386e−23  −6.6438338438e−28 C63 x² y⁸ −2.6540756738e−24  −3.5713190043e−28 C65 y¹⁰ −6.5278658257e−24  −6.3593818199e−29 C67 x¹⁰ y 8.4168331196e−29  3.2941515726e−32 C69 x⁸ y³ −1.7286122351e−27   7.9387144461e−33 C71 x⁶ y⁵ −1.4552605266e−26   1.9531209160e−31 C73 x⁴ y⁷ 8.5340131769e−26  2.1706816849e−31 C75 x² y⁹ −6.8117633536e−26   1.3994351444e−31 C77 y¹¹ −3.2507739915e−24   1.2078665261e−31 C78 x¹² 2.1293167785e−31  7.5260308471e−35 C80 x¹⁰ y² 4.6368980127e−30  2.8192976246e−34 C82 x⁸ y⁴ 7.6024915925e−29  1.1330392042e−33 C84 x⁶ y⁶ 8.8457127676e−28  2.0989464381e−33 C86 x⁴ y⁸ 4.1247639513e−27  1.8562198360e−33 C88 x² y¹⁰ 2.3757563727e−27  5.9691356170e−34 C90 y¹² 1.1089271540e−26  4.5744656230e−35 C92 x¹² y −1.2604194133e−33   3.1684120565e−39 C94 x¹⁰ y³ 5.1355957130e−32 −2.9159696579e−37 C96 x⁸ y⁵ 8.2393492464e−31 −1.5508371008e−36 C98 x⁶ y⁷ 1.3982933836e−30 −1.9605953330e−36 C100 x⁴ y⁹ −1.6219115973e−29  −1.0416816736e−36 C102 x² y¹¹ 3.9337972715e−29 −3.7313911597e−37 C104 y¹³ 3.8969203040e−28 −5.0880055559e−37 C105 x¹⁴ −3.0923202678e−36  −3.6069628073e−40 C107 x¹² y² −7.0307384216e−35  −3.3045202834e−39 C109 x¹⁰ y⁴ −1.0921920569e−33  −1.3712397510e−38 C111 x⁸ y⁶ −1.6322206821e−32  −3.1311521401e−38 C113 x⁶ y⁸ −1.5355218039e−31  −4.0343661112e−38 C115 x⁴ y¹⁰ −5.5099552525e−31  −2.7046699845e−38 C117 x² y¹² −3.9201412334e−31  −7.7727790672e−39 C119 y¹⁴ −1.6186247279e−30  −7.5873752781e−40 C121 x¹⁴ y 2.3592624001e−38 −2.5976423847e−43 C123 x¹² y³ −5.9757351513e−37   6.3110496223e−43 C125 x¹⁰ y⁵ −1.5793966354e−35   6.5950868037e−42 C127 x⁸ y⁷ −8.1031033444e−35   1.1943555705e−41 C129 x⁶ y⁹ 1.5242878696e−34  9.8383872705e−42 C131 x⁴ y¹¹ 1.4504685420e−33  4.0945090538e−42 C133 x² y¹³ −6.9250390502e−33   1.0912763666e−42 C135 y¹⁵ −3.0767389213e−32   1.5502629017e−42 C136 x¹⁶ 3.2009425124e−41  1.0799106135e−45 C138 x¹⁴ y² 7.7609203072e−40  1.1587702096e−44 C140 x¹² y⁴ 1.0547926042e−38  5.4288895239e−44 C142 x¹⁰ y⁶ 1.7117284509e−37  1.4944350369e−43 C144 x⁸ y⁸ 2.3247824741e−36  2.5051834895e−43 C146 x⁶ y¹⁰ 1.6583891722e−35  2.4631259253e−43 C148 x⁴ y¹² 4.5579699659e−35  1.3235487993e−43 C150 x² y¹⁴ 4.0309377092e−35  3.1286597406e−44 C152 y¹⁶ 1.4017713731e−34  2.6154787466e−45 C154 x¹⁶ y −2.1322017114e−43   4.4423168097e−49 C156 x¹⁴ y³ 4.3802377386e−42 −1.1675627061e−48 C158 x¹² y⁵ 1.7963885593e−40 −1.7823882665e−47 C160 x¹⁰ y⁷ 1.4604963485e−39 −4.3728662892e−47 C162 x⁸ y⁹ 1.4855904233e−39 −4.3650115366e−47 C164 x⁶ y¹¹ −2.5669508766e−38  −2.0560188697e−47 C166 x⁴ y¹³ −5.3146362249e−38  −1.9519133867e−48 C168 x² y¹⁵ 5.5888272702e−37  1.7460467076e−48 C170 y¹⁷ 1.4308525784e−36 −2.1142995515e−48 C171 x¹⁸ −2.0895154564e−46  −2.3186639035e−51 C173 x¹⁶ y² −5.4698631430e−45  −2.8149892927e−50 C175 x¹⁴ y⁴ −5.4986476975e−44  −1.5117151055e−49 C177 x¹² y⁶ −8.0198336512e−43  −4.7856613581e−49 C179 x¹⁰ y⁸ −1.7307390353e−41  −9.6982155825e−49 C181 x⁸ y¹⁰ −1.9805613309e−40  −1.2438181640e−48 C183 x⁶ y¹² −1.0524507553e−39  −9.8032783691e−49 C185 x⁴ y¹⁴ −2.2943340563e−39  −4.4276608240e−49 C187 x² y¹⁶ −2.5970624312e−39  −9.2847726577e−50 C189 y¹⁸ −6.9069422647e−39  −7.2445661309e−51 C191 x¹⁸ y 1.0394509825e−48 −5.0430730055e−55 C193 x¹⁶ y³ −1.5409800965e−47   5.6286971050e−55 C195 x¹⁴ y⁵ −1.0494220255e−45   2.4848826121e−53 C197 x¹² y⁷ −1.2490997499e−44   8.1634388312e−53 C199 x¹⁰ y⁹ −3.7707200126e−44   1.1147560465e−52 C201 x⁸ y¹¹ 1.6598876440e−43  6.6618136336e−53 C203 x⁶ y¹³ 1.2757418511e−42  6.7694998903e−54 C205 x⁴ y¹⁵ 2.0573595298e−43 −1.7599605070e−53 C207 x² y¹⁷ −2.1853498739e−41  −1.0941714729e−53 C209 y¹⁹ −3.5169008901e−41   5.6179001778e−55 C210 x²⁰ 7.8471602375e−52  2.6936340216e−57 C212 x¹⁸ y² 2.3362586035e−50  3.7085309618e−56 C214 x¹⁶ y⁴ 1.4776050341e−49  2.2376576894e−55 C216 x¹⁴ y⁶ 5.9602463710e−50  7.9831432866e−55 C218 x¹² y⁸ 4.7355798579e−47  1.8795286333e−54 C220 x¹⁰ y¹⁰ 1.0639407840e−45  2.9528626694e−54 C222 x⁸ y¹² 9.0867560848e−45  3.0494331341e−54 C224 x⁶ y¹⁴ 3.6195308132e−44  2.0078799656e−54 C226 x⁴ y¹⁶ 6.7188688213e−44  7.8434370610e−55 C228 x² y¹⁸ 9.6719304247e−44  1.4756858954e−55 C230 y²⁰ 1.7971593619e−43  1.0388955136e−56 C232 x²⁰ y −2.0590142635e−54   2.1222781504e−61 C234 x¹⁸ y³ 2.2772383448e−53 −7.3512550517e−61 C236 x¹⁶ y⁵ 2.5547168047e−51 −1.7905602422e−59 C238 x¹⁴ y⁷ 4.1784264203e−50 −6.7940598131e−59 C240 x¹² y⁹ 2.2651281241e−49 −1.1438670506e−58 C242 x¹⁰ y¹¹ −1.7281537318e−49  −9.1321121036e−59 C244 x⁸ y¹³ −6.1917057952e−48  −1.1798516165e−59 C246 x⁶ y¹⁵ −2.1096821938e−47   3.9720900576e−59 C248 x⁴ y¹⁷ 2.0766851928e−47  3.8838255906e−59 C250 x² y¹⁹ 3.3743329001e−46  1.6267270291e−59 C252 y²¹ 3.2201734386e−46  1.5043212354e−60 C253 x²² −1.2848945662e−57  −1.5048535995e−63 C255 x²⁰ y² −4.3804338774e−56  −2.3438373946e−62 C257 x¹⁸ y⁴ −1.0956227257e−55  −1.5738453319e−61 C259 x¹⁶ y⁶ 9.1567525089e−54 −6.2705704939e−61 C261 x¹⁴ y⁸ 4.6866683148e−53 −1.6688456532e−60 C263 x¹² y¹⁰ −1.7190809823e−51  −3.0649519500e−60 C265 x¹⁰ y¹² −2.6806942562e−50  −3.8818410032e−60 C267 x⁸ y¹⁴ −1.6741473721e−49  −3.3483242387e−60 C269 x⁶ y¹⁶ −5.2364624394e−49  −1.9026855291e−60 C271 x⁴ y¹⁸ −9.0258252309e−49  −6.6441940854e−61 C273 x² y²⁰ −1.5656504955e−48  −1.1764046265e−61 C275 y²² −1.7575245240e−48  −8.0461244359e−63

TABLE 15 for projection optical unit 400 of FIG. 4A: Coordinates of stop edge x_(i) [mm] y_(i) [mm] x_(i+N/2) [mm] y_(i+N/2) [mm] −375.785573 −120.600951 348.818901 71.162052 −371.790511 −127.592311 338.331862 82.647857 −363.800386 −140.076881 326.846057 93.634279 −349.817667 −158.554046 311.864572 106.618232 −335.335565 −174.534296 304.373830 112.610826 −327.844822 −182.025038 287.394814 125.095397 −314.361486 −194.509609 274.410860 133.584905 −302.376298 −204.497265 259.928759 142.573796 −286.396048 −216.482453 237.456532 155.058366 −271.414564 −226.969492 227.468875 160.052194 −251.938633 −238.954680 203.498500 171.038616 −227.468875 −252.438016 179.528124 180.526890 −212.986773 −259.429376 165.545405 185.520718 −194.010226 −267.918884 151.562686 190.015164 −160.551577 −280.403454 134.084288 195.008992 −130.588608 −289.392345 116.605889 199.503437 −98.628107 −296.883087 95.631810 203.997883 −68.665138 −301.876916 71.661435 207.992945 −46.692294 −304.373830 50.687356 210.489859 −17.728090 −306.371361 25.218832 212.487391 17.228707 −306.371361 8.739199 212.986773 34.707106 −305.372595 −10.736731 212.986773 57.678716 −303.375064 −24.220067 212.487391 79.152177 −300.378767 −45.693528 210.989242 96.131193 −297.382470 −68.165755 208.492328 112.610826 −293.886790 −98.128724 203.498500 132.586139 −288.892962 −120.600951 198.504672 163.547874 −279.404689 −143.073178 192.512078 187.518250 −270.415798 −154.558983 189.016398 206.494797 −262.425673 −183.523187 179.028742 236.957149 −247.444188 −211.488625 167.542937 259.429376 −234.460235 −225.471344 161.050960 277.407157 −222.974430 −243.948508 151.562686 287.894197 −215.483688 −259.928759 142.573796 297.382470 −208.492328 −276.907775 132.086756 311.365189 −197.006523 −290.890494 122.598483 318.356549 −191.013929 −304.373830 112.610826 336.334330 −173.535530 −314.361486 104.620701 345.822604 −163.048491 −327.345440 93.134896 355.810260 −151.063304 −345.323221 75.157115 362.801620 −141.575030 −356.809026 61.673778 371.291128 −128.591077 −363.800386 52.185505 382.776933 −106.618232 −369.293597 44.195380 387.770761 −93.634279 −376.284956 32.709575 390.767058 −84.645388 −382.776933 19.725621 394.762120 −67.666372 −388.769527 4.744137 396.260269 −55.681185 −392.265206 −7.241051 396.759652 −48.190442 −394.762120 −18.726856 396.759652 −37.703403 −396.260269 −30.212661 395.760886 −24.719450 −396.759652 −37.204020 393.763355 −13.233645 −396.759652 −48.190442 390.767058 −1.747840 −396.260269 −56.180567 388.270144 6.242285 −394.262738 −69.663904 383.276316 18.726856 −391.765824 −81.149709 376.784339 31.710809 −386.771995 −96.630576 370.292362 42.697231 −383.775698 −104.121318 358.307174 59.676247

Design Data for FIG. 5A

TABLE 16 for projection optical unit 500 of FIG. 5A: Numerical Aperture 0.75 Magnification in x-direction 0.250 Magnification in y-direction 0.125 Chief Ray angle 5.50° Wavelength 13.5 nm Image field size in x-direction 26.0 mm Image field size in y-direction 1.0 mm Average Wavefront-RMS 9.30 mλ

TABLE 17 for projection optical unit 500 of FIG. 5A: Radii of surfaces Radius_(x) Power_(x) Radius_(y) Power_(y) [mm] [1/mm] [mm] [1/mm] M01 −3773.45945611 0.00052356 −1984.50851403 0.00099553 M02 2494.73642034 −0.00013910 35075.30462390 −0.00000989 M03 31768.81673263 −0.00002335 −3837.72785145 0.00019327 M04 −2972.94472808 0.00066709 −2239.56644945 0.00088553 M05 −14022.61923403 0.00003802 −12378.61280352 0.00004307 M06 27111.27722735 −0.00000676 70046.07947562 −0.00000262 M07 8037.79742245 −0.00021854 563.24653474 −0.00311873 M08 −1022.18217130 0.00193229 −854.42823841 0.00231167

TABLE 18 for projection optical unit 500 of FIG. 5A: Decentring (location, angle) of surfaces D_(x) [mm] D_(y) [mm] D_(z) [mm] Reticle 0.000000000 0.000000000 0.000000000 M01 0.000000000 −206.637809028 2146.015698531 M02 0.000000000 −473.982097337 797.484943900 M03 0.000000000 −1113.229211002 208.980263943 M04 0.000000000 −2712.118667808 −47.291695627 M05 0.000000000 −1960.784168915 356.299086230 M06 0.000000000 −1600.021134398 761.528950886 M07 0.000000000 −1102.426170878 2266.628412283 Stop 0.000000000 −1118.939719509 2216.679086078 M08 0.000000000 −1316.056862636 1620.449365718 Wafer 0.000000000 −1316.032908671 2398.486124526 α_(x) [°] α_(y) [°] α_(z) [°] Reticle 0.000000000 0.000000000 0.000000000 M01 −2.856704943 0.000000000 0.000000000 M02 60.709964014 180.000000000 0.000000000 M03 205.869662456 0.000000000 0.000000000 M04 −71.325433118 180.000000000 0.000000000 M05 218.282754271 0.000000000 0.000000000 M06 60.014082153 180.000000000 0.000000000 M07 −18.294197471 −0.000000000 −0.000000000 Stop 2.082883661 180.000000000 −0.000000000 M08 −9.147980738 180.000000000 −0.000000000 Wafer −0.001764005 −0.000000000 0.000000000

TABLE 19 for projection optical unit 500 of FIG. 5A: Free form coefficients of surfaces Coefficient Formula M01 M02 M03 C7 x² y 2.0862621761e−08 4.4526531713e−08 −1.2038553821e−07 C9 y³ 1.5914713957e−08 −2.7134909466e−07   4.4948931547e−08 C10 x⁴ 1.2040965275e−11 9.8115077253e−12 −7.2077179325e−11 C12 x² y² 5.4471285484e−12 −2.2705164881e−10   7.2075077254e−11 C14 y⁴ −3.9916150166e−11  3.4054603272e−10 −5.4058145886e−12 C16 x⁴ y 1.6394253286e−14 9.8587175192e−14  5.7308487103e−14 C18 x² y³ 4.4127514733e−14 1.7311390006e−13 −2.2343813008e−14 C20 y⁵ −4.4104138494e−14  −7.6801152903e−13  −2.5515831759e−14 C21 x⁶ 8.5725785905e−18 6.8753147996e−17 −5.2448887688e−18 C23 x⁴ y² 1.1561605616e−17 −5.5538306738e−17  −1.0331514900e−17 C25 x² y⁴ 5.7630795069e−17 −9.2009769174e−16  −2.7294156057e−17 C27 y⁶ −2.0207927957e−16  3.6212807229e−15  3.1215571985e−17 C29 x⁶ y −2.5190575063e−22  4.6902430039e−20  3.2657743246e−20 C31 x⁴ y³ −1.0702224878e−20  −2.0470077650e−19  −1.3821383004e−20 C33 x² y⁵ 1.1664351205e−19 2.2084238387e−18  3.7462924279e−20 C35 y⁷ 3.0654350872e−20 −2.1484607595e−17   2.7144717854e−19 C36 x⁸ −3.1545823931e−24  −1.9444168169e−22   3.8017403512e−23 C38 x⁶ y² 9.4532254394e−24 −1.0160625945e−22  −4.4494011784e−23 C40 x⁴ y⁴ −5.1062776320e−23  −1.9712199912e−21  −2.4019580655e−24 C42 x² y⁶ −2.0943886193e−22  −3.4645513771e−21   1.4573968008e−21 C44 y⁸ 4.8742872183e−21 1.4071531857e−20  1.5784150896e−21 C46 x⁸ y 1.3661177774e−26 1.8826276011e−24 −1.2936090802e−25 C48 x⁶ y³ 3.9437316397e−25 6.3176356016e−25  1.7244972146e−26 C50 x⁴ y⁵ 1.4148539006e−24 −9.7098782081e−24   1.5540753408e−24 C52 x² y⁷ −4.8878345496e−24  −8.3462914158e−23  −4.8889183525e−24 C54 y⁹ −3.9673238822e−23  1.1996621514e−21 −1.6329087779e−23 C55 x¹⁰ −3.1473545094e−30  2.6952280173e−27 −1.3419066199e−28 C57 x⁸ y² −2.0774541887e−28  3.7971456267e−27  3.5648464872e−28 C59 x⁶ y⁴ −6.0097407920e−28  2.2069674054e−26  2.6796431169e−27 C61 x⁴ y⁶ 1.5762364294e−27 1.5590726827e−25 −1.6382791546e−26 C63 x² y⁸ −7.2178530611e−27  4.9411624087e−25 −6.7522670861e−26 C65 y¹⁰ −5.0556959782e−25  −8.7606475938e−24  −4.6113949464e−26 C67 x¹⁰ y −1.1087499135e−31  −9.8585942186e−30   7.4114382563e−31 C69 x⁸ y³ −4.0097718351e−30  2.5010651659e−30  1.0718095343e−30 C71 x⁶ y⁵ −3.7206035283e−29  1.6224079355e−28 −1.5339965647e−29 C73 x⁴ y⁷ −4.2503796056e−29  1.5664288247e−27 −1.7033370522e−30 C75 x² y⁹ 2.6154693834e−28 9.0941142140e−27  2.7624728920e−28 C77 y¹¹ 9.6815038555e−28 4.8455051194e−27  4.4811271212e−28 C78 x¹² 1.4915052368e−34 −1.2248492309e−32  −3.1580648371e−34 C80 x¹⁰ y² 3.0888317919e−33 −6.5360848831e−32  −1.9208824586e−33 C82 x⁸ y⁴ 2.5120700028e−32 −3.9354735285e−31  −3.4064722380e−32 C84 x⁶ y⁶ 8.0801596950e−32 −2.0988724331e−30  −2.3679531354e−32 C86 x⁴ y⁸ 3.2126723556e−31 −1.1026009122e−29   8.3677317131e−31 C88 x² y¹⁰ 4.3471488184e−31 −8.8107191232e−29   2.1082560461e−30 C90 y¹² 1.8155414578e−29 1.8988516408e−28  1.1896012241e−30 C92 x¹² y 6.3230330769e−37 1.0260784530e−34 −3.3451756978e−36 C94 x¹⁰ y³ 2.2758981848e−35 1.4551204461e−34 −1.0608646184e−35 C96 x⁸ y⁵ 3.2350162697e−34 −2.0111818244e−33  −8.9923512506e−35 C98 x⁶ y⁷ 1.4679398762e−33 −1.3728766456e−32   5.3131364114e−34 C100 x⁴ y⁹ 5.8773515569e−34 −8.9252509799e−32  −1.4496732657e−33 C102 x² y¹¹ −8.7981147593e−33  −2.9466362793e−32  −7.3492934464e−33 C104 y¹³ −1.2594286105e−32  −5.8669520062e−31  −7.9728511719e−33 C105 x¹⁴ −8.4393719325e−40  5.14322764346e−38   2.7577535721e−39 C107 x¹² y² −2.1012297674e−38  7.9130876077e−37  2.6635252673e−39 C109 x¹⁰y⁴ −2.2258898555e−37  3.0239359920e−36  1.2378864306e−37 C111 x⁸ y⁶ −1.6138803853e−36  3.5625413524e−35  1.1439391533e−36 C113 x⁶ y⁸ −4.4319953959e−36  2.7796110466e−35 −2.6221026624e−36 C115 x⁴ y¹⁰ −1.7798653484e−35  4.0212493418e−34 −2.1955522381e−35 C117 x² y¹² 1.1755036540e−35 3.1140221116e−33 −4.2878640113e−35 C119 y¹⁴ −3.9394095438e−34  −1.0445824873e−33  −2.0108606353e−35 C121 x¹⁴ y −1.8325637868e−42  −5.1345854251e−40   1.4930507429e−41 C123 x¹² y³ −6.6021076786e−41  −1.9409054822e−39   1.1833651617e−41 C125 x¹⁰ y⁵ −1.2665653569e−39  1.2230055397e−38  1.4254920245e−39 C127 x⁸ y⁷ −1.0562096264e−38  1.1106955742e−37  1.0366362278e−39 C129 x⁶ y⁹ −2.1800821761e−38  1.1825964005e−36 −5.7350822900e−39 C131 x⁴ y¹¹ −3.0083682668e−38  3.6343467698e−36  4.1594092134e−38 C133 x² y¹³ 2.6679576157e−37 −1.0844785714e−35   9.2500788698e−38 C135 y¹⁵ −3.6893304794e−37  2.7897788810e−36  8.1803842153e−38 C136 x¹⁶ 2.1235877506e−45 −5.9327943069e−44  −8.7059993069e−45 C138 x¹⁴ y² 7.5089809248e−44 −4.8872380727e−42   3.0817681521e−44 C140 x¹² y⁴ 9.2009847810e−43 −1.2249845606e−41  −2.7573941337e−43 C142 x¹⁰ y⁶ 8.9378216898e−42 −1.9555626216e−40  −7.5458944996e−44 C144 x⁸ y⁸ 4.6785101393e−41 −1.2702337594e−39  −1.5282184127e−41 C146 x⁶ y¹⁰ 1.2441213154e−40 −9.4411562258e−41   9.7266023088e−41 C148 x⁴ y¹² 2.6472699337e−40 −1.9048468274e−38   2.5058398851e−40 C150 x² y¹⁴ −1.1661185788e−40  −1.1052343743e−38   5.5105647972e−40 C152 y¹⁶ 3.0888744323e−39 3.2819721433e−38  1.7714535510e−40 C154 x¹⁶ y 2.0176683761e−48 1.4237382341e−45 −2.9208968457e−47 C156 x¹⁴ y³ 6.1753209884e−47 9.5809007223e−45  2.8688517393e−47 C158 x¹² y⁵ 1.8530510377e−45 −8.7789044366e−45  −2.8771220197e−45 C160 x¹⁰ y⁷ 1.9973088616e−44 −2.5833852359e−43  −2.5972979161e−44 C162 x⁸ y⁹ 1.1650362682e−43 −2.7427270126e−42   4.2591448733e−44 C164 x⁶ y¹¹ 2.3189367342e−44 −4.3448950330e−41  −1.4600669507e−43 C166 x⁴ y¹³ 7.1419447490e−43 1.4103980483e−42 −7.8081532922e−44 C168 x² y¹⁵ −3.1991998052e−42  1.2160183323e−40 −6.8117673446e−43 C170 y¹⁷ 6.7812235106e−42 −1.3702353078e−40  −2.9261301404e−43 C171 x¹⁸ −2.1304574876e−51  −3.3170003488e−51   1.0268381112e−50 C173 x¹⁶ y² −1.0821879622e−49  1.4102048734e−47 −1.5061400132e−49 C175 x¹⁴ y⁴ −1.4495215591e−48  4.0986046076e−47  1.2927552297e−48 C177 x¹² y⁶ −1.6414429751e−47  3.4280309776e−46 −2.0053260587e−47 C179 x¹⁰ y⁸ −1.2933785928e−46  4.24379546576−45  4.0598795740e−47 C181 x⁸ y¹⁰ −4.4877998432e−46  1.8859113439e−44 −2.0066353095e−46 C183 x⁶ y¹² −1.5144207075e−45  1.1192211003e−43 −2.6239718724e−46 C185 x⁴ y¹⁴ 3.6601800504e−46 6.8816718627e−44 −2.0414458643e−45 C187 x² y¹⁶ −3.2314081441e−45  −1.7944290025e−43  −2.3289001527e−45 C189 y¹⁸ 3.2192294445e−45 1.5488698589e−43 −8.3916509789e−46 Coefficient Formula M04 M05 M06 C7 x² y −1.0340736175e−08  6.1461742513e−08 −2.2979275528e−08  C9 y³  1.4564202765e−09  1.7832450701e−08 6.2489369329e−09 C10 x⁴ −4.8299747578e−14  1.2055544451e−11 6.7274370335e−11 C12 x² y²  2.4045617257e−11 −5.8439212621e−11 2.7734473430e−11 C14 y⁴ −3.8118447927e−10 −6.1485451989e−12 1.4053021591e−11 C16 x⁴ y  −4.822247l792e−15 −3.1692780882e−14 1.0677278315e−13 C18 x² y³ −5.9494841092e−14  6.6418891029e−14 4.8432396094e−14 C20 y⁵ −4.0168343984e−12  1.0975495706e−14 −2.2366162070e−13  C21 x⁶  5.9235278736e−20  5.3610259960e−18 −1.3494968052e−16  C23 x⁴ y² −9.2501457734e−18  5.6512921178e−17 1.3884951937e−16 C25 x² y⁴ −5.0368199442e−16 −1.0116344790e−16 3.9598742480e−16 C27 y⁶ −2.5360315488e−14 −7.5189031221e−18 1.6354160026e−15 C29 x⁶ y −2.0220529433e−21  1.8097438903e−20 −7.6003375136e−19  C31 x⁴ y³ −9.9737625129e−20 −6.0458760794e−20 −1.1928936900e−18  C33 x² y⁵ −5.0881465300e−18  1.9704604948e−19 −1.5859642599e−17  C35 y⁷ −1.1533267980e−16  3.0049005823e−20 6.6697470698e−18 C36 x⁸ −5.9713125373e−25  8.3306999211e−23 −1.8094616450e−22  C38 x⁶ y² −4.3423632472e−24 −1.3304322532e−22 4.2647121626e−21 C40 x⁴ y⁴ −2.0918985672e−22 −3.1708769602e−23 7.5496306155e−20 C42 x² y⁶ −2.6889221960e−20 −5.9190999500e−22 −4.1843653058e−20  C44 y⁸  1.6139746006e−18 −6.4627354075e−22 −8.8454223849e−20  C46 x⁸ y  2.6610229438e−28 −3.6277622770e−25 7.9455589168e−24 C48 x⁶ y³  1.5886967391e−26  3.3404501277e−25 −1.6054666116e−22  C50 x⁴ y⁵ −6.9118820885e−24 −5.8905508801e−25 8.2287174501e−23 C52 x² y⁷ −6.0156072171e−22  3.8002813068e−24 1.8789843696e−21 C54 y⁹ −1.4674213084e−20  2.8024812565e−24 −3.4758185655e−22  C55 x¹⁰  1.4778033959e−30 −1.1998060432e−27 7.8209274545e−26 C57 x⁸ y² −1.7617406454e−29  1.7080399262e−27 −2.4211524989e−25  C59 x⁶ y⁴ −3.3324498448e−27  2.7392877109e−27 −1.4002351579e−24  C61 x⁴ y⁶ −1.7765840460e−25 −2.5425718407e−28 −1.2756342771e−23  C63 x² y⁸  2.1445083525e−24 −1.1419149615e−27 1.3502872719e−24 C65 y¹⁰ −8.1290467347e−22  1.6500328423e−26 7.5274904136e−24 C67 x¹⁰ y −1.9068215286e−33  5.8191120082e−30 −6.9567380630e−28  C69 x⁸ y³  2.4844761257e−31 −1.3349761159e−29 −1.5930983096e−26  C71 x⁶ y⁵ −1.7963495973e−29  3.1771959670e−30 8.8050530656e−26 C73 x⁴ y⁷  4.6897188010e−27  3.2260746728e−29 4.3491214381e−27 C75 x² y⁹  3.2439245228e−25 −1.7821059830e−28 −1.8868585012e−25  C77 y¹¹  3.3717580187e−24 −1.1293465940e−29 −1.1792506091e−26  C78 x¹² −2.1288314555e−37  5.8264551878e−33 −3.0788636458e−30  C80 x¹⁰ y²  8.6617784442e−35 −1.7150237282e−32 5.6785080422e−29 C82 x⁸ y⁴  1.2953523805e−32 −1.4698465768e−33 −2.2187332471e−28  C84 x⁶ y⁶  1.2487394046e−30 −1.2121618825e−31 1.9578070334e−28 C86 x⁴ y⁸  8.8286182470e−29  9.9319514976e−32 1.3808736998e−27 C88 x² y¹⁰  3.0055125508e−27 −5.8181551042e−33 4.6654184309e−28 C90 y¹²  2.4834055520e−25 −8.0648398886e−31 −2.9891406817e−28  C92 x¹² y  7.5362752466e−39 −3.2092216658e−35 2.6147308285e−32 C94 x¹⁰ y³ −1.7173427133e−36  1.7838957617e−34 2.4459640064e−30 C96 x⁸ y⁵  1.8549651015e−35  2.0541381647e−34 −3.0433359000e−30  C98 x⁶ y⁷  6.2603193166e−33 −2.1703231233e−34 −1.1568769945e−29  C100 x⁴ y⁹ −7.6137250748e−31 −5.9424699182e−34 −1.8449970893e−30  C102 x² y¹¹ −3.2002943660e−29  7.9564560348e−33 9.8812238419e−30 C104 y¹³  8.2090777235e−28  3.3344255315e−34 1.8002408143e−30 C105 x¹⁴ −2.6566237284e−42 −1.5699792115e−38 4.6956714102e−35 C107 x¹² y² −3.0324452347e−40  2.8617723291e−38 −3.8112969264e−33  C109 x¹⁰ y⁴ −4.1083977309e−38 −6.9182652380e−37 5.1840527908e−33 C111 x⁸ y⁶ −1.6360154891e−36  4.1327718620e−37 3.6458688204e−32 C113 x⁶ y⁸ −2.4259455130e−34  2.7408114877e−36 −9.4710233915e−33  C115 x⁴ y¹⁰ −1.5193269387e−32 −3.8304973803e−36 −8.2270304096e−32  C117 x² y¹² −6.8870581187e−31 −2.1731518563e−35 −5.7594649773e−32  C119 y¹⁴ −3.1350829528e−29  1.8767131409e−35 4.8491178608e−34 C121 x¹⁴ y −2.0555276388e−44  1.1270248862e−40 −3.8065102450e−37  C123 x¹² y³  3.0959830381e−42 −5.8266743190e−40 −9.6495026826e−35  C125 x¹⁰ y⁵  3.1718646165e−40 −1.5580962397e−40 −7.4365938716e−35  C127 x⁸ y⁷ −5.0659585290e−39 −3.1562801108e−39 3.8693613893e−34 C129 x⁶ y⁹ −9.5135759307e−37  1.1742339013e−39 5.9931685136e−34 C131 x⁴ y¹¹  2.3396486795e−35  1.2354162710e−38 2.6140677164e−34 C133 x² y¹³ −2.1841189683e−33 −1.0945371125e−37 −1.1895776296e−34  CI35 y¹⁵ −2.5833007126e−31 −8.0431550676e−39 −4.2273559456e−35  C136 x¹⁶  4.5653349380e−48  1.8525143601e−44 −4.6047268414e−41  C138 x¹⁴ y²  6.7161698912e−46  6.7090528783e−44 1.0106255506e−37 C140 x¹² y⁴  8.6528962878e−44  4.4965876214e−42 3.4324508466e−37 C142 x¹⁰ y⁶  5.8088183441e−42  6.8083663374e−42 −1.1127847969e−36  C144 x⁸ y⁸  1.0099538102e−40 −2.8918895961e−41 −1.9598658825e−36  C146 x⁶ y¹⁰  2.4604134550e−38  5.9437662467e−41 −3.2570112896e−37  C148 x⁴ y¹²  8.1459230441e−37 −1.4059483196e−40 1.9412445840e−36 C150 x² y¹⁴  3.8952760968e−35  9.4040228238e−40 1.9076632484e−36 C152 y¹⁶  8.8850322097e−34 −4.8273492807e−40 1.8332922475e−37 C154 x¹⁶ y  2.0483495867e−50 −2.4857620868e−46  5.44l6l93526e−43 C156 x¹⁴ y³ −1.4239110306e−48 −8.4781407214e−46 1.2418489639e−39 C158 x¹² y⁵ −3.6140385391e−46 −1.2798996179e−44 3.3666601871e−39 C160 x¹⁰ y⁷ −2.5551926258e−44 −1.2528893193e−44 −1.3480349311e−39  C162 x⁸ y⁹  1.8852259749e−43  1.8190938068e−43 −8.6531455905e−39  C164 x⁶ y¹¹  1.3282062940e−40 −5.6944090126e−43 −1.3114723128e−38  C166 x⁴ y¹³ −2.2036058915e−41  1.1355298523e−42 −1.1822136143e−38  C168 x² y¹⁵  3.9438839148e−37 −3.0767809363e−42 −5.9731152057e−39  C170 y¹⁷  1.6193103961e−35  1.9908090744e−42 −3.4449002514e−40  C171 x¹⁸ −2.5930830634e−54  8.3767611202e−51 −4.2891110413e−45  C173 x¹⁶ y² −6.6424810963e−52  6.1164404632e−49 −9.4627334757e−43  C175 x¹⁴ y⁴ −6.7206218612e−50 −1.1273029117e−48 −1.0095329440e−41  C177 x¹² y⁶ −7.8638761767e−48  2.6240653984e−47 −7.4397943283e−43  C179 x¹⁰ y⁸ −3.1606293512e−46 −5.3418714579e−47 2.2378507132e−4l  C181 x⁸ y¹⁰ −3.6449161843e−45 −1.0581568159e−46 3.4201095858e−41 C183 x⁶ y¹² −1.6848849722e−43  7.5676228217e−46 3.1900600321e−41 C185 x⁴ y¹⁴ −1.4011901686e−41 −1.8594866093e−45 1.7472566141e−41 C187 x² y  1.1123482957e−39  3.7451466412e−45 6.2954372669e−42 C189 y¹⁸  4.7520258884e−38 −2.5027110933e−45 2.5323299022e−43 Coefficient Formula M07 M08 C7 x² y 5.6885194695e−07 −2.6032338827e−09 C9 y³ −5.3045284442e−07   1.7967303548e−08 C10 x⁴ 3.1572492372e−10 −1.0853263628e−11 C12 x² y² 1.1891894195e−09 −5.7350371926e−11 C14 y⁴ 1.9242714778e−09 −1.2382079862e−11 C16 x⁴ y 8.2337947850e−13 −1.6568636147e−14 C18 x² y³ 2.6096925596e−12  3.6180394218e−15 C20 y⁵ −6.2497084633e−12   2.0115422054e−14 C21 x⁶ 3.7606136031e−16 −2.2564167591e−17 C23 x⁴ y² 4.2020867235e−15 −1.0090003444e−16 C25 x² y⁴ 1.7320506635e−15 −1.0742153983e−16 C27 y⁶ 2.7198591970e−14 −2.3600663856e−17 C29 x⁶ y 2.3909402939e−18 −1.4543501577e−20 C31 x⁴ y³ 8.5356687225e−18 −1.8788394391e−20 C33 x² y⁵ 2.4012249847e−17  2.3739576170e−20 C35 y⁷ −1.2853465750e−16   2.5262547690e−20 C36 x⁸ 1.0564617190e−21 −2.5533973988e−23 C38 x⁶ y² 1.2298668556e−20 −1.4551399703e−22 C40 x⁴ y⁴ 4.6130810708e−20 −2.5461757210e−22 C42 x² y⁶ −4.9969668210e−20  −1.7417593690e−22 C44 y⁸ 5.8608431243e−20 −2.4277765791e−23 C46 x⁸ y 6.7819067514e−24 −2.8608047726e−26 C48 x⁶ y³ 4.2200344142e−23 −4.7066653677e−26 C50 x⁴ y⁵ −2.6587289175e−23   9.0127012549e−28 C52 x² y⁷ −1.7038498767e−22   5.0142663052e−26 C54 y⁹ 6.3859357141e−21  1.0491743548e−26 C55 x¹⁰ 1.8366650806e−27 −4.0387050684e−29 C57 x⁸ y² 4.3925865487e−26 −2.4802384999e−28 C59 x⁶ y⁴ 1.7032620490e−25 −7.1143501657e−28 C61 x⁴ y⁶ 3.3967306775e−25 −8.4926123882e−28 C63 x² y⁸ 1.4595165705e−23 −4.1368835927e−28 C65 y¹⁰ 1.8876331218e−23 −1.3017913322e−28 C67 x¹⁰ y 3.0650439074e−31  4.0461095305e−32 C69 x⁸ y³ 1.4438586711e−28  1.0178711624e−32 C71 x⁶ y⁵ 2.9672152106e−27 −5.4838176811e−32 C73 x⁴ y⁷ 2.1146627271e−26 −4.8775545325e−32 C75 x² y⁹ 2.6822138046e−26  6.0406376870e−33 C77 y¹¹ −7.3677504306e−25   8.5305470943e−32 C78 x¹² −5.2741446894e−33   2.1991958235e−35 C80 x¹⁰ y² 4.3027958224e−32  2.0130726290e−34 C82 x⁸ y⁴ 8.5133943223e−31  1.5580235926e−33 C84 x⁶ y⁶ 5.6295898281e−31  3.3571029379e−33 C86 x⁴ y⁸  l.3332205474e−29  2.9651905665e−33 C88 x² y¹⁰ −1.7129729092e−27   8.9685300131e−34 C90 y¹² 1.1130815224e−27  3.2993334471e−34 C92 x¹² y 4.9673908983e−34 −3.2103607359e−37 C94 x¹⁰ y³ 6.4956092755e−33 −1.0029902628e−36 C96 x⁸ y⁵ −1.8400789599e−32  −1.1410950653e−36 C98 x⁶ y⁷ −3.3375751871e−31   5.6352689956e−37 C100 x⁴ y⁹ −2.4387105227e−30   1.4839886827e−36 C102 x² y¹¹ 3.1121030442e−30  1.1417700815e−36 C104 y¹³ 3.6596456192e−29  1.4364846567e−37 C105 x¹⁴ 1.8798457813e−37 −2.3403572809e−40 C107 x¹² y² 3.5510225875e−36 −2.8319402014e−39 C109 x¹⁰ y⁴ 2.0761548716e−35 −1.6607663249e−38 C111 x⁸ y⁶ 1.2715375844e−34 −4.2855856990e−38 C113 x⁶ y⁸ 5.0790267914e−34 −5.5 J 29905220e−38  C115 x⁴ y¹⁰ 3.8570291884e−33 −3.5852190320e−38 C117 x² y¹² 9.7224476991e−32 −1.0065799940e−38 C119 y¹⁴ −1.4704261445e−31  −1.6248064258e−39 C121 x¹⁴ y −5.5835679642e−39   9.9036616242e−43 C123 x¹² y³ −1.1758824220e−37   4.4824196404e−42 C125 x¹⁰ y⁵ −2.8529678560e−37   8.3595187208e−42 C127 x⁸ y⁷ 5.0441627057e−36  2.2072469229e−42 C129 x⁶ y⁹ 2.7177538479e−35 −9.5383391203e−42 C131 x⁴ y¹¹ 1.5227062881e−34 −1.0491272927e−41 C133 x² y¹³ −4.4632613620e−34  −5.7569812843e−42 C135 y¹⁵ −8.8821628531e−34  −1.3572452083e−42 C136 x¹⁶ −1.6345142206e−42   5.4844234244e−46 C138 x¹⁴ y² −4.6036381779e−41   8.6852862505e−45 C140 x¹² y⁴ −4.5915532794e−40   6.0701764444e−44 C142 x¹⁰ y⁶ −1.6682132695e−39   1.9703987179e−43 C144 x⁸ y⁸ −1.6337921453e−38   3.4203614057e−43 C146 x⁶ y¹⁰ −3.5281658687e−38   3.2696702313e−43 C148 x⁴ y¹² −4.9734008785e−37   1.6839854713e−43 C150 x² y¹⁴ −2.3327839149e−36   4.0490246540e−44 C152 y¹⁶ 6.6730746923e−36  4.3581655755e−45 C154 x¹⁶ y 4.6758705533e−44 −2.2269473443e−48 C156 x¹⁴ y³ 1.3120410116e−42 −1.4008031239e−47 C158 x¹² y⁵ 9.1388106395e−42 −3.7372791137e−47 C160 x¹⁰ y⁷ −1.6475569488e−41  −3.6253482673e−47 C162 x⁸ y⁹ −3.4027520925e−40   1.4378738943e−47 C164 x⁶ y¹¹ −1.2144442461e−39   5.9693880730e−47 C166 x⁴ y¹³ −4.8142003087e−39   5.0244675231e−47 C168 x² y¹⁵ 2.0924490431e−38  2.2613909308e−47 C170 y¹⁷ −9.0673262626e−40   5.2547475960e−48 C171 x¹⁸ 1.0935651918e−47 −1.2789411747e−51 C173 x¹⁶ y² 4.6577282993e−46 −2.1547792660e−50 C175 x¹⁴ y⁴ 6.8830229834e−45 −1.6006316860e−49 C177 x¹² y⁶ 3.7537872018e−44 −6.0050672082e−49 C179 x¹⁰ y⁸ 1.1409352073e−43 −1.2860171790e−48 C181 x⁸ y¹⁰ 1.1046252568e−42 −1.6474208538e−48 C183 x⁶ y¹² 1.4248842192e−42 −1.2490210050e−48 C185 x⁴ y¹⁴ 2.6058140132e−41 −5.3683973453e−49 C187 x² y¹⁶ −1.5312731044e−41  −1.1741398224e−49 C189 y¹⁸ −9.8680216528e−41  −1.0455455507e−50 C191 x¹⁸ y −2.0219293224e−49   2.7338046251e−54 C193 x¹⁶ y³ −7.0207882571e−48   2.1780801775e−53 C195 x¹⁴ y⁵ −7.3539154988e−47   7.4738195206e−53 C197 x¹² y⁷ −1.8117254970e−46   1.1470357661e−52 C199 x¹⁰ y⁹ 1.6467663541e−45  4.5131168773e−53 C201 x⁸ y¹¹ 9.4445347087e−45 −1.0431040557e−52 C203 x⁶ y¹³ 3.4834666945e−44 −1.7317400566e−52 C205 x⁴ y¹⁵ 3.8080772395e−44 −1.1816630025e−52 C207 x² y¹⁷ −3.0103230600e−43  −4.5384891892e−53 C209 y¹⁹ 2.7310006242e−43 −9.0844232110e−54 C210 x²⁰ −4.1070528863e−53   1.6074347592e−57 C212 x¹⁸ y² −2.3527876230e−51   2.8555277581e−56 C214 x¹⁶ y⁴ −4.5239324159e−50   2.2666189493e−55 C216 x¹⁴ y⁶ −3.5682858864e−49   9.6074034102e−55 C218 x¹² y⁸ −1.0967266190e−48   2.4332626799e−54 C220 x¹⁰ y¹⁰ −4.1867080606e−48   3.8784664605e−54 C222 x⁸ y¹² −3.1094343232e−47   3.9488159196e−54 C224 x⁶ y¹⁴ −5.6386546669e−47   2.4850098135e−54 C226 x⁴ y¹⁶ −4.7854236015e−46   9.1593629654e−55 C228 x² y¹⁸ 1.1408004666e−45  1.8156323411e−55 C230 y²⁰ −4.2844296228e−47   1.4794818365e−56 C232 x²⁰ y 4.1249372141e−55 −1.6589564286e−60 C234 x¹⁸ y³ 1.6554405153e−53 −1.5968123830e−59 C236 x¹⁶ y⁵ 2.2253811097e−52 −6.7607917385e−59 C238 x¹⁴ y⁷ 1.1667484720e−51 −1.4231160934e−58 C240 x¹² y⁹ −2.8457969308e−52  −1.3903998508e−58 C242 x¹⁰ y¹¹ −3.0558023660e−50   7.2307176144e−60 C244 x⁸ y¹³ −8.8050100099e−50   1.8005183183e−58 C246 x⁶ y¹⁵ −5.1355664704e−49   2.1462012981e−58 C248 x⁴ y¹⁷ 8.4042896579e−49  1.2889176973e−58 C250 x² y¹⁹ −1.4116882150e−48   4.4414404818e−59 C252 y²¹ −6.7094714642e−49   7.4738978858e−60 C253 x²² 7.3989403985e−59 −1.0911210563e−63 C255 x²⁰ y² 5.4860130425e−57 −1.9646788131e−62 C257 x¹⁸ y⁴ 1.2642775431e−55 −1.5928429571e−61 C259 x¹⁶ y⁶ 1.2817302100e−54 −7.2873811166e−61 C261 x¹⁴ y⁸ 5.8299523698e−54 −2.0867620199e−60 C263 x¹² y¹⁰ 1.2728240403e−53 −3.9213888107e−60 C265 x¹⁰ y¹² 6.9696875487e−53 −4.9609392228e−60 C267 x⁸ y¹⁴ 2.8722921852e−52 −4.1999838719e−60 C269 x⁶ y¹⁶ 1.3665033976e−51 −2.2814914530e−60 C271 x⁴ y¹⁸ −4.0070337954e−53  −7.5025193792e−61 C273 x² y²⁰ 3.0591555199e−52 −1.3794023687e−61 C275 y²² 5.9452620674e−52 −1.0815145836e−62

TABLE 20 for projection optical unit 500 of FIG. 5A: Coordinates of stop edge x_(i) [mm] y_(i) [mm] x_(i+N/2) [mm] y_(i+N/2) [mm] −406.462054 −45.859836 406.714375 −58.643623 −405.899996 −39.438857 406.404447 −64.998727 −405.048244 −33.003645 405.804439 −71.324209 −403.908062 −26.558073 404.915414 −77.616285 −402.481168 −20.106014 403.738880 −83.871220 −400.769737 −13.651331 402.276789 −90.085330 −398.776384 −7.197874 400.531518 −96.254998 −396.504154 −0.749477 398.505858 −102.376679 −393.956508 5.690047 396.202994 −108.446908 −391.137306 12.116909 393.626491 −114.462312 −388.050789 18.527344 390.780270 −120.419609 −384.701558 24.917610 387.668588 −126.315617 −381.094555 31.283989 384.296016 −132.147253 −377.235041 37.622782 380.667412 −137.911537 −373.128572 43.930303 376.787898 −143.605588 −368.780974 50.202879 372.662836 −149.226629 −364.198320 56.436838 368.297798 −154.771979 −359.386902 62.628507 363.698542 −160.239052 −354.353204 68.774208 358.870985 −165.625356 −349.103876 74.870254 353.821177 −170.928486 −343.645708 80.912944 348.555278 −176.146121 −337.985597 86.898561 343.079528 −181.276021 −332.130524 92.823371 337.400231 −186.316021 −326.087528 98.683618 331.523726 −191.264024 −319.863677 104.475519 325.456371 −196.118000 −313.466047 110.195264 319.204523 −200.875981 −306.901696 115.839003 312.774519 −205.536051 −300.177647 121.402844 306.172660 −210.096349 −293.300867 126.882848 299.405202 −214.555060 −286.278247 132.275019 292.478336 −218.910413 −279.116587 137.575308 285.398182 −223.160680 −271.822581 142.779611 278.170779 −227.304171 −264.402802 147.883774 270.802077 −231.339233 −256.863688 152.883601 263.297929 −235.264249 −249.211530 157.774870 255.664089 −239.077638 −241.452463 162.553341 247.906205 −242.777851 −233.592454 167.214780 240.029817 −246.363377 −225.637294 171.754968 232.040355 −249.832737 −217.592590 176.169720 223.943139 −253.184488 −209.463761 180.454894 215.743379 −256.417222 −201.256035 184.606401 207.446171 −259.529567 −192.974440 188.620207 199.056506 −262.520190 −184.623811 192.492332 190.579263 −265.387794 −176.208784 196.218848 182.019219 −268.131123 −167.733799 199.795872 173.381046 −270.748961 −159.203103 203.219562 164.669318 −273.240135 −150.620751 206.486109 155.888510 −275.603514 −141.990616 209.591737 147.043007 −277.838014 −133.316390 212.532703 138.137103 −279.942597 −124.601594 215.305304 129.175007 −281.916274 −115.849588 217.905889 120.160848 −283.758109 −107.063581 220.330878 111.098680 −285.467216 −98.246644 222.576780 101.992483 −287.042764 −89.401721 224.640226 92.846172 −288.483983 −80.531646 226.517992 83.663597 −289.790156 −71.639158 228.207037 74.448554 −290.960632 −62.726913 229.704535 65.204786 −291.994821 −53.797499 231.007902 55.935987 −292.892196 −44.853451 232.114832 46.645811 −293.652300 −35.897261 233.023324 37.337878 −294.274742 −26.931391 233.731704 28.015775 −294.759199 −17.958277 234.238650 18.683066 −295.105420 −8.980343 234.543203 9.343297 −295.313225 0.000000 234.644786 0.000000 −295.382505 8.980343 234.543203 −9.343297 −295.313225 17.958277 234.238650 −18.683066 −295.105420 26.931391 233.731704 −28.015775 −294.759199 35.897261 233.023324 −37.337878 −294.274742 44.853451 232.114832 −46.645811 −293.652300 53.797499 231.007902 −55.935987 −292.892196 62.726913 229.704535 −65.204786 −291.994821 71.639158 228.207037 −74.448554 −290.960632 80.531646 226.517992 −83.663597 −289.790156 89.401721 224.640226 −92.846172 −288.483983 98.246644 222.576780 −101.992483 −287.042764 107.063581 220.330878 −111.098680 −285.467216 115.849588 217.905889 −120.160848 −283.758109 124.601594 215.305304 −129.175007 −281.916274 133.316390 212.532703 −138.137103 −279.942597 141.990616 209.591737 −147.043007 −277.838014 150.620751 206.486109 −155.888510 −275.603514 159.203103 203.219562 −164.669318 −273.240135 167.733799 199.795872 −173.381046 −270.748961 176.208784 196.218848 −182.019219 −268.131123 184.623811 192.492332 −190.579263 −265.387794 192.974440 188.620207 −199.056506 −262.520190 201.256035 184.606401 −207.446171 −259.529567 209.463761 180.454894 −215.743379 −256.417222 217.592590 176.169720 −223.943139 −253.184488 225.637294 171.754968 −232.040355 −249.832737 233.592454 167.214780 −240.029817 −246.363377 241.452463 162.553341 −247.906205 −242.777851 249.211530 157.774870 −255.664089 −239.077638 256.863688 152.883601 −263.297929 −235.264249 264.402802 147.883774 −270.802077 −231.339233 271.822581 142.779611 −278.170779 −227.304171 279.116587 137.575308 −285.398182 −223.160680 286.278247 132.275019 −292.478336 −218.910413 293.300867 126.882848 −299.405202 −214.555060 300.177647 121.402844 −306.172660 −210.096349 306.901696 115.839003 −312.774519 −205.536051 313.466047 110.195264 −319.204523 −200.875981 319.863677 104.475519 −325.456371 −196.118000 326.087528 98.683618 −331.523726 −191.264024 332.130524 92.823371 −337.400231 −186.316021 337.985597 86.898561 −343.079528 −181.276021 343.645708 80.912944 −348.555278 −176.146121 349.103876 74.870254 −353.821177 −170.928486 354.353204 68.774208 −358.870985 −165.625356 359.386902 62.628507 −363.698542 −160.239052 364.198320 56.436838 −368.297798 −154.771979 368.780974 50.202879 −372.662836 −149.226629 373.128572 43.930303 −376.787898 −143.605588 377.235041 37.622782 −380.667412 −137.911537 381.094555 31.283989 −384.296016 −132.147253 384.701558 24.917610 −387.668588 −126.315617 388.050789 18.527344 −390.780270 −120.419609 391.137306 12.116909 −393.626491 −114.462312 393.956508 5.690047 −396.202994 −108.446908 396.504154 −0.749477 −398.505858 −102.376679 398.776384 −7.197874 −400.531518 −96.254998 400.769737 −13.651331 −402.276789 −90.085330 402.481168 −20.106014 −403.738880 −83.871220 403.908062 −26.558073 −404.915414 −77.616285 405.048244 −33.003645 −405.804439 −71.324209 405.899996 −39.438857 −406.404447 −64.998727 406.462054 −45.859836 −406.714375 −58.643623 406.733624 −52.262711 −406.733624 −52.262711

Design Data for FIG. 6A

TABLE 21 for projection optical unit 600 of FIG. 6A: Numerical Aperture 0.75 Magnification in x-direction 0.250 Magnification in y- direction 0.125 Chief Ray angle 5.50° Wavelength 13.5 nm Image field size in x-direction 26.0 mm Image field size in y-direction 1.0 mm Average Wavefront-RMS 6.44 mλ

TABLE 22 for projection optical unit 600 of FIG. 6A: Radii of surfaces Radius_(x) Power_(x) Radius_(y) Power_(y) [mm] [1/mm] [mm] [1/mm] M01 −3486.28243986 0.00056059 −1766.40692175 0.00110642 M02 2369.93311258 −0.00007260 4906.80225378 −0.00003507 M03 4389.12570925 −0.00013087 −3614.17172875 0.00015893 M04 −16782.42570130 0.00002821 −6988.74667041 0.00006774 M05 −1952.45480809 0.00016281 53943.63267445 −0.00000589 M06 −1254.94617921 0.00046323 12859.59130175 −0.00004521 M07 −3857.10189695 0.00009200 −12121.45037338 0.00002927 M08 3011.82967387 −0.00059603 419.64055323 −0.00427778 M09 −959.84488570 0.00206727 −859.26405830 0.00230925

TABLE 23 for projection optical unit 600 of FIG. 6A: Decentring (location, angle) of surfaces D_(x) [mm] D_(y) [mm] D_(z) [mm] Reticle 0.000000000 0.000000000 0.000000000 M01 0.000000000 −345.245562113 1913.482180940 M02 0.000000000 −548.901396172 760.290710030 M03 −0.000000000 −899.095821506 350.889638881 M04 0.000000000 −2237.449387764 −329.143585485 M05 0.000000000 −3622.246165313 −373.468283476 M06 0.000000000 −4132.231979780 −64.977368863 M07 0.000000000 −4660.239714259 632.885856819 M08 0.000000000 −5011.764212328 2410.053273405 Stop 0.000000000 −4991.422468685 2307.213544746 M09 0.000000000 −4874.060362072 1713.877623750 Wafer 0.000000000 −4814.035425435 2507.483578368 α_(x) [°] α_(y) [°] α_(z) [°] Reticle 0.000000000 0.000000000 0.000000000 M01 0.106220844 0.000000000 0.000000000 M02 244.720814462 0.000000000 −0.000000000 M03 218.196283414 −0.000000000 −0.000000000 M04 194.384481474 −0.000000000 −0.000000000 M05 165.331759027 −0.000000000 −0.000000000 M06 137.970797777 −0.000000000 −0.000000000 M07 114.150041508 −0.000000000 −0.000000000 M08 11.188703040 0.000000000 −0.000000000 Stop 172.109020591 −0.000000000 −0.000000000 M09 183.431666309 −0.000000000 −0.000000000 Wafer −4.325370423 0.000000000 180.000000000

TABLE 24 for projection optical unit 600 of FIG. 6A: Free form coefficients of surfaces Coefficient Formula M01 M02 M03 C2 y 2.4183195098e−03 −2.6134959608e−02  6.4323763267e−03 C7 x² y 2.5309837790e−08 −2.8600701612e−08  −2.1182530091e−07  C9 y³ −8.6682753157e−08  −1.8180749743e−09  1.3136293930e−08 C10 x⁴ 4.6764314472e−12 7.7762519316e−11 5.1264392056e−12 C12 x² y² 1.3674742125e−10 −2.1050960978e−11  1.2130069053e−10 C14 y⁴ 2.5547947289e−10 −9.7787642390e−10  1.1501852017e−11 C16 x⁴ y −1.8821786926e−14  2.2203349884e−13 5.8403900821e−14 C18 x² y³ −2.8937633590e−13  5.0097482198e−13 −3.0081746329e−15  C20 y⁵ −1.6337256541e−12  −4.5222731772e−12  2.2913769739e−14 C21 x⁶ 4.6006625315e−18 −4.2390177775e−17  −2.0175026598e−16  C23 x⁴ y² 5.0400651154e−17 1.1768414977e−15 −1.8818786273e−17  C25 x² y⁴ 1.8068377419e−16 −2.3312386073e−15  1.1006226432e−16 C27 y⁶ 9.1925099653e−15 −8.8441729582e−15  −4.0373510404e−16  C29 x⁶ y −9.9691078937e−21  5.0379612318e−19 3.2924840953e−19 C31 x⁴ y³ 4.5325211023e−19 1.3111819581e−17 5.0392582534e−20 C33 x² y⁵ 8.0166138803e−19 −8.2289294180e−17  −3.1056995445e−18  C35 y⁷ −3.7452262094e−17  1.1646244229e−17 −7.2863516967e−19  C36 x⁸ −6.1545363263e−24  7.2026470105e−22 1.6171281423e−21 C38 x⁶ y² 3.3002430812e−22 5.7140558572e−21 1.8788996873e−22 C40 x⁴ y⁴ 4.1222433024e−21 1.9259194213e−19 −3.0274484120e−21  C42 x² y⁶ 1.2156298564e−20 −7.6134979435e−19  3.1291091908e−20 C44 y⁸ 9.0374219894e−20 1.0536976895e−19 9.4000357214e−20 C46 x⁸ y −2.7773625350e−26  −9.3954405466e−25  −2.0192667103e−24  C48 x⁶ y³ −1.1146607416e−23  −3.7028485380e−24  −3.0459881911e−24  C50 x⁴ y⁵ −9.6596403438e−23  1.9788449526e−21 8.2320296311e−23 C52 x² y⁷ −1.6511725874e−22  −3.7136084466e−21  −1.1670374595e−22  C54 y⁹ 3.7733566425e−23 1.7181200123e−22 −1.4279933000e−21  C55 x¹⁰ 2.0219211610e−28 5.7410791808e−28 −1.6175476519e−26  C57 x⁸ y² −2.9118226489e−27  −5.0115519425e−26  −8.7409540432e−27  C59 x⁶ y⁴ 7.6618358586e−26 −7.4621080786e−25  −1.1261623515e−26  C61 x⁴ y⁶ 5.9734337633e−25 1.2771559399e−23 −1.3869559945e−24  C63 x² y⁸ 1.4666169111e−25 −9.4966020317e−24  −1.6510318783e−24  C65 y¹⁰ −9.5184017793e−25  −1.5151055209e−25  1.1233098883e−23 C67 x¹⁰ y −1.5565945765e−30  2.6228618507e−29 2.9421127201e−29 C69 x⁸ y³ 2.4607272284e−28 5.7761504003e−28 8.1576558681e−29 C71 x⁶ y⁵ 5.1220193744e−28 −7.8258857987e−27  −4.0079674532e−28  C73 x⁴ y⁷ −3.9907667505e−28  4.7881440639e−26 1.1123285985e−26 C75 x² y⁹ 6.0418820574e−27 −7.0832530992e−27  2.6419453610e−26 C77 y¹¹ 5.3435940014e−28 −3.4276423005e−28  −4.8713357492e−26  C78 x¹² −4.1731325239e−33  −7.8578016911e−32  1.0192813630e−31 C80 x¹⁰ y² −1.1968533115e−31  1.4739797894e−30 1.0615054211e−31 C82 x⁸ y⁴ −3.8375741786e−30  1.2218849731e−29 4.3572394230e−31 C84 x⁶ y⁶ −8.7956399131e−30  −4.1996775292e−29  1.8599128026e−29 C86 x⁴ y⁸ −1.2566190787e−29  7.8082054550e−29 −2.2702095755e−29  C88 x² y¹⁰ −2.6135660560e−29  2.0674353015e−29 −1.5127580209e−28  C90 y¹² 1.0009167315e−29 1.9495854854e−30 8.2832654423e−29 C92 x¹² y 1.4748125598e−34 2.9673787601e−34 −2.3343461353e−34  C94 x¹⁰ y³ −2.8152971069e−34  1.2141778481e−33 −1.2677605893e−33  C96 x⁸ y⁵ 2.1504732797e−32 5.2314442501e−32 −9.7778181031e−33  C98 x⁶ y⁷ 3.5538638666e−32 −1.1268517403e−31  −2.0500477099e−31  C100 x⁴ y⁹ 6.4762013785e−32 −9.2426736866e−32  −2.8422025534e−31  C102 x² y¹¹ −3.1243398406e−32  2.8014138555e−32 2.0051020835e−31 C104 y¹³ −1.6512245839e−32  5.0500991246e−33 2.1718088248e−31 C105 x¹⁴ 3.2299701155e−38 7.6951687191e−37 −3.4284451583e−37  C107 x¹² y² 1.1229100989e−36 −1.5416205244e−35  −9.1385940743e−37  C109 x¹⁰ y⁴ 3.2293335120e−35 −1.1768343656e−34  5.0869378379e−38 C111 x⁸ y⁶ −1.4166257016e−35  −2.8884626638e−37  −5.0780424301e−35  C113 x⁶ y⁸ −6.6541185791e−36  4.2849541553e−35 8.5951752323e−34 C115 x⁴ y¹⁰ −1.3186527705e−34  −5.8594613778e−34  2.2844589052e−33 C117 x² y¹² 3.4069621812e−34 −7.5201196996e−35  2.3055060362e−33 C119 y¹⁴ −9.1708274369e−36  4.0613523471e−37 −1.2429210373e−33  C121 x¹⁴ y −2.6131362528e−39  −8.8292058414e−39  9.4724893718e−40 C123 x¹² y³ −2.2997210975e−38  −8.5566569571e−38  1.0990720042e−38 C125 x¹⁰ y⁵ −3.0249604440e−37  −4.5901038310e−37  1.3064585517e−37 C127 x⁸ y⁷ −2.6049885156e−37  −5.4383064506e−37  1.4731071088e−36 C129 x⁶ y⁹ −1.6289950032e−37  1.3747026880e−36 1.9114363871e−37 C131 x⁴ y¹¹ 4.8453044574e−38 −5.3330495189e−37  −4.1049184727e−36  C133 x² y¹³ 7.8098077770e−38 −8.6258379941e−38  −1.3781627395e−35  C135 y¹⁵ −1.4697678852e−37  −3.6539390220e−39  7.8793580514e−37 C136 x¹⁶ 5.2505777146e−44 −5.4517589035e−42  5.2020588752e−43 C138 x¹⁴ y² 9.1606577927e−42 5.8209590823e−41 4.9439841483e−42 C140 x¹² y⁴ 7.0364706966e−41 7.1838319277e−40 −4.6554302089e−41  C142 x¹⁰ y⁶ 1.1029624651e−39 8.4332789034e−40 −7.6551470601e−40  C144 x⁸ y⁸ 4.2494163347e−40 −1.6870132885e−39  −8.4836098339e−39  C146 x⁶ y¹⁰ −4.9158441024e−40  4.2581365418e−39 −1.4975739451e−38  C148 x⁴ y¹² 3.1321120985e−40 1.0360808145e−39 −3.0978625328e−38  C150 x² y¹⁴ −3.0478318580e−39  3.1621476465e−40 2.2629682524e−38 C152 y¹⁶ 4.1516298749e−40 1.1539305513e−41 4.6986094499e−39 C154 x¹⁶ y 2.0716101459e−44 5.8766825045e−44 −2.0723418245e−45  C156 x¹⁴ y³ 7.9379161170e−44 9.2931927769e−43 −4.9583406255e−44  C158 x¹² y⁵ −4.9170266405e−44  4.7440707881e−42 −4.0551198101e−43  C160 x¹⁰ y⁷ −1.2987668742e−42  7.4089885981e−42 −2.2510650248e−42  C162 x⁸ y⁹ 1.8662031876e−42 −3.1797626614e−42  1.2524543154e−41 C164 x⁶ y¹¹ 1.3002495697e−42 5.0465922358e−42 5.6702178944e−41 C166 x⁴ y¹³ 2.6713235972e−43 1.0482152481e−42 2.2898300255e−40 C168 x² y¹⁵ 2.2227149433e−42 2.4316705562e−43 6.2089407291e−41 C170 y¹⁷ 6.0853774874e−43 −7.6381192577e−45  6.9509541438e−42 C171 x¹⁸ −2.6184684291e−48  3.5269309765e−47 −7.8752317584e−49  C173 x¹⁶ y² −1.3270550454e−46  2.2267602223e−46 −1.4785742151e−47  C175 x¹⁴ y⁴ −3.0542087164e−46  7.1201170040e−46 3.0739671944e−46 C177 x¹² y⁶ 2.0606121511e−45 6.6686401445e−45 4.9610661752e−45 C179 x¹⁰ y⁸ −1.8998859446e−45  1.3191111634e−44 3.4971234319e−44 C181 x⁸ y¹⁰ 3.6776724472e−46 −5.7185103377e−45  4.8436721551e−44 C183 x⁶ y¹² 1.3399006602e−44 −3.7699884622e−46  −9.4633303884e−44  C185 x⁴ y¹⁴ −3.7649082662e−45  −4.6410687150e−45  −6.8020045977e−43  C187 x² y¹⁶ 4.1812489028e−45 −1.5289165199e−45  −3.4694281130e−43  C189 y¹⁸ 3.8358756447e−46 −1.1969611704e−46  −9.6158998321e−44  C191 x¹⁸ y −8.9868564379e−50  −2.0305279390e−50  6.2272466983e−51 C193 x¹⁶ y³ −1.5720533890e−49  −1.7130481241e−48  9.5063790172e−50 C195 x¹⁴ y⁵ 1.1621439734e−48 −6.7599541866e−48  −5.3942991047e−49  C197 x¹² y⁷ −1.2518594220e−47  −3.4978474476e−48  −1.8009708516e−47  C199 x¹⁰ y⁹ 1.6269105542e−47 4.3774661557e−48 −1.2283787668e−46  C201 x⁸ y¹¹ −2.6004435457e−47  −8.2291192159e−48  −1.9703664383e−46  C203 x⁶ y¹³ −4.5132685407e−47  −5.1636892700e−48  6.6001828067e−47 C205 x⁴ y¹⁵ −1.8877396471e−47  −9.5969812671e−48  9.6487685142e−46 C207 x² y¹⁷ 2.6040496474e−47 −3.0640273275e−48  5.8531443769e−46 C209 y¹⁹ −7.0142766614e−48  −1.8870472875e−49  2.2578414341e−46 C210 x²⁰ 1.9604124261e−53 −9.3020315707e−53  2.3004655367e−54 C212 x¹⁸ y² 8.8457668107e−52 −9.4122855490e−52  1.6676380903e−53 C214 x¹⁶ y⁴ 1.6268593625e−51 −3.6406402942e−51  −5.5223453057e−52  C216 x¹⁴ y⁶ −2.0041028217e−50  −8.1721258964e−51  −2.1332404315e−51  C218 x¹² y⁸ 1.6755522269e−50 −7.2583889604e−51  2.4138319322e−50 C220 x¹⁰ y¹⁰ −1.0223776315e−49  −9.4309997192e−51  1.6685855410e−49 C222 x⁸ y¹² −1.2842996984e−50  −6.3786985417e−51  2.0361550455e−49 C224 x⁶ y¹⁴ −1.4305051390e−50  −1.1564178959e−51  1.9281515924e−50 C226 x⁴ y¹⁶ 1.4977851564e−49 −5.4804891471e−51  −4.0840988235e−49  C228 x² y¹⁸ −1.9839916205e−50  −1.9150290473e−51  −2.9995209573e−49  C230 y²⁰ −9.3483225501e−51  −9.6935598469e−53  −1.9242992754e−49  C232 x²⁰ y 1.2221771704e−55 −3.9713265527e−55  −1.6464755979e−56  C234 x¹⁸ y³ −1.6619941079e−54  −3.9646848046e−55  −1.1354695099e−56  C236 x¹⁶ y⁵ −3.2665127213e−54  1.7711686720e−54 1.3076722998e−54 C238 x¹⁴ y⁷ 7.4739467823e−53 5.0697253680e−54 5.8082880207e−54 C240 x¹² y⁹ 1.7532289680e−53 3.1072415756e−54 −5.0994385118e−54  C242 x¹⁰ y¹¹ 2.7582455412e−52 −7.7539406384e−54  −5.9691278735e−53  C244 x⁸ y¹³ 3.0132472722e−52 −1.7360482848e−54  −9.3148000268e−54  C246 x⁶ y¹⁵ 1.3469049402e−52 2.2302172347e−54 −6.4940963316e−53  C248 x⁴ y¹⁷ −1.8775488149e−52  −1.4085203761e−55  −2.5600496539e−52  C250 x² y¹⁹ −2.2632338136e−52  −2.4608384938e−55  −1.0522054748e−52  C252 y²¹ 8.3164667372e−55 −4.5288063055e−57  2.8883252301e−53 C253 x²² −5.8181503721e−59  0.0000000000e+00 0.0000000000e+00 C255 x²⁰ y² −2.3704317505e−57  0.0000000000e+00 0.0000000000e+00 C257 x¹⁸ y⁴ −2.5950502785e−57  0.0000000000e+00 0.0000000000e+00 C259 x¹⁶ y⁶ 7.6321375674e−56 0.0000000000e+00 0.0000000000e+00 C261 x¹⁴ y⁸ −1.2448230371e−56  0.0000000000e+00 0.0000000000e+00 C263 x¹² y¹⁰ 5.0796598834e−56 0.0000000000e+00 0.0000000000e+00 C265 x¹⁰ y¹² 1.0670836187e−55 0.0000000000e+00 0.0000000000e+00 C267 x⁸ y¹⁴ −5.4159843888e−55  0.0000000000e+00 0.0000000000e+00 C269 x⁶ y¹⁶ 2.9829969832e−55 0.0000000000e+00 0.0000000000e+00 C271 x⁴ y¹⁸ −7.2525836420e−55  0.0000000000e+00 0.0000000000e+00 C273 x² y²⁰ 1.8243445845e−56 0.0000000000e+00 0.0000000000e+00 C275 y²² 2.8109520778e−55 0.0000000000e+00 0.0000000000e+00 C277 x²² y 2.9006949371e−61 0.0000000000e+00 0.0000000000e+00 C279 x²⁰ y³ 1.0846793628e−59 0.0000000000e+00 0.0000000000e+00 C281 x¹⁸ y⁵ −1.4931201959e−59  0.0000000000e+00 0.0000000000e+00 C283 x¹⁶ y⁷ −3.7584592242e−58  0.0000000000e+00 0.0000000000e+00 C285 x¹⁴ y⁹ −1.9043883221e−58  0.0000000000e+00 0.0000000000e+00 C287 x¹² y¹¹ −4.9131531771e−58  0.0000000000e+00 0.0000000000e+00 C289 x¹⁰ y¹³ −1.5613459538e−57  0.0000000000e+00 0.0000000000e+00 C291 x⁸ y¹⁵ 3.1875257682e−58 0.0000000000e+00 0.0000000000e+00 C293 x⁶ y¹⁷ −9.7242837599e−58  0.0000000000e+00 0.0000000000e+00 C295 x⁴ y¹⁹ 2.5751695576e−57 0.0000000000e+00 0.0000000000e+00 C297 x² y²¹ 1.3735227616e−57 0.0000000000e+00 0.0000000000e+00 C299 y²³ −6.7445729628e−58  0.0000000000e+00 0.0000000000e+00 C300 x²⁴ 3.8903739740e−65 0.0000000000e+00 0.0000000000e+00 C302 x²² y² −7.3000161712e−64  0.0000000000e+00 0.0000000000e+00 C304 x²⁰ y⁴ −1.7010781132e−62  0.0000000000e+00 0.0000000000e+00 C306 x¹⁸ y⁶ 7.7317552042e−62 0.0000000000e+00 0.0000000000e+00 C308 x¹⁶ y⁸ 5.0786036727e−61 0.0000000000e+00 0.0000000000e+00 C310 x¹⁴ y¹⁰ −1.1674499661e−61  0.0000000000e+00 0.0000000000e+00 C312 x¹² y¹² 8.4725634391e−61 0.0000000000e+00 0.0000000000e+00 C314 x¹⁰ y¹⁴ 1.7108264132e−60 0.0000000000e+00 0.0000000000e+00 C316 x⁸ y¹⁶ −3.5956537155e−61  0.0000000000e+00 0.0000000000e+00 C318 x⁶ y¹⁸ −2.6982184908e−61  0.0000000000e+00 0.0000000000e+00 C320 x⁴ y²⁰ −2.9723486422e−60  0.0000000000e+00 0.0000000000e+00 C322 x² y²² −1.5946328476e−60  0.0000000000e+00 0.0000000000e+00 C324 y²⁴ 4.6721914299e−61 0.0000000000e+00 0.0000000000e+00 C326 x²⁴ y −5.6550316877e−68  0.0000000000e+00 0.0000000000e+00 C328 x²² y³ 3.1391229369e−67 0.0000000000e+00 0.0000000000e+00 C330 x²⁰ y⁵ 9.4860306238e−66 0.0000000000e+00 0.0000000000e+00 C332 x¹⁸ y⁷ −4.7032196678e−65  0.0000000000e+00 0.0000000000e+00 C334 x¹⁶ y⁹ −5.7513547056e−65  0.0000000000e+00 0.0000000000e+00 C336 x¹⁴ y¹¹ 4.8850116112e−64 0.0000000000e+00 0.0000000000e+00 C338 x¹² y¹³ −3.4519833198e−64  0.0000000000e+00 0.0000000000e+00 C340 x¹⁰ y¹⁵ 1.3807902353e−64 0.0000000000e+00 0.0000000000e+00 C342 x⁸ y¹⁷ 5.3804763444e−64 0.0000000000e+00 0.0000000000e+00 C344 x⁶ y¹⁹ 1.6380192153e−63 0.0000000000e+00 0.0000000000e+00 C346 x⁴ y²¹ 1.1600173834e−63 0.0000000000e+00 0.0000000000e+00 C348 x² y²³ 2.7320915331e−65 0.0000000000e+00 0.0000000000e+00 C350 y²⁵ 3.1018259247e−66 0.0000000000e+00 0.0000000000e+00 Coefficient Formula M04 M05 M06 C2 y −1.2528805854e−02  7.7445895160e−03  3.4729233624e−02 C7 x² y −3.8710302301e−08  5.8453671340e−08 −1.3279259410e−07 C9 y³ 3.8640894048e−09 2.2995071308e−08  1.1113054625e−07 C10 x⁴ −7.5248068213e−12  4.8977868890e−12  3.0116759195e−11 C12 x² y² 3.6168632644e−11 4.0999880081e−11 −2.4848162064e−10 C14 y⁴ −4.8240621889e−12  1.9105987874e−11  1.5835369415e−10 C16 x⁴ y −2.3612132340e−14  4.0910255015e−14  9.6493538820e−14 C18 x² y³ −1.5363533663e−14  −4.9290366110e−14  −4.9842630111e−13 C20 y⁵ 7.1041126340e−14 −1.5094513465e−13   2.4736593103e−13 C21 x⁶ 5.3974790713e−18 9.4842666280e−18 −1.7445683173e−17 C23 x⁴ y² 2.6242213584e−17 −1.4587170146e−16   4.5233682714e−16 C25 x² y⁴ −5.2392932071e−17  −6.3211052716e−16  −9.1668442880e−16 C27 y⁶ −4.1388707403e−16  −9.5757734804e−16   4.3959415056e−16 C29 x⁶ y 4.1844481041e−21 −1.0565584212e−19  −1.9370695589e−19 C31 x⁴ y³ −3.1168691743e−19  −3.9122639081e−19   1.1487011424e−18 C33 x² y⁵ −4.7759950205e−20  −3.4569441825e−18  −5.3410136961e−19 C35 y⁷ 1.4693441731e−18 −2.4131732891e−18   1.5134397345e−17 C36 x⁸ 1.5940296677e−23 −4.4144663685e−23   3.7625717858e−23 C38 x⁶ y² 1.5021629042e−22 1.9459630704e−22 −8.1948863572e−22 C40 x⁴ y⁴ 2.2658649887e−21 −3.2701759697e−22   2.2014036116e−21 C42 x² y⁶ 1.7991761138e−21 −9.9075440178e−21   9.6926674690e−21 C44 y⁸ −3.1831667011e−21  −9.5284970514e−22   1.7086342961e−19 C46 x⁸ y 8.5284021485e−26 1.1003178182e−25  3.2552735575e−25 C48 x⁶ y³ 4.2808551563e−25 3.6427924595e−24 −2.3414773385e−25 C50 x⁴ y⁵ −7.6446693269e−24  9.2827895279e−24  1.2044352823e−23 C52 x² y⁷ −7.8633817403e−24  −1.9949817954e−23  −4.5967078855e−22 C54 y⁹ 3.4418417603e−24 1.1097155362e−23 −1.0006987363e−21 C55 x¹⁰ −1.0018031835e−28  1.4802872872e−28 −1.1614652231e−28 C57 x⁸ y² −2.5047395581e−27  1.4656996250e−27  2.3837464742e−27 C59 x⁶ y⁴ −1.1193056343e−26  2.7932694307e−26  3.0292053672e−26 C61 x⁴ y⁶ 8.9597191930e−27 3.9197891202e−26  4.2843704197e−26 C63 x² y⁸ 1.4790370956e−26 −4.0428341149e−26  −1.0800142908e−23 C65 y¹⁰ 5.2887989870e−28 2.8921805588e−26 −3.5665679096e−23 C67 x¹⁰ y 5.4452694818e−31 8.7723986678e−31 −1.1367893511e−30 C69 x⁸ y³ 1.4240099980e−29 1.2418385144e−29 −1.2866838701e−29 C71 x⁶ y⁵ 5.3636163445e−29 1.0934334379e−28 −2.7608858518e−28 C73 x⁴ y⁷ 1.3167682960e−29 1.5904621632e−29  2.4047739667e−27 C75 x² y⁹ −6.8881405078e−30  −6.8290738175e−29  −5.1686724983e−26 C77 y¹¹ −5.3757178536e−30  1.2802765679e−29 −2.4572460633e−25 C78 x¹² 1.5245676814e−34 −6.4470179536e−34   3.0827461579e−34 C80 x¹⁰ y² 4.3271631174e−33 3.7587917898e−33 −1.3599270431e−32 C82 x⁸ y⁴ −2.8421699518e−32  9.2838387476e−32 −5.7129619089e−31 C84 x⁶ y⁶ −1.0723045370e−31  1.1084522619e−31 −7.6164643714e−30 C86 x⁴ y⁸ −4.0378683059e−32  −1.3289686704e−31   8.4294969397e−29 C88 x² y¹⁰ −1.7792228258e−32  −6.2366427757e−32   7.0494740538e−28 C90 y¹² 2.4033260709e−33 −3.4750922280e−32   2.9574973515e−28 C92 x¹² y −3.3942967123e−36  −6.4380319922e−36   3.0501320549e−36 C94 x¹⁰ y³ −4.5805771593e−35  7.0056258345e−35 −1.8219279755e−35 C96 x⁸ y⁵ −5.0861895909e−36  1.9232873663e−34 −2.1030813256e−33 C98 x⁶ y⁷ 5.3205805679e−35 −3.4936020630e−34  −1.9202299246e−32 C100 x⁴ y⁹ −2.9580590111e−36  1.3456044662e−34  7.2823186868e−31 C102 x² y¹¹ 1.8244521951e−35 −2.1760741047e−34   1.0151570056e−29 C104 y¹³ 5.5682427876e−36 1.4376194950e−34  1.1777796929e−29 C105 x¹⁴ 3.7202547978e−40 1.7278940326e−39 −4.1948637734e−40 C107 x¹² y² 8.6781993443e−39 2.4113667319e−38  4.9468596835e−38 C109 x¹⁰ y⁴ 1.4307524108e−37 1.9247595109e−37  2.5467223029e−36 C111 x⁸ y⁶ 5.3331222183e−38 −1.0826021807e−37   6.4076370316e−35 C113 x⁶ y⁸ 1.1869182603e−37 −5.1070978063e−37   4.0998936662e−34 C115 x⁴ y¹⁰ 6.3575719079e−38 7.2748689168e−37 −2.4152907806e−33 C117 x² y¹² 2.2149702702e−38 −4.0575196794e−37   4.3562926605e−32 C119 y¹⁴ −4.8250203679e−39  5.8561565876e−37  4.4492522061e−32 C121 x¹⁴ y 5.4955158641e−42 4.6809480011e−41 −3.5547147595e−42 C123 x¹² y³ 3.8217079356e−41 1.2994723633e−40  4.1949563767e−40 C125 x¹⁰ y⁵ −1.6478042347e−40  −1.6568205122e−40   3.3594896446e−38 C127 x⁸ y⁷ 1.3496102786e−40 9.8220984007e−41  7.5853668320e−37 C129 x⁶ y⁹ −1.0040570650e−40  1.3641569041e−40  2.5938834508e−36 C131 x⁴ y¹¹ 8.0929150523e−41 −1.5167673564e−40  −7.3720892548e−35 C133 x² y¹³ −2.6261428943e−41  5.6173653685e−40 −1.9807277392e−36 C135 y¹⁵ 6.0058163235e−43 6.6097837174e−41 −9.4117064114e−35 C136 x¹⁶ −1.4803962505e−45  2.7839437457e−45  9.2007896243e−47 C138 x¹⁴ y² −3.3903749104e−44  1.9828359083e−43 −7.7895424168e−44 C140 x¹² y⁴ −2.2270143563e−43  −8.6706718825e−45   2.4277105751e−43 C142 x¹⁰ y⁶ 2.3060040368e−44 −5.2695874855e−43   1.2722886543e−40 C144 x⁸ y⁸ −5.1396516137e−43  1.5749348760e−42  2.1489586032e−39 C146 x⁶ y¹⁰ −1.7307363243e−43  −5.7412323117e−43  −3.7396684056e−39 C148 x⁴ y¹² −2.9885213403e−43  −1.8847821755e−42  −4.2355185167e−37 C150 x² y¹⁴ −3.8378722757e−44  1.4519580080e−42 −3.9631025300e−37 C152 y¹⁶ −8.5789649226e−45  −2.0582245579e−42  −9.0857276151e−37 C154 x¹⁶ y 6.5466740425e−49 −3.1167106271e−47  −1.0389065179e−48 C156 x¹⁴ y³ 6.1521636917e−47 3.5808071608e−46 −5.7823230179e−46 C158 x¹² y⁵ 3.6925038157e−46 −1.2243453250e−46  −2.6596475647e−44 C160 x¹⁰ y⁷ −8.0078075897e−47  4.4287259272e−46 −5.2093733757e−43 C162 x⁸ y⁹ 3.7871211893e−46 −1.7358191461e−46  −1.2263353541e−41 C164 x⁶ y¹¹ 1.2280486889e−46 8.2699410068e−46 −7.2302459519e−41 C166 x⁴ y¹³ 8.6342881328e−47 −4.3290229607e−45  −5.4561681698e−40 C168 x² y¹⁵ 6.0487139404e−47 −3.2839737034e−46   1.1217563478e−39 C170 y¹⁷ 1.5353591587e−47 −3.5678574152e−45  −2.1971923973e−41 C171 x¹⁸ 7.5367290347e−52 −6.7363050576e−51   3.6657203991e−52 C173 x¹⁶ y² 1.2564480150e−50 −2.2761263083e−49   7.1665726422e−50 C175 x¹⁴ y⁴ 2.6854178846e−50 6.6855036909e−49 −3.2113755579e−48 C177 x¹² y⁶ −1.8597380191e−49  1.2805202298e−48 −2.2442446141e−46 C179 x¹⁰ y⁸ 5.0837853259e−49 −2.6726047791e−48  −5.6979374942e−45 C181 x⁸ y¹⁰ 3.7845410826e−49 1.0905216635e−48 −1.0753880426e−43 C183 x⁶ y¹² 3.6104270144e−49 1.8174988739e−48 −2.0292161304e−43 C185 x⁴ y¹⁴ 4.0590031648e−49 −5.9403377803e−48   3.7515319658e−42 C187 x² y¹⁶ 5.5720614802e−52 −2.4451814824e−48   1.4719944394e−41 C189 y¹⁸ −5.1937662997e−51  −3.1971760197e−48   1.3872656651e−41 C191 x¹⁸ y −1.9052782918e−54  −1.9859976443e−53   6.6525898815e−54 C193 x¹⁶ y³ −5.0902055749e−53  −5.9911037387e−52   9.4026672252e−53 C195 x¹⁴ y⁵ −1.5778159825e−52  2.4188991852e−51 −2.0750143141e−50 C197 x¹² y⁷ −1.0646684439e−52  −1.5145088076e−51  −7.0050331906e−49 C199 x¹⁰ y⁹ −6.8102906593e−52  −1.9545864229e−51  −1.4639623314e−47 C201 x⁸ y¹¹ −7.4018607700e−52  3.4143195617e−51 −3.1351701247e−46 C203 x⁶ y¹³ −5.2323340614e−52  −1.2959945990e−51  −2.0131233573e−46 C205 x⁴ y¹⁵ −4.7694500668e−52  −2.9668807249e−51   1.6489536373e−44 C207 x² y¹⁷ −3.6483400867e−53  −1.8356363838e−51   4.1897863826e−44 C209 y¹⁹ −4.3693122376e−54  −2.6190158701e−51   4.3547985764e−44 C210 x²⁰ 8.4688927194e−58 3.1472133606e−57 −2.4406794986e−58 C212 x¹⁸ y² 1.1229204192e−56 −5.4447936407e−56  −5.7013165880e−56 C214 x¹⁶ y⁴ 3.9834761631e−56 −3.2103913380e−55  −2.5146342715e−54 C216 x¹⁴ y⁶ 1.4505598199e−55 2.1854819023e−54 −7.9178374996e−53 C218 x¹² y⁸ 1.4619341693e−55 −4.3698429354e−54  −5.0073981039e−52 C220 x¹⁰ y¹⁰ 3.5096598826e−55 5.6566436065e−54 −3.1102758902e−51 C222 x⁸ y¹² 3.9331076268e−55 −5.5225078774e−54  −4.0591416986e−49 C224 x⁶ y¹⁴ 2.2235259236e−55 4.5836120790e−54 −4.5747696329e−49 C226 x⁴ y¹⁶ 1.7363139842e−55 −3.7337510238e−54   2.2604161853e−47 C228 x² y¹⁸ 1.6195978603e−56 1.2175777066e−54  4.1049092591e−47 C230 y²⁰ 2.2693722141e−57 −2.1878233249e−54   4.7782409568e−47 C232 x²⁰ y −3.6586085665e−60  2.6981603257e−60 −5.3286365016e−60 C234 x¹⁸ y³ −2.9091073540e−60  −1.5497609068e−59  −2.7311451599e−58 C236 x¹⁶ y⁵ −5.2039371922e−60  6.9392627326e−60 −7.5326227793e−57 C238 x¹⁴ y⁷ −5.2380168952e−59  1.7004344120e−60 −1.1056316754e−55 C240 x¹² y⁹ −4.5802846444e−59  1.2198019026e−58  7.8396719535e−55 C242 x¹⁰ y¹¹ −5.9937283023e−59  5.1768164805e−59  2.3332062689e−53 C244 x⁸ y¹³ −6.3024359579e−59  −2.9958733896e−58  −2.0013710262e−52 C246 x⁶ y¹⁵ −1.6693775559e−59  1.9713055874e−58 −1.1693109321e−51 C248 x⁴ y¹⁷ −7.3784558652e−60  9.4308983763e−59  6.9016548972e−51 C250 x² y¹⁹ −4.5093457762e−61  1.1442132021e−58  1.3694710886e−51 C252 y²¹ 2.5181784325e−61 −6.1621979903e−58   1.0176518371e−50 Coefficient Formula M07 M08 M09 C2 y −7.8446494187e−03  −4.4306971181e−03   1.6594953981e−03 C7 x² y −6.9416100795e−09  −2.7624484613e−07   2.5401450650e−08 C9 y³ 3.8449931211e−08 1.2636412860e−06  1.9839003582e−08 C10 x⁴ −3.7076334723e−12  4.0658163182e−10 −8.9053426021e−12 C12 x² y² −1.1218808555e−10  1.8333942565e−09 −4.0866741995e−11 C14 y⁴ −2.4806937215e−11  7.3000159311e−09 −1.7884091212e−11 C16 x⁴ y 8.8752130285e−14 −3.6590941781e−13   1.9789360796e−14 C18 x² y³ 2.8955328576e−14 −2.8805310103e−12   3.5175493413e−14 C20 y⁵ 2.3848612627e−14 2.6683775501e−11  1.6499230515e−14 C21 x⁶ −1.4781134690e−17  7.2045616203e−16 −1.3298670517e−17 C23 x⁴ y² −2.5567301877e−17  6.1329295531e−15 −7.9420381455e−17 C25 x² y⁴ −9.7816747866e−17  1.8964387033e−14 −9.2963520665e−17 C27 y⁶ −3.5880399094e−17  1.7145749650e−13 −2.9648289124e−17 C29 x⁶ y 1.2285489035e−19 −2.1624921334e−18   1.5564316251e−20 C31 x⁴ y³ 1.9662748570e−19 −2.6540687917e−18   5.7645892729e−20 C33 x² y⁵ 2.0647197293e−19 −3.2240458918e−17   5.5830283305e−20 C35 y⁷ 5.4410786947e−20 9.4583301204e−16  2.0111995195e−20 C36 x⁸ 2.1000486268e−22 −3.8982750815e−22  −3.4418978824e−23 C38 x⁶ y² 2.5961955370e−22 2.1487695909e−20 −1.2010718681e−22 C40 x⁴ y⁴ −4.2662898224e−22  2.0809077804e−19 −2.2377830865e−22 C42 x² y⁶ −2.3674796296e−22  5.4557566367e−20 −1.5900839678e−22 C44 y⁸ −2.5787854832e−23  5.4626707702e−18 −3.6076329303e−23 C46 x⁸ y −1.0292234488e−24  3.3793864832e−23  2.8016847145e−26 C48 x⁶ y³ 1.0266038308e−24 3.1973087756e−24  8.0197094525e−26 C50 x⁴ y⁵ −1.8138047788e−24  1.5121992937e−22  1.2670255151e−25 C52 x² y⁷ −1.4636711983e−24  −1.9688336057e−21   9.7239352746e−26 C54 y⁹ −2.2796345069e−26  2.2799533627e−20  2.1022720095e−26 C55 x¹⁰ −1.2746450052e−26  2.8452928004e−26  1.7708597689e−29 C57 x⁸ y² −2.5980699176e−26  4.0523621739e−25 −1.7156700283e−28 C59 x⁶ y⁴ −1.4246024797e−26  4.2171005734e−24 −4.5386706623e−28 C61 x⁴ y⁶ 9.8011272654e−27 1.8339321263e−23 −5.5851133029e−28 C63 x² y⁸ 1.4495704133e−27 4.8982106887e−23 −3.4397115809e−28 C65 y¹⁰ −5.1387942263e−28  9.3069900562e−23 −6.5671203149e−29 C67 x¹⁰ y 3.9954182561e−29 −1.9245505582e−27  −2.1374440788e−32 C69 x⁸ y³ −2.6089734203e−29  −7.6786794692e−27   7.1275425778e−32 C71 x⁶ y⁵ 7.5466035966e−29 1.1773714267e−26  1.9847604531e−31 C73 x⁴ y⁷ 5.9706264569e−29 2.4914393678e−25  2.7402812945e−31 C75 x² y⁹ 3.1426219168e−29 9.8818058751e−25  1.1049650951e−31 C77 y¹¹ 1.8930526971e−30 8.3142895730e−25  1.3068049247e−33 C78 x¹² 3.7272265501e−31 −1.7679679996e−31  −9.6745012321e−35 C80 x¹⁰ y² 1.0983593746e−30 −1.5460387732e−29  −3.7039254458e−34 C82 x⁸ y⁴ 1.4121639658e−30 −2.3269099716e−28  −8.1788621789e−34 C84 x⁶ y⁶ −1.0671709849e−31  −1.3210353662e−27  −6.7912287575e−34 C86 x⁴ y⁸ −4.3909577302e−31  −3.2102441511e−27   8.4150919567e−35 C88 x² y¹⁰ −1.0219718974e−31  −1.4949145134e−27   4.6332954145e−34 C90 y¹² −3.5000170566e−34  1.3328196048e−26 −2.7299767543e−35 C92 x¹² y −1.2831614709e−33  5.4184112005e−32  5.9967471226e−39 C94 x¹⁰ y³ 1.7902011570e−34 3.1362647697e−31  3.3624295873e−37 C96 x⁸ y⁵ −5.9356899836e−33  3.3094379296e−31  9.8615307417e−37 C98 x⁶ y⁷ −7.3394937906e−34  −9.6149068350e−30   1.4182363500e−36 C100 x⁴ y⁹ 3.1435731593e−34 −6.5841283108e−29   9.3608237873e−37 C102 x² y¹¹ −6.8176725240e−35  −1.4705311077e−28   5.6014926952e−37 C104 y¹³ −7.8372722547e−36  1.0224458070e−28  2.4109157822e−37 C105 x¹⁴ −6.4451808624e−36  5.3015268417e−36 −1.9045851153e−40 C107 x¹² y² −2.7073918336e−35  4.9403482504e−34  9.8003568975e−40 C109 x¹⁰ y⁴ −4.3962506544e−35  8.3526787984e−33  1.8671986245e−39 C111 x⁸ y⁶ −6.6738227472e−36  6.5147537153e−32 −3.3551385444e−40 C113 x⁶ y⁸ 6.3423892423e−36 2.5223541021e−31 −7.6276006815e−39 C115 x⁴ y¹⁰ 4.2776380374e−36 3.7344998796e−31 −1.1876834618e−38 C117 x² y¹² 9.6249541599e−37 −3.1083370755e−31  −7.3902434979e−39 C119 y¹⁴ 1.1526703761e−38 6.8347387188e−32 −4.8292195629e−40 C121 x¹⁴ y 2.8850027766e−38 −9.1385233177e−37   7.7229132671e−43 C123 x¹² y³ 9.1980956079e−39 −7.0766166809e−36   1.3050816292e−43 C125 x¹⁰ y⁵ 2.3628257108e−37 −2.0367952351e−35  −1.5045499933e−43 C127 x⁸ y⁷ 1.0587996691e−37 1.7005323921e−34 −4.3103104380e−42 C129 x⁶ y⁹ −2.3630605789e−38  2.6433184032e−33 −4.7912971749e−42 C131 x⁴ y¹¹ −1.4372454114e−38  1.0168494781e−32 −3.8497404734e−42 C133 x² y¹³ −2.1048681492e−39  1.2026609653e−32 −2.8269844063e−42 C135 y¹⁵ 1.6768521447e−42 −3.0199280978e−33  −6.2655361176e−43 C136 x¹⁶ 6.6091003089e−41 −1.6109628446e−40   8.1686265555e−46 C138 x¹⁴ y² 4.0790071654e−40 −9.7504630322e−39  −7.5372887164e−45 C140 x¹² y⁴ 5.9570101663e−40 −1.8410966520e−37  −2.8189908274e−44 C142 x¹⁰ y⁶ −3.1188206894e−40  −1.7518152935e−36  −5.3983503054e−44 C144 x⁸ y⁸ −2.2352234614e−40  −9.3053686793e−36  −4.3087059802e−44 C146 x⁶ y¹⁰ 4.0234731825e−41 −1.9350125365e−35   1.5571628159e−44 C148 x⁴ y¹² 1.4044945686e−41 4.6069166794e−36  4.7443001615e−44 C150 x² y¹⁴ 1.7128455220e−42 6.3991275876e−35  3.0065957765e−44 C152 y¹⁶ −6.2097347227e−45  −1.1194071146e−35   2.3114326920e−45 C154 x¹⁶ y −3.9685526952e−43  9.0875190448e−42 −3.2128584439e−48 C156 x¹⁴ y³ −2.4712737266e−43  9.0445484913e−41 −2.2890343044e−48 C158 x¹² y⁵ −3.1717312478e−42  3.2675196917e−40 −1.0672808770e−47 C160 x¹⁰ y⁷ −1.8546588262e−42  −1.6573972181e−39   2.3064022617e−48 C162 x⁸ y⁹ −1.1518603141e−43  −5.3906709125e−38   3.6060579361e−47 C164 x⁶ y¹¹ 1.0734033449e−45 −3.3272218337e−37   1.8918522203e−47 C166 x⁴ y¹³ 1.4134429511e−44 −6.8691715217e−37   2.7790000280e−47 C168 x² y¹⁵ 5.2982029110e−46 −2.9003149149e−37   1.8861055752e−47 C170 y¹⁷ −2.6991028425e−47  6.8457981546e−38  1.7131386581e−48 C171 x¹⁸ −3.9598139016e−46  2.4662158874e−45 −1.4660146756e−51 C173 x¹⁶ y² −3.7889252038e−45  1.2422726562e−43  2.4640681752e−50 C175 x¹⁴ y⁴ −4.3384393094e−45  2.6538850877e−42  1.1757510607e−49 C177 x¹² y⁶ 9.6310045477e−45 2.9301412025e−41  3.0828363803e−49 C179 x¹⁰ y⁸ 8.4023782167e−45 1.8930990406e−40  4.6105340841e−49 C181 x⁸ y¹⁰ 1.0648908068e−45 5.8915504677e−40  3.0197306177e−49 C183 x⁶ y¹² −1.1633275349e−46  −1.2680802403e−40  −1.5133752164e−50 C185 x⁴ y¹⁴ −4.6615914875e−47  −2.6235738509e−39  −1.3841551604e−49 C187 x² y¹⁶ −2.0580762623e−48  −2.6622891776e−39  −8.6358815298e−50 C189 y¹⁸ 5.9680526939e−50 1.0953493348e−39 −8.5870015675e−51 C191 x¹⁸ y 3.3111703464e−48 −4.8508082496e−47   7.1547575718e−54 C193 x¹⁶ y³ 4.4222616369e−48 −6.0387844731e−46   9.6694477137e−54 C195 x¹⁴ y⁵ 1.1263819852e−47 −5.3740727315e−46   7.2806159787e−53 C197 x¹² y⁷ −1.2813941130e−47  2.2517525644e−44  1.2884717730e−52 C199 x¹⁰ y⁹ −1.3943815583e−47  6.3109491274e−43  1.8742041395e−53 C201 x⁸ y¹¹ −1.6254211152e−48  5.9751915941e−42 −2.8815090946e−53 C203 x⁶ y¹³ 1.7978486772e−49 1.7063034631e−41  9.4848275535e−53 C205 x⁴ y¹⁵ 4.3242721924e−50 1.7489012564e−41 −6.2410424998e−53 C207 x² y¹⁷ 1.4025281182e−51 −4.7463753603e−42  −5.8398960429e−53 C209 y¹⁹ −4.5522013446e−53  7.0434957037e−42 −3.4852377666e−54 C210 x²⁰ 1.2154144648e−51 −2.0925794170e−50   5.2901440705e−58 C212 x¹⁸ y² 1.7462143018e−50 −1.0037005879e−48  −5.8345959184e−56 C214 x¹⁶ y⁴ 2.0007099760e−50 −2.4182521080e−47  −3.2571601050e−55 C216 x¹⁴ y⁶ −2.3572927431e−50  −3.0411734912e−46  −1.0387538571e−54 C218 x¹² y⁸ 1.8959703584e−51 −2.2185482170e−45  −2.1041978607e−54 C220 x¹⁰ y¹⁰ 1.0887800919e−50 −9.0989011804e−45  −2.4936132130e−54 C222 x⁸ y¹² 1.0924697389e−51 −1.7857181133e−45  −1.5522176366e−54 C224 x⁶ y¹⁴ −1.0986624031e−52  7.9317569772e−44 −3.9513470302e−55 C226 x⁴ y¹⁶ −1.6078854442e−53  1.3369087621e−43  8.8693900322e−56 C228 x² y¹⁸ −2.6709201454e−55  −5.3315496993e−46   1.1562077258e−55 C230 y²⁰ 1.2906925072e−56 3.3595318871e−44  1.4158778489e−56 C232 x²⁰ y −1.4846876466e−53  5.5911266902e−53 −8.6653763952e−60 C234 x¹⁸ y³ −3.8356013646e−53  9.1229421497e−52 −1.0380700392e−59 C236 x¹⁶ y⁵ −2.1578410415e−53  −4.3794742202e−50  −1.6680890898e−58 C238 x¹⁴ y⁷ 2.6513538765e−53 −4.5279347849e−49  −4.4797168084e−58 C240 x¹² y⁹ 4.6137220941e−54 −4.9263245864e−48  −4.3370487059e−58 C242 x¹⁰ y¹¹ −3.5044328796e−54  −5.4747302988e−47  −3.3156538985e−59 C244 x⁸ y¹³ −2.8980202026e−55  −2.2196004244e−46  −3.6241948840e−58 C246 x⁶ y¹⁵ 2.2784551004e−56 −1.7056688554e−46  −6.1696715195e−58 C248 x⁴ y¹⁷ 1.3999459535e−57 8.6047085047e−47  7.1783500369e−59 C250 x² y¹⁹ −3.8768203818e−59  3.0334979480e−46  1.1050929383e−58 C252 y²¹ −2.3313576403e−61  2.4432981442e−46  7.1461620855e−60 C253 x²² 0.0000000000e+00 9.7107414669e−56  1.3295570245e−63 C255 x²⁰ y² 0.0000000000e+00 4.7033813282e−54  7.7604218211e−62 C257 x¹⁸ y⁴ 0.0000000000e+00 1.2621314089e−52  4.7950728798e−61 C259 x¹⁶ y⁶ 0.0000000000e+00 1.8029163801e−51  1.7500558900e−60 C261 x¹⁴ y⁸ 0.0000000000e+00 1.4529141589e−50  4.2726658046e−60 C263 x¹² y¹⁰ 0.0000000000e+00 6.9130535398e−50  6.7223428855e−60 C265 x¹⁰ y¹² 0.0000000000e+00 5.0614578818e−50  6.5670479413e−60 C267 x⁸ y¹⁴ 0.0000000000e+00 −9.6771765209e−49   3.8441799586e−60 C269 x⁶ y¹⁶ 0.0000000000e+00 −2.3713014937e−48   1.3917412910e−60 C271 x⁴ y¹⁸ 0.0000000000e+00 −1.6989810528e−48   2.6384369367e−61 C273 x² y²⁰ 0.0000000000e+00 4.0548139497e−48 −4.3467540264e−62 C275 y²² 0.0000000000e+00 1.5912954335e−48 −9.7418847348e−63 C277 x²² y 0.0000000000e+00 7.4877001489e−58  4.6002776029e−66 C279 x²⁰ y³ 0.0000000000e+00 1.1999688137e−56 −3.8198953402e−66 C281 x¹⁸ y⁵ 0.0000000000e+00 5.0182721510e−55  1.8117565541e−64 C283 x¹⁶ y⁷ 0.0000000000e+00 4.9097448319e−54  6.2855567560e−64 C285 x¹⁴ y⁹ 0.0000000000e+00 3.1068858665e−53  9.5693585223e−64 C287 x¹² y¹¹ 0.0000000000e+00 2.3776364827e−52  4.4482359087e−64 C289 x¹⁰ y¹³ 0.0000000000e+00 1.1695708107e−51  1.7787605224e−64 C291 x⁸ y¹⁵ 0.0000000000e+00 1.8120222996e−52  1.4351836294e−63 C293 x⁶ y¹⁷ 0.0000000000e+00 −5.3230871251e−51   1.3487790395e−63 C295 x⁴ y¹⁹ 0.0000000000e+00 −5.3973526820e−51  −5.1971477262e−66 C297 x² y²¹ 0.0000000000e+00 1.9851768372e−50 −1.1040256143e−64 C299 y²³ 0.0000000000e+00 5.3023983038e−51 −9.2205479288e−66 C300 x²⁴ 0.0000000000e+00 −1.9248172283e−61  −1.8230221324e−69 C302 x²² y² 0.0000000000e+00 −9.6245620741e−60  −5.0278786404e−68 C304 x²⁰ y⁴ 0.0000000000e+00 −2.8553081252e−58  −3.3669501960e−67 C306 x¹⁸ y⁶ 0.0000000000e+00 −4.6444449037e−57  −1.3687314298e−66 C308 x¹⁶ y⁸ 0.0000000000e+00 −4.1801314112e−56  −3.8279693501e−66 C310 x¹⁴ y¹⁰ 0.0000000000e+00 −2.1786206045e−55  −7.2847252127e−66 C312 x¹² y¹² 0.0000000000e+00 −2.0283813767e−55  −9.3905393351e−66 C314 x¹⁰ y¹⁴ 0.0000000000e+00 4.6565342126e−54 −8.0887082053e−66 C316 x⁸ y¹⁶ 0.0000000000e+00 1.3778334586e−53 −4.6924880637e−66 C318 x⁶ y¹⁸ 0.0000000000e+00 1.0029120625e−53 −1.9717266649e−66 C320 x⁴ y²⁰ 0.0000000000e+00 2.5018917738e−54 −5.6384627421e−67 C322 x² y²² 0.0000000000e+00 4.3737519489e−53 −6.6189078716e−68 C324 y²⁴ 0.0000000000e+00 7.3315917218e−54 −2.4063002101e−69 C326 x²⁴ y 0.0000000000e+00 −2.8949671977e−63   3.9640201909e−73 C328 x²² y³ 0.0000000000e+00 −5.2973511098e−62   1.5372186556e−71 C330 x²⁰ y⁵ 0.0000000000e+00 −1.7594090377e−60  −4.1478029555e−71 C332 x¹⁸ y⁷ 0.0000000000e+00 −1.9690596269e−59  −1.8721035685e−70 C334 x¹⁶ y⁹ 0.0000000000e+00 −1.1828775353e−58  −2.4320580918e−70 C336 x¹⁴ y11 0.0000000000e+00 −4.6128327550e−58   2.0820748566e−70 C338 x¹² y¹³ 0.0000000000e+00 −4.7519515302e−58   9.8238365291e−70 C340 x¹⁰ y¹⁵ 0.0000000000e+00 9.1752543077e−57  5.0516893860e−70 C342 x⁸ y¹⁷ 0.0000000000e+00 3.3805756544e−56 −9.1913208178e−70 C344 x⁶ y¹⁹ 0.0000000000e+00 4.4746971686e−56 −7.1782627028e−70 C346 x⁴ y²¹ 0.0000000000e+00 2.8369229439e−56  6.9720198410e−71 C348 x² y²³ 0.0000000000e+00 3.9263413003e−56  6.6166049715e−71 C350 y²⁵ 0.0000000000e+00 2.4856909779e−57  6.9953209582e−72

TABLE 25 for projection optical unit 600 of FIG. 6A: Coordinates of stop edge x_(i) [mm] y_(i) [mm] x_(i+N/2) [mm] y_(i+N/2) [mm] 211.428792 202.442444 −266.345361 −226.406038 192.457613 210.929550 −245.377217 −242.381767 169.492503 219.915898 −230.899212 −252.366598 153.017532 225.407555 −206.935618 −266.844603 132.548629 231.398454 −194.953821 −273.334743 103.592619 238.387835 −181.973541 −279.824883 81.625992 242.381767 −160.506155 −289.310472 71.141919 243.879492 −143.531943 −295.800612 60.158605 245.377217 −119.568349 −303.788477 39.190461 247.374183 −97.102479 −309.779375 22.715490 248.372666 −88.116132 −311.776341 13.229901 248.372666 −73.138886 −314.771791 4.243553 248.871907 −44.682118 −318.765723 −21.217765 248.372666 −27.707905 −320.263448 −45.181359 246.874941 −17.223833 −320.762689 −64.152538 244.877975 18.222316 −320.762689 −78.131301 242.881009 44.182876 −318.765723 −101.096412 238.887077 66.648746 −315.770274 −112.578967 236.390869 90.612339 −311.277100 −140.037252 229.401487 116.073658 −304.786960 −150.022083 226.406038 133.547112 −299.295303 −173.486435 218.418173 150.521324 −293.304404 −195.952304 209.431826 165.498570 −287.313506 −211.428792 202.442444 190.959889 −275.331709 −225.407555 195.453063 210.430309 −264.847637 −243.380250 185.468232 221.413623 −258.357497 −252.366598 179.976575 240.384801 −245.876458 −265.846120 170.990227 252.865840 −236.890110 −276.829434 163.002363 275.830951 −218.418173 −294.302887 149.023600 290.308955 −204.938652 −306.284684 138.040286 305.785443 −188.962923 −315.271032 129.053938 317.767240 −174.984160 −330.248278 112.079726 325.755104 −164.999329 −338.735384 100.597170 337.237660 −148.524358 −346.224008 89.613856 346.723249 −133.047870 −357.207321 70.143436 352.714148 −122.064556 −362.698978 58.161639 361.201254 −103.592619 −366.193669 49.175292 364.695945 −94.606272 −369.688360 39.190461 368.689877 −82.624475 −371.685326 32.201079 373.183051 −66.648746 −375.180017 17.223833 376.178500 −50.673016 −376.677741 8.237485 377.676225 −39.689702 −377.676225 0.249621 378.674708 −19.720041 −378.674708 −16.724592 378.175466 −7.239002 −377.676225 −38.691219 376.178500 11.232935 −377.176983 −44.182876 372.683809 28.207147 −375.180017 −56.663915 367.192152 46.679084 −373.183051 −66.149504 361.201254 61.656330 −368.689877 −83.123716 355.210355 74.137369 −363.198220 −98.600204 346.723249 88.615373 −354.711114 −118.070624 336.738418 103.592619 −348.720215 −129.553179 327.252829 115.574416 −342.230075 −140.536493 315.271032 129.053938 −331.746003 −156.512223 298.296820 145.528909 −321.761172 −169.991744 282.820332 158.509189 −310.278617 −183.970507 265.346878 171.489469 −298.796061 −196.451546 247.374183 182.972024 −289.809714 −205.437893 227.404521 194.454580 −276.829434 −217.419690

Design Data for FIG. 7A

TABLE 26 for projection optical unit 700 of FIG. 7A: Numerical Aperture 0.55 Magnification in x-direction 0.250 Magnification in y- direction 0.125 Chief Ray angle 5.11° Wavelength 13.5 nm Image field size in x-direction 26.0 mm Image field size in y-direction 1.2 mm Average Wavefront-RMS 6.22 mλ

TABLE 27 for projection optical unit 700 of FIG. 7A: Radii of Surfaces Radius_(x) Power_(x) Radius_(y) Power_(y) [mm] [1/mm] [mm] [1/mm] M01 −1970.69460999 0.00098512 −1511.85882424 0.00128409 M02 941.40747587 −0.00025763 7869.30126742 −0.00003082 M03 1062.34333576 −0.00063183 −5417.37433191 0.00012390 M04 −1627.20602698 0.00018520 −3097.59050172 0.00009729 M05 −1637.75997050 0.00022724 −2673.59542090 0.00013920 M06 −1054.58408200 0.00067327 1389.83722957 −0.00051087 M07 −709.51421838 0.00073884 −2224.87048681 0.00023562 M08 1093.97975212 −0.00035480 3489.29474619 −0.00011124 M09 1141.82784219 −0.00163231 277.00525975 −0.00672847 M10 −728.60000391 0.00273657 −663.10844910 0.00300685

TABLE 28 for projection optical unit 700 of FIG. 7A: Decentring (location, angle) of surfaces D_(x) [mm] D_(y) [mm] D_(z) [mm] Reticle 0.000000000 0.000000000 0.000000000 M01 0.000000000 −147.747700656 1688.763946112 M02 0.000000000 −475.220806491 813.757153071 M03 0.000000000 −736.595820501 541.550583105 M04 0.000000000 −1291.955188953 414.279152033 M05 0.000000000 −2201.852432377 554.740368368 M06 0.000000000 −2427.794005811 706.276967819 M07 0.000000000 −2571.396016926 1047.356562534 M08 0.000000000 −2527.967678133 1278.013285002 M09 −0.000000000 −2769.283984422 2247.791647401 Stop −0.000000000 −2736.362660894 2115.490653284 M10 0.000000000 −2636.139966021 1712.725492471 Wafer −0.000000000 −2636.170856256 2351.863122345 α_(x) [°] α_(y) [°] α_(z) [°] Reticle 0.000000000 0.000000000 0.000000000 M01 −7.759233079 0.000000000 0.000000000 M02 57.822231158 180.000000000 0.000000000 M03 209.535245804 0.000000000 0.000000000 M04 2.066029837 180.000000000 0.000000000 M05 158.687580727 0.000000000 0.000000000 M06 −50.508585991 180.000000000 0.000000000 M07 96.084635597 0.000000000 0.000000000 M08 −88.344702455 0.000000000 180.000000000 M09 13.973487001 −0.000000000 0.000000000 Stop 0.097324946 180.000000000 0.000000000 M10 6.988128085 180.000000000 0.000000000 Wafer 0.002769169 −0.000000000 −0.000000000

TABLE 29 for projection optical unit 700 of FIG. 7A: Free form coefficients of surfaces Coefficient Formulae M01 M02 M03 C7 x² y 2.9888852171e−08 −5.4233934047e−07  −1.5580990270e−07  C9 y³ −9.9313264378e−08  9.5134224154e−08 −8.4093594223e−08  C10 x⁴ −3.9380462724e−12  2.9380275014e−10 1.7199126593e−10 C12 x² y² 2.7890851404e−11 1.6005602346e−09 −1.1412845193e−09  C14 y⁴ −5.4207485335e−11  −3.0846017716e−10  −2.7007085765e−10  C16 x⁴ y 1.7799771117e−15 −5.7783047247e−13  −3.3105549011e−12  C18 x² y³ 3.1830484261e−14 −6.0579824993e−12  −1.2452076900e−12  C20 y⁵ −1.8268004177e−13  9.7181744918e−13 1.2524620025e−13 C21 x⁶ 1.2770813647e−18 −4.6570784872e−16  −3.4324796250e−15  C23 x⁴ y² 2.9194535732e−17 −3.3076714928e−15  −6.9480410443e−15  C25 x² y⁴ 1.1842999686e−16 1.9131763507e−14 −4.1944118442e−17  C27 y⁶ 1.1655722599e−16 −2.2624338769e−15  −1.9194134619e−14  C29 x⁶ y −6.2624105697e−21  2.3573582834e−18 −1.8334481262e−17  C31 x⁴ y³ −7.5623342275e−20  1.6368485078e−17 4.1166466486e−17 C33 x² y 1.2100992295e−19 −5.1717553979e−17  −3.1555347175e−16  C35 y⁷ 2.0268229274e−18 4.5076636281e−18 5.7322366241e−17 C36 x⁸ −2.3774631064e−24  6.5046359798e−21 −9.5118201243e−21  C38 x⁶ y² −2.2639441174e−24  −2.9220327882e−20  2.5810244968e−19 C40 x⁴ y⁴ −2.1735834782e−22  −1.7614006405e−21  −2.4266342566e−18  C42 x² y⁶ −9.5608989305e−22  1.1574570790e−19 1.7139364765e−18 C44 y⁸ −4.8387797394e−21  −1.3807140138e−21  1.0720122982e−18 C46 x⁸ y 1.4323843652e−26 −8.1806067888e−23  5.3521067225e−22 C48 x⁶ y³ 2.3962710110e−25 2.6850491540e−22 −1.0636894546e−20  C50 x⁴ y⁵ −4.6109488357e−25  −2.9027882773e−22  1.8186025237e−20 C52 x² y⁷ 2.4006618280e−23 −2.9440130266e−22  1.8764659122e−20 C54 y⁹ −9.2849982882e−23  −2.3621929681e−23  −2.3493397266e−22  C55 x¹⁰ −5.2394686580e−30  −8.4632296878e−26  1.2076513975e−24 C57 x⁸ y² −4.6673707829e−28  6.2935914873e−25 −2.6258239290e−23  C59 x⁶ y⁴ −2.5339892950e−27  −1.4205011985e−24  1.0609405889e−22 C61 x⁴ y⁶ −1.0248535195e−26  1.0140796795e−24 1.0555108376e−22 C63 x² y⁸ 2.4565110005e−25 1.2469593546e−24 −1.3693594009e−22  C65 y¹⁰ −7.1074900499e−25  −9.5098760465e−26  −9.3601909086e−23  C67 x¹⁰ y −6.6546851220e−32  1.4480375209e−27 −3.0311270412e−26  C69 x⁸ y³ −3.5378682079e−30  −1.7934134990e−27  3.5904855766e−25 C71 x⁶ y⁵ −2.1889413390e−30  8.2947322580e−28 3.4362306188e−25 C73 x⁴ y⁷ −1.8822309462e−28  7.2978834638e−28 −1.4548653126e−24  C75 x² y⁹ 1.2658645951e−28 −4.5731337443e−27  −1.5569624553e−24  C77 y¹¹ 4.2751917523e−28 1.5679517242e−27 −6.6840996954e−25  C78 x¹² 2.4429025328e−34 −3.7357751409e−31  −4.9774608242e−29  C80 x¹⁰ y² 7.1187710549e−33 −8.2619431373e−30  6.6886538247e−28 C82 x⁸ y⁴ 5.2568960882e−32 −4.1134467381e−30  −1.7759512677e−28  C84 x⁶ y⁶ 4.3418477530e−31 2.5512036888e−29 −6.8573639559e−27  C86 x⁴ y⁸ 3.7092671582e−31 1.5965731932e−29 −5.2411092466e−27  C88 x² y¹⁰ −1.6489870244e−29  1.9219348698e−29 3.4462996537e−27 C90 y¹² 4.8176548665e−29 −1.7372729714e−30  3.2952744392e−27 C92 x¹² y 6.0000170595e−37 −1.4457150351e−32  5.6015023155e−31 C94 x¹⁰ y³ 3.1491885614e−35 −7.5669269483e−33  −2.4615982116e−30  C96 x⁸ y⁵ 1.5996797120e−34 1.4033935594e−31 −2.7356748036e−29  C98 x⁶ y⁷ −4.2078152435e−34  −6.6015297800e−32  −1.3294017835e−29  C100 x⁴ y⁹ 1.3927541876e−32 −2.5584479947e−31  5.6641174584e−29 C102 x² y¹¹ −5.7160666261e−32  −1.0326514343e−31  8.7562310878e−29 C104 y¹³ 1.4150329911e−31 −1.8496060717e−32  7.3622195680e−29 C105 x¹⁴ −1.8646013650e−39  1.5992716554e−35 5.1943311137e−34 C107 x¹² y² −5.2673076786e−38  8.8658715576e−35 −2.5835937247e−33  C109 x¹⁰ y⁴ −4.7852072756e−37  4.0042063817e−35 −3.2254857311e−32  C111 x⁸ y⁶ −3.8206260989e−36  −6.8177527562e−34  −7.6265432503e−32  C113 x⁶ y⁸ −3.4315656590e−35  −3.4499710184e−36  1.2554759608e−31 C115 x⁴ y¹⁰ 6.0114254814e−35 6.9151235428e−34 2.1363858441e−31 C117 x² y¹² 5.7159188426e−34 2.1910507977e−34 3.4000209616e−31 C119 y¹⁴ −8.3969056303e−34  4.5161730053e−35 2.6843814841e−31 C121 x¹⁴ y −2.3963867717e−42  0.0000000000e+00 0.0000000000e+00 C123 x¹² y³ −1.1764738795e−40  0.0000000000e+00 0.0000000000e+00 C125 x¹⁰ y⁵ −9.7597340479e−40  0.0000000000e+00 0.0000000000e+00 C127 x⁸ y⁷ 7.6379758745e−40 0.0000000000e+00 0.0000000000e+00 C129 x⁶ y⁹ 4.0431867337e−39 0.0000000000e+00 0.0000000000e+00 C131 x⁴ y¹¹ −3.8807977144e−37  0.0000000000e+00 0.0000000000e+00 C133 x² y¹³ 1.8806566242e−36 0.0000000000e+00 0.0000000000e+00 C135 y¹⁵ −4.5173713948e−36  0.0000000000e+00 0.0000000000e+00 C136 x¹⁶ 4.8287113524e−45 0.0000000000e+00 0.0000000000e+00 C138 x¹⁴ y² 1.6227676750e−43 0.0000000000e+00 0.0000000000e+00 C140 x¹² y⁴ 1.8265759393e−42 0.0000000000e+00 0.0000000000e+00 C142 x¹⁰ y⁶ 1.3868063724e−41 0.0000000000e+00 0.0000000000e+00 C144 x⁸ y⁸ 1.4221682696e−40 0.0000000000e+00 0.0000000000e+00 C146 x⁶ y¹⁰ 8.0228529171e−40 0.0000000000e+00 0.0000000000e+00 C148 x⁴ y¹² −2.9658894203e−39  0.0000000000e+00 0.0000000000e+00 C150 x² y¹⁴ −8.3554443187e−39  0.0000000000e+00 0.0000000000e+00 C152 y¹⁶ 3.1733949699e−39 0.0000000000e+00 0.0000000000e+00 Coefficient Formular M04 M05 M06 C7 x² y −9.7621314849e−08 −8.4546421035e−08 −7.8656126633e−09 C9 y³ −6.1670181624e−08 −1.0275938411e−07 −8.5973038135e−07 C10 x⁴ −1.5710696415e−11  5.2342835257e−11  5.8666395567e−11 C12 x² y² −8.1443757654e−12 −1.7610287537e−10  1.8668069731e−10 C14 y⁴ −6.4830103677e−11 −2.2972292337e−10  5.6463657422e−09 C16 x⁴ y  1.4961196689e−13 −2.1495308003e−13 −2.3651844507e−13 C18 x² y³ −3.6712539224e−14 −3.9008180524e−13 −3.6375291931e−12 C20 y⁵ −3.1412320213e−14 −5.8337028498e−13 −3.7384069278e−11 C21 x⁶ −1.2246765290e−15  2.0233961472e−16  2.4976037227e−16 C23 x⁴ y²  5.1693842865e−16 −4.4218917521e−16  4.0884758599e−15 C25 x² y⁴ −3.7550554666e−16 −1.0369147884e−15  1.0678081509e−14 C27 y⁶  6.1471566134e−17 −1.6174660468e−15  2.7210412767e−13 C29 x⁶ y −3.4431990156e−18 −9.2658183232e−19 −1.0972120994e−18 C31 x⁴ y³  2.6568208479e−18 −1.6345870557e−18 −1.3472056872e−17 C33 x² y⁵ −1.0127928856e−18 −2.9532734978e−18  7.2864938301e−17 C35 y⁷ −8.7795917550e−19 −6.8447646558e−18  6.5527025150e−14 C36 x⁸ −4.8954847577e−21  1.4440718636e−21  6.5856741694e−22 C38 x⁶ y² −1.1804124593e−20 −2.8007048521e−22  7.2029159254e−21 C40 x⁴ y⁴  8.1432806949e−21 −1.9327609967e−21  4.7429671955e−19 C42 x² y⁶  1.1810955458e−21 −2.2466223100e−20 −1.5116108716e−17 C44 y⁸ −7.2670201011e−21 −9.2682138541e−20 −3.9930757659e−16 C46 x⁸ y −2.0121692380e−23 −6.5541997168e−25 −1.2409823685e−23 C48 x⁶ y³ −3.5956178475e−23  2.6098913530e−24 −8.6437240846e−23 C50 x⁴ y⁵  1.9462273746e−23 −9.5197915435e−24  6.4043320518e−21 C52 x² y⁷  1.8104186221e−23 −2.7990262729e−22 −7.8313304626e−19 C54 y⁹  5.9495467340e−23 −3.4972872299e−22 −1.4583385132e−16 C55 x¹⁰  6.1658568171e−26 −2.5190773518e−27  5.6052284105e−27 C57 x⁸ y² −6.7154387198e−26  3.1578129329e−27  6.1088121117e−26 C59 x⁶ y⁴ −3.1065463793e−25 −9.1129807219e−26 −4.2837510886e−24 C61 x⁴ y⁶ −1.8370772466e−25 −5.9844977879e−25 −1.0758492440e−21 C63 x² y⁸ −1.2385896007e−25  1.3543503875e−24  6.2523867389e−20 C65 y¹⁰  7.6517060150e−26  8.1081725334e−24  7.5733316403e−19 C67 x¹⁰ y  3.3366651021e−28 −3.9031257535e−29 −2.7070739349e−29 C69 x⁸ y³ −4.0764197868e−30 −2.6776073926e−28 −8.4299136531e−28 C71 x⁶ y⁵ −5.9569752648e−28 −1.7651553623e−27 −3.0464241926e−26 C73 x⁴ y⁷  2.5941930399e−29 −1.0190945774e−27 −1.6728948736e−23 C75 x² y⁹ −7.2961720995e−28  3.2058868716e−26  1.0681299282e−21 C77 y¹¹ −1.9012552872e−27  5.7599570048e−26  1.5447793782e−19 C78 x¹² −6.8177240126e−31  3.6122647505e−32 −9.3278287638e−33 C80 x¹⁰ y²  1.6314141946e−30 −3.0712870525e−31  1.1918512594e−30 C82 x⁸ y⁴  7.3989276522e−30 −6.2108145069e−31  1.2934862444e−28 C84 x⁶ y⁶  1.1027398101e−29  2.7530455919e−30  2.8487975384e−27 C86 x⁴ y⁸  7.1355233349e−30  1.7616624611e−29  2.2581554642e−24 C88 x² y¹⁰  3.9079466996e−30 −1.0425732501e−28 −1.0774594569e−22 C90 y¹²  3.0269108987e−30 −4.3016235302e−28 −5.9061968597e−22 C92 x¹² y −5.7232493510e−34 −8.2659347711e−35  4.4820436419e−34 C94 x¹⁰ y³ −9.2356125691e−34  1.3596288320e−33 −1.0469534243e−33 C96 x⁸ y⁵  6.1379860255e−33  1.5499267832e−32  2.6463457623e−31 C98 x⁶ y⁷  6.9099505397e−33  1.3410556845e−31 −4.0192208354e−29 C100 x⁴ y⁹ −7.3907286260e−33 −3.0967162026e−31  1.8016184333e−26 C102 x² y¹¹  1.1653025783e−32 −2.5471685015e−30 −6.8995197936e−25 C104 y¹³  2.1407564200e−32 −5.4623627875e−30 −6.2298075891e−23 C105 x¹⁴  9.9761341305e−36 −9.7792789953e−38 −2.5128985171e−38 C107 x¹² y²  2.9638624814e−36  4.0815415868e−36 −1.0185724931e−35 C109 x¹⁰ y⁴ −8.5014074254e−35  8.9719565713e−36 −1.1108453750e−33 C111 x⁸ y⁶ −2.0235714171e−34  7.9940508960e−35 −1.9443870410e−32 C113 x⁶ y⁸ −1.7494672136e−34  5.2216419216e−34 −3.1893117719e−30 C115 x⁴ y¹⁰ −4.8633268436e−35 −2.6448872890e−33 −1.5060764556e−27 C117 x² y¹² −7.0233125043e−35 −7.0022575786e−33  6.1939843825e−26 C119 y¹⁴ −6.4842550596e−35 −1.5383246493e−32  1.5174477646e−25 Coefficient Formular M07 M08 M09 C7 x² y −5.3247574162e−07  9.2290576454e−07 −2.2497841045e−06  C9 y³ 1.7824971085e−07 2.5727825498e−08 −3.2900782221e−07  C10 x⁴ −5.5773152921e−10  2.0322366217e−09 1.7930637554e−09 C12 x² y² −1.6808198643e−10  9.4839199936e−10 8.7675643741e−09 C14 y⁴ −3.9586396101e−10  −1.6563940517e−11  7.4602870217e−09 C16 x⁴ y −1.6697683838e−12  4.6285728372e−12 −1.0930582881e−11  C18 x² y³ 2.6298070251e−13 −9.3332348305e−14  −1.3388947210e−11  C20 y⁵ 9.6311807353e−13 −7.7465823639e−14  1.9298012531e−11 C21 x⁶ −2.7634793454e−15  4.2566583496e−15 8.8731882335e−15 C23 x⁴ y² −7.1123181696e−16  2.1772395142e−15 7.3135925789e−14 C25 x² y⁴ 1.2591997571e−15 −4.8384037527e−15  1.4977465063e−13 C27 y⁶ −2.5794924943e−15  5.3366790508e−17 6.1242182808e−14 C29 x⁶ y −7.6393817827e−18  1.2758371886e−17 −1.1024781450e−16  C31 x⁴ y³ 2.4390827214e−18 −4.0126005376e−17  −4.9004277397e−16  C33 x² y⁵ 4.0488117575e−18 −1.3138083890e−17  5.3404977450e−16 C35 y⁷ 5.8425723805e−18 −2.7787232169e−18  −3.9901516786e−16  C36 x⁸ −1.6114280460e−20  1.1236283787e−19 5.7348160491e−20 C38 x⁶ y² −3.9425457682e−21  −7.2893398592e−20  1.4096531954e−18 C40 x⁴ y⁴ 2.2807528020e−20 −1.7192164616e−19  8.7141605006e−19 C42 x² y⁶ 8.4616222094e−21 −1.0018425746e−19  9.5039121398e−18 C44 y⁸ −2.6901296894e−20  5.5417703690e−20 1.0913121006e−17 C46 x⁸ y −2.5867742646e−23  3.3763591769e−22 −1.2013934139e−21  C48 x⁶ y³ 4.4453033180e−23 −5.1520715205e−22  −2.8452083986e−21  C50 x⁴ y⁵ 3.6145735497e−23 −1.0890837037e−21  −1.5147995549e−20  C52 x² y⁷ −9.8719591813e−23  8.3586877249e−22 −3.0775490741e−20  C54 y⁹ 3.5345367220e−22 −7.4418682937e−23  8.1491134147e−20 C55 x¹⁰ −9.2188175803e−27  −3.9163393407e−24  3.6025424487e−25 C57 x⁸ y² 1.5346127694e−25 −4.7136624860e−24  6.7712097465e−24 C59 x⁶ y⁴ 3.7039295750e−25 −7.7493267481e−24  4.3520771784e−23 C61 x⁴ y⁶ −1.7413898933e−25  6.0690698133e−24 6.9078168122e−23 C63 x² y⁸ −1.4602998968e−25  1.0569044058e−24 −3.8546433238e−22  C65 y¹⁰ 1.2303167513e−25 −2.5588558118e−24  1.2537676325e−21 C67 x¹⁰ y −1.1660065501e−28  −3.5664278481e−26  −2.6070240874e−26  C69 x⁸ y³ 7.9038078846e−28 −7.4899046031e−26  −2.2633904127e−25  C71 x⁶ y⁵ 1.5967109369e−27 −3.8332662451e−27  −7.6502569835e−25  C73 x⁴ y⁷ 2.2825300291e−27 2.5839153971e−26 6.0869587376e−25 C75 x² y⁹ 7.9338910794e−27 −4.5750923747e−26  −5.3022886559e−24  C77 y¹¹ −1.2993005128e−26  2.9920797476e−27 3.0600807582e−24 C78 x¹² −5.2424759959e−31  8.0165005557e−29 3.5116495573e−29 C80 x¹⁰ y² −1.7945084130e−30  −1.9372805260e−29  4.1286171178e−28 C82 x⁸ y⁴ −6.5011609678e−32  −8.7831268792e−29  2.0804747775e−27 C84 x⁶ y⁶ 1.4737073305e−29 6.1801867018e−29 4.6623027195e−27 C86 x⁴ y⁸ 5.2368813330e−29 −4.9370909186e−28  2.2770595142e−26 C88 x² y¹⁰ −1.8174862625e−29  2.2839152171e−30 9.2884904118e−26 C90 y¹² 5.8033982739e−30 4.1917024539e−29 −3.0693337999e−25  C92 x¹² y 2.0969111795e−33 7.7093248706e−31 5.4368980978e−31 C94 x¹⁰ y³ 8.4938248258e−33 2.3071322265e−30 4.9942897587e−30 C96 x⁸ y⁵ 1.4006923580e−32 1.6152041470e−30 6.3643119532e−29 C98 x⁶ y⁷ 2.1531562919e−33 −3.2708655507e−30  3.0075197958e−28 C100 x⁴ y⁹ −1.1124653384e−31  −7.3760845388e−31  −3.8872832756e−28  C102 x² y¹¹ −7.4345145974e−32  4.7354751975e−31 3.2860757169e−27 C104 y¹³ 2.1801457151e−31 −2.0614054457e−32  −1.5536664700e−27  C105 x¹⁴ 1.6117436940e−36 −6.0889150257e−34  −8.0931525126e−34  C107 x¹² y² 3.6317336530e−35 3.8363227542e−33 −9.3114839633e−33  C109 x¹⁰ y⁴ 9.7651944912e−35 1.0872994441e−32 −9.5742648369e−32  C111 x⁸ y⁶ −1.1829097010e−34  −1.1148207274e−33  −1.2738812662e−30  C113 x⁶ y⁸ −5.3563131590e−34  −9.6044852905e−33  −3.6118221924e−31  C115 x⁴ y¹⁰ −1.2552770877e−33  4.3803836288e−33 −1.8088561626e−29  C117 x² y¹² 6.6819054285e−34 −6.9621580245e−34  1.1440685620e−29 C119 y¹⁴ −3.5064119783e−34  −1.6134424158e−34  1.6768844411e−29 C121 x¹⁴ y 0.0000000000e+00 0.0000000000e+00 −1.5031466721e−35  C123 x¹² y³ 0.0000000000e+00 0.0000000000e+00 −1.5333652789e−34  C125 x¹⁰ y⁵ 0.0000000000e+00 0.0000000000e+00 −7.4197129558e−34  C127 x⁸ y⁷ 0.0000000000e+00 0.0000000000e+00 −1.4371629320e−32  C129 x⁶ y⁹ 0.0000000000e+00 0.0000000000e+00 7.5730704720e−33 C131 x⁴ y¹¹ 0.0000000000e+00 0.0000000000e+00 −4.9623581427e−32  C133 x² y¹³ 0.0000000000e+00 0.0000000000e+00 −1.4614401268e−31  C135 y¹⁵ 0.0000000000e+00 0.0000000000e+00 4.1497470940e−32 C136 x¹⁶ 0.0000000000e+00 0.0000000000e+00 1.1978990101e−38 C138 x¹⁴ y² 0.0000000000e+00 0.0000000000e+00 2.9811413328e−37 C140 x¹² y⁴ 0.0000000000e+00 0.0000000000e+00 1.2007310585e−36 C142 x¹⁰ y⁶ 0.0000000000e+00 0.0000000000e+00 3.6215428098e−35 C144 x⁸ y⁸ 0.0000000000e+00 0.0000000000e+00 8.6906021090e−35 C146 x⁶ y¹⁰ 0.0000000000e+00 0.0000000000e+00 3.8825048132e−34 C148 x⁴ y¹² 0.0000000000e+00 0.0000000000e+00 9.0244514726e−34 C150 x² y¹⁴ 0.0000000000e+00 0.0000000000e+00 −5.5278112099e−34  C152 y¹⁶ 0.0000000000e+00 0.0000000000e+00 −5.4323248483e−34  Coefficient Formula M10 C7 x² y  2.0115417809e−08 C9 y³ −1.9492426731e−09 C10 x⁴ −2.3863017328e−11 C12 x² y² −7.7247982404e−11 C14 y⁴ −2.4972155007e−11 C16 x⁴ y  4.9503013433e−14 C18 x² y³  3.1738294986e−14 C20 y⁵ −4.2932210182e−15 C21 x⁶ −6.0868711248e−17 C23 x⁴ y² −2.6186718211e−16 C25 x² y⁴ −2.5638585875e−16 C27 y⁶ −5.8772984219e−17 C29 x⁶ y  9.7363306861e−20 C31 x⁴ y³  1.5153722933e−19 C33 x² y⁵  5.5510825507e−20 C35 y⁷ −7.1233621350e−22 C36 x⁸ −1.3159498325e−22 C38 x⁶ y² −7.0826089433e−22 C40 x⁴ y⁴ −1.1360756639e−21 C42 x² y⁶ −7.0900935248e−22 C44 y⁸ −1.5258853719e−22 C46 x⁸ y  1.6999506260e−25 C48 x⁶ y³  4.5633184594e−25 C50 x⁴ y⁵  3.9940827528e−25 C52 x² y⁷  1.2816230270e−25 C54 y⁹ −9.8515757187e−27 C55 x¹⁰ −2.4461536382e−28 C57 x⁸ y² −1.5437461375e−27 C59 x⁶ y⁴ −3.3990755916e−27 C61 x⁴ y⁶ −3.4398418309e−27 C63 x² y⁸ −1.5909821813e−27 C65 y¹⁰ −3.1804493684e−28 C67 x¹⁰ y  4.7680153661e−31 C69 x⁸ y³  1.8766627312e−30 C71 x⁶ y⁵  2.8172563479e−30 C73 x⁴ y⁷  1.8703803233e−30 C75 x² y⁹  4.0466814460e−31 C77 y¹¹ −3.5616206880e−33 C78 x¹² −7.5470116009e−34 C80 x¹⁰ y² −6.1815024869e−33 C82 x⁸ y⁴ −1.7879302804e−32 C84 x⁶ y⁶ −2.6471378197e−32 C86 x⁴ y⁸ −2.0802846735e−32 C88 x² y¹⁰ −9.1147276835e−33 C90 y¹² −1.0461964574e−33 C92 x¹² y −6.5220858880e−38 C94 x¹⁰ y³ −1.6509323690e−36 C96 x⁸ y⁵ −4.1100204291e−36 C98 x⁶ y⁷ −5.4615310788e−36 C100 x⁴ y⁹ −2.7775905138e−36 C102 x² y¹¹ −1.3900256135e−36 C104 y¹³ −1.5840741423e−37 C105 x¹⁴  5.3358470580e−40 C107 x¹² y²  7.5697455749e−39 C109 x¹⁰ y⁴  2.5683192184e−38 C111 x⁸ y⁶  5.6562840713e−38 C113 x⁶ y⁸  6.7249675134e−38 C115 x⁴ y¹⁰  4.3595848549e−38 C117 x² y¹²  1.9003711694e−38 C119 y¹⁴  2.1382341233e−39 C121 x¹⁴ y  4.1220157045e−42 C123 x¹² y³  3.0333612772e−41 C125 x¹⁰ y⁵  7.8359674052e−41 C127 x⁸ y⁷  1.0863471355e−40 C129 x⁶ y⁹  8.6970617349e−41 C131 x⁴ y¹¹  3.3521897751e−41 C133 x² y¹³  7.2064793018e−42 C135 y¹⁵  1.2943742130e−42 C136 x¹⁶ −7.5169925607e−45 C138 x¹⁴ y² −7.8999062924e−44 C140 x¹² y⁴ −3.1638004523e−43 C142 x¹⁰ y⁶ −7.2574537450e−43 C144 x⁸ y⁸ −1.0303716216e−42 C146 x⁶ y¹⁰ −8.8567924280e−43 C148 x⁴ y¹² −4.5870199651e−43 C150 x² y¹⁴ −1.3861322359e−43 C152 y¹⁶ −1.5266451319e−44

TABLE 30 for projection optical unit 700 of FIG. 7A: Coordinates of the stop edge x_(i) [mm] y_(i) [mm] x_(i+N/2) [mm] y_(1+N/2) [mm] −204.646808 19.983783 204.514621 11.917218 −204.516985 24.007112 204.253004 7.878967 −204.256502 28.020507 203.861511 3.840747 −203.865482 32.021518 203.340653 −0.194919 −203.344174 36.007713 202.691064 −4.225504 −202.692956 39.976687 201.913497 −8.248475 −201.912328 43.926054 201.008825 −12.261298 −201.002916 47.853458 199.978031 −16.261438 −199.965464 51.756568 198.822213 −20.246362 −198.800835 55.633086 197.542571 −24.213542 −197.510008 59.480740 196.140410 −28.160458 −196.094073 63.297293 194.617129 −32.084597 −194.554226 67.080538 192.974223 −35.983459 −192.891768 70.828305 191.213270 −39.854555 −191.108102 74.538453 189.335933 −43.695414 −189.204723 78.208883 187.343951 −47.503578 −187.183219 81.837525 185.239135 −51.276611 −185.045263 85.422349 183.023360 −55.012096 −182.792611 88.961360 180.698565 −58.707638 −180.427096 92.452600 178.266742 −62.360866 −177.950624 95.894148 175.729936 −65.969435 −175.365168 99.284119 173.090237 −69.531026 −172.672766 102.620668 170.349776 −73.043349 −169.875514 105.901983 167.510725 −76.504144 −166.975565 109.126294 164.575283 −79.911183 −163.975121 112.291868 161.545685 −83.262269 −160.876433 115.397007 158.424187 −86.555242 −157.681794 118.440054 155.213071 −89.787977 −154.393538 121.419390 151.914637 −92.958386 −151.014034 124.333434 148.531203 −96.064420 −147.545686 127.180644 145.065103 −99.104069 −143.990927 129.959518 141.518683 −102.075367 −140.352218 132.668592 137.894299 −104.976388 −136.632043 135.306442 134.194319 −107.805250 −132.832910 137.871684 130.421119 −110.560119 −128.957348 140.362974 126.577081 −113.239203 −125.007901 142.779010 122.664594 −115.840762 −120.987130 145.118527 118.686053 −118.363100 −116.897611 147.380305 114.643858 −120.804575 −112.741932 149.563162 110.540412 −123.163592 −108.522692 151.665958 106.378125 −125.438610 −104.242499 153.687596 102.159408 −127.628140 −99.903970 155.627019 97.886678 −129.730747 −95.509729 157.483214 93.562355 −131.745052 −91.062407 159.255208 89.188863 −133.669731 −86.564639 160.942072 84.768629 −135.503517 −82.019066 162.542920 80.304083 −137.245201 −77.428332 164.056910 75.797661 −138.893633 −72.795084 165.483242 71.251800 −140.447724 −68.121973 166.821162 66.668943 −141.906446 −63.411650 168.069961 62.051535 −143.268830 −58.666771 169.228972 57.402025 −144.533973 −53.889989 170.297578 52.722866 −145.701034 −49.083962 171.275207 48.016516 −146.769237 −44.251347 172.161333 43.285432 −147.737870 −39.394802 172.955479 38.532080 −148.606287 −34.516985 173.657215 33.758924 −149.373908 −29.620554 174.266162 28.968433 −150.040221 −24.708170 174.781987 24.163079 −150.604781 −19.782490 175.204412 19.345336 −151.067210 −14.846175 175.533204 14.517679 −151.427199 −9.901881 175.768184 9.682585 −151.684506 −4.952270 175.909223 4.842532 −151.838959 0.000000 175.956245 0.000000 −151.890455 4.952270 175.909223 −4.842532 −151.838959 9.901881 175.768184 −9.682585 −151.684506 14.846175 175.533204 −14.517679 −151.427199 19.782490 175.204412 −19.345336 −151.067210 24.708170 174.781987 −24.163079 −150.604781 29.620554 174.266162 −28.968433 −150.040221 34.516985 173.657215 −33.758924 −149.373908 39.394802 172.955479 −38.532080 −148.606287 44.251347 172.161333 −43.285432 −147.737870 49.083962 171.275207 −48.016516 −146.769237 53.889989 170.297578 −52.722866 −145.701034 58.666771 169.228972 −57.402025 −144.533973 63.411650 168.069961 −62.051535 −143.268830 68.121973 166.821162 −66.668943 −141.906446 72.795084 165.483242 −71.251800 −140.447724 77.428332 164.056910 −75.797661 −138.893633 82.019066 162.542920 −80.304083 −137.245201 86.564639 160.942072 −84.768629 −135.503517 91.062407 159.255208 −89.188863 −133.669731 95.509729 157.483214 −93.562355 −131.745052 99.903970 155.627019 −97.886678 −129.730747 104.242499 153.687596 −102.159408 −127.628140 108.522692 151.665958 −106.378125 −125.438610 112.741932 149.563162 −110.540412 −123.163592 116.897611 147.380305 −114.643858 −120.804575 120.987130 145.118527 −118.686053 −118.363100 125.007901 142.779010 −122.664594 −115.840762 128.957348 140.362974 −126.577081 −113.239203 132.832910 137.871684 −130.421119 −110.560119 136.632043 135.306442 −134.194319 −107.805250 140.352218 132.668592 −137.894299 −104.976388 143.990927 129.959518 −141.518683 −102.075367 147.545686 127.180644 −145.065103 −99.104069 151.014034 124.333434 −148.531203 −96.064420 154.393538 121.419390 −151.914637 −92.958386 157.681794 118.440054 −155.213071 −89.787977 160.876433 115.397007 −158.424187 −86.555242 163.975121 112.291868 −161.545685 −83.262269 166.975565 109.126294 −164.575283 −79.911183 169.875514 105.901983 −167.510725 −76.504144 172.672766 102.620668 −170.349776 −73.043349 175.365168 99.284119 −173.090237 −69.531026 177.950624 95.894148 −175.729936 −65.969435 180.427096 92.452600 −178.266742 −62.360866 182.792611 88.961360 −180.698565 −58.707638 185.045263 85.422349 −183.023360 −55.012096 187.183219 81.837525 −185.239135 −51.276611 189.204723 78.208883 −187.343951 −47.503578 191.108102 74.538453 −189.335933 −43.695414 192.891768 70.828305 −191.213270 −39.854555 194.554226 67.080538 −192.974223 −35.983459 196.094073 63.297293 −194.617129 −32.084597 197.510008 59.480740 −196.140410 −28.160458 198.800835 55.633086 −197.542571 −24.213542 199.965464 51.756568 −198.822213 −20.246362 201.002916 47.853458 −199.978031 −16.261438 201.912328 43.926054 −201.008825 −12.261298 202.692956 39.976687 −201.913497 −8.248475 203.344174 36.007713 −202.691064 −4.225504 203.865482 32.021518 −203.340653 −0.194919 204.256502 28.020507 −203.861511 3.840747 204.516985 24.007112 −204.253004 7.878967 204.646808 19.983783 −204.514621 11.917218

Design Data for FIG. 8A

TABLE 31 for projection optical unit 800 of FIG. 8A: Numerical Aperture 0.55 Magnification in x-direction 0.250 Magnification in y- direction 0.125 Chief Ray angle 5.33° Wavelength 13.5 nm Image field size in x-direction 26.0 mm Image field size in y-direction 1.2 mm Average Wavefront-RMS 8.31 m&lambda

TABLE 32 for projection optical unit 800 of FIG. 8A: Radii of Surfaces Radius_(x) Power_(x) Radius_(y) Power_(y) [mm] [1/mm] [mm] [1/mm] M01 −2353.18509077 0.00081338 −1470.03122685 0.00130204 M02 1973.67515594 −0.00008112 −62745.91223364 0.00000255 M03 10608.88422849 −0.00005041 −5533.72094487 0.00009665 M04 −2760.08940756 0.00071064 −1836.32252129 0.00106812 M05 14583.85631299 −0.00002569 −27412.76998179 0.00001367 M06 −2014421.56157814 0.00000011 −20309.33883668 0.00001095 M07 1143.83203545 −0.00173045 447.76549633 −0.00442049 M08 −796.21541131 0.00247560 −742.49157078 0.00265473

TABLE 33 for projection optical unit 800 of FIG. 8A: Decentring (location, angle) of surfaces D_(x) [mm] D_(y) [mm] D_(z) [mm] Reticle 0.000000000 0.000000000 0.000000000 M01 0.000000000 144.250856906 1540.361338792 M02 0.000000000 537.764444131 713.151288989 M03 0.000000000 1111.209624162 258.338414196 M04 0.000000000 2890.190949188 −197.396822696 M05 0.000000000 2111.271259947 484.707360267 M06 0.000000000 1856.703416123 893.470451342 M07 0.000000000 1515.941078855 2002.463804120 Stop 0.000000000 1557.785521731 1869.222397640 M08 0.000000000 1693.863965847 1435.920337926 Wafer 0.000000000 1693.884277930 2122.838786550 α_(x) [°] α_(y) [°] α_(z) [°] Reticle 0.000000000 0.000000000 0.000000000 M01 10.045493065 0.000000000 0.000000000 M02 −51.488888806 180.000000000 0.000000000 M03 153.606174816 0.000000000 0.000000000 M04 62.211151880 180.000000000 0.000000000 M05 130.352425781 0.000000000 0.000000000 M06 −65.502812866 180.000000000 0.000000000 M07 17.257801350 0.000000000 0.000000000 Stop 1.421814519 180.000000000 0.000000000 M08 8.716596932 180.000000000 0.000000000 Wafer −0.001694228 0.000000000 0.000000000

TABLE 34 for projection optical unit 800 of FIG. 8A: Free form coefficients of surfaces Coefficient Formular M01 M02 M03 C7 x² y −4.0059115432e−10  −9.8528583278e−08  9.3248417733e−08 C9 y³ 8.0891942530e−08 1.1407247884e−07 −4.6461617193e−08  C10 x⁴ 4.5770816360e−11 1.1868269127e−10 −4.7808433532e−11  C12 x² y² 8.2295384818e−12 1.1070170122e−10 4.8189922001e−11 C14 y⁴ −1.8350188196e−10  1.1018643928e−10 1.2323628994e−11 C16 x⁴ y −3.6219008934e−14  −4.4012064098e−13  1.1580527310e−14 C18 x² y³ 1.1681748470e−14 −2.2401658495e−13  −6.2005641805e−14  C20 y⁵ 6.2180029449e−13 7.0596277061e−13 1.4706857502e−15 C21 x⁶ 1.1434401190e−16 3.6695339472e−16 −1.9191867545e−16  C23 x⁴ y² 1.0582989016e−16 8.7401337330e−16 1.2736606516e−16 C25 x² y⁴ 5.0780683478e−16 1.7626183018e−15 −4.6256015537e−17  C27 y⁶ −4.5012373355e−16  3.4628444607e−15 −1.6603773327e−17  C29 x⁶ y −1.8359959429e−20  −2.3929592888e−18  −2.7021060026e−19  C31 x⁴ y³ 8.1671738729e−19 −3.1545270438e−18  5.4842627744e−20 C33 x² y 2.3098734113e−18 4.2005939739e−18 1.4333668261e−19 C35 y⁷ −5.2926669704e−18  1.4604003879e−17 −4.7255473589e−19  C36 x⁸ 1.0853196021e−22 5.6900373647e−22 −4.4029034743e−22  C38 x⁶ y² 1.3181829294e−22 8.2580698255e−21 1.1002380446e−22 C40 x⁴ y⁴ −1.3153803835e−21  1.9181618509e−20 1.3308049519e−21 C42 x² y⁶ −4.6497279103e−20  5.4777484320e−20 5.1804538976e−21 C44 y⁸ 2.5690758849e−20 −1.3840049968e−20  2.0900767760e−21 C46 x⁸ y −3.4095970425e−25  5.4298483306e−25 1.2803679480e−24 C48 x⁶ y³ 2.8980061492e−24 −2.8475885603e−23  2.4068351043e−24 C50 x⁴ y⁵ −3.1884737678e−23  4.0972457476e−23 −1.6837816672e−23  C52 x² y⁷ 1.5927653638e−22 1.5805113802e−22 −2.3059492478e−23  C54 y⁹ 1.2758741377e−21 3.1764095019e−23 1.9220197963e−23 C55 x¹⁰ −2.8940432267e−27  1.9718691754e−26 −8.6587256497e−28  C57 x⁸ y² −1.2208056467e−26  −8.1603235819e−27  −2.5566299695e−27  C59 x⁶ y⁴ −6.1925309190e−26  4.6823503098e−26 −3.5941582470e−26  C61 x⁴ y⁶ 1.1601214200e−24 −5.2400290798e−25  −1.9264105284e−25  C63 x² y⁸ 9.3676039663e−24 −1.5226726600e−25  −3.3733862125e−25  C65 y¹⁰ −8.7051841220e−24  3.6907239073e−24 1.8925582853e−26 C67 x¹⁰ y 2.3822614711e−29 −5.8111373527e−28  −6.8667735759e−29  C69 x⁸ y³ 1.0560337414e−28 3.2596790860e−28 −2.3460880089e−28  C71 x⁶ y⁵ 1.3411467126e−27 5.6096350577e−28 4.6880475961e−28 C73 x⁴ y⁷ 1.6456911379e−26 −1.3015042016e−27  2.5906776270e−27 C75 x² y⁹ −3.7678617268e−26  1.6875519917e−27 1.4463995091e−27 C77 y¹¹ −2.9743688452e−26  7.0215865076e−27 −2.3598964024e−28  C78 x¹² 9.0841031766e−32 1.7180455603e−31 −3.7509134857e−32  C80 x¹⁰ y² −1.8892283096e−31  2.4641923146e−30 1.0177203436e−31 C82 x⁸ y⁴ −1.2831073321e−30  −8.0974837835e−30  2.1153324820e−31 C84 x⁶ y⁶ −3.1009569686e−29  1.0269953073e−29 1.1627056886e−30 C86 x⁴ y⁸ −4.8800952567e−28  7.2340581188e−29 7.0657535618e−30 C88 x² y¹⁰ −1.2769264338e−27  1.1956773634e−29 8.1814313771e−30 C90 y¹² −6.8754493558e−29  −1.5742324181e−28  −1.0316174859e−30  C92 x¹² y −1.1855488031e−34  2.6530873612e−33 1.1608434431e−33 C94 x¹⁰ y³ −5.4978309788e−34  −5.1689425063e−32  8.4156544481e−33 C96 x⁸ y⁵ −1.9677252877e−32  −1.3246789175e−31  5.3144989301e−33 C98 x⁶ y⁷ −5.3522978021e−31  1.9403962249e−32 −6.6107727823e−32  C100 x⁴ y⁹ −2.1037340536e−30  1.2888890214e−31 −1.5189848556e−31  C102 x² y¹¹ 1.6688213938e−30 −2.2060381328e−31  −5.9684058237e−32  C104 y¹³ −4.1919512816e−31  −6.9648658312e−31  −6.0780204645e−33  C105 x¹⁴ −1.8742111910e−36  −1.5003321055e−36  5.6338285471e−37 C107 x¹² y² 1.4744630615e−35 1.4937493894e−35 −4.6926353832e−36  C109 x¹⁰ y⁴ 1.6686659334e−34 6.1699104316e−34 −1.9290028848e−35  C111 x⁸ y⁶ 9.4753648641e−34 1.0890964059e−33 4.4393595579e−35 C113 x⁶ y⁸ 1.0514591645e−32 −6.9914282998e−34  2.2665511078e−34 C115 x⁴ y¹⁰ 6.7563863426e−32 −2.4147929226e−33  2.6532701632e−34 C117 x² y¹² 1.1220705917e−31 −4.0082035413e−35  1.1202324904e−34 C119 y¹⁴ 5.2085265740e−32 2.6780470616e−33 4.6859995368e−35 C121 x¹⁴ y −1.3947646746e−40  2.7774551451e−38 −7.6982725707e−39  C123 x¹² y³ 2.9296158199e−38 7.6228824658e−37 −9.2787098007e−38  C125 x¹⁰ y⁵ 4.8191101824e−37 2.7288430253e−36 −2.9227582708e−37  C127 x⁸ y⁷ 9.0670418741e−36 2.1686657873e−36 3.0203052634e−38 C129 x⁶ y⁹ 6.3392016100e−35 −2.5666915297e−36  9.8756213195e−37 C131 x⁴ y¹¹ 1.2433426620e−34 −1.3845057146e−36  1.6094176155e−36 C133 x² y¹³ 7.8364413621e−35 1.1508245987e−35 −8.5765691800e−38  C135 y¹⁵ 3.9737051436e−35 2.3727067782e−35 5.8634324230e−38 C136 x¹⁶ 2.1285708898e−41 −4.7054301707e−41  −9.0534848836e−43  C138 x¹⁴ y² −2.8266412852e−40  −5.3827998165e−40  5.9026980261e−41 C140 x¹² y⁴ −4.7042590614e−39  −9.0887430351e−39  5.1826993972e−40 C142 x¹⁰ y⁶ −2.7238388339e−38  −2.5249046217e−38  6.9364957107e−40 C144 x⁸ y⁸ −1.7860515111e−37  −1.4827259485e−38  −1.2021253960e−39  C146 x⁶ y¹⁰ −1.1508803951e−36  1.7772089728e−38 −4.2042066603e−39  C148 x⁴ y¹² −4.3393286484e−36  4.0559254915e−38 −4.5024586738e−39  C150 x² y¹⁴ −5.8611110830e−36  3.4728240415e−38 1.1021391008e−40 C152 y¹⁶ −3.3892195998e−36  4.3296212582e−38 −3.6958714935e−40  C154 x¹⁶ y −1.2925036159e−45  0.0000000000e+00 0.0000000000e+00 C156 x¹⁴ y³ −4.4714287160e−43  0.0000000000e+00 0.0000000000e+00 C158 x¹² y⁵ −6.1712733275e−42  0.0000000000e+00 0.0000000000e+00 C160 x¹⁰ y⁷ −8.5453128697e−41  0.0000000000e+00 0.0000000000e+00 C162 x⁸ y⁹ −5.1333868087e−40  0.0000000000e+00 0.0000000000e+00 C164 x⁶ y¹¹ −2.3908219552e−39  0.0000000000e+00 0.0000000000e+00 C166 x⁴ y¹³ −1.7517425140e−39  0.0000000000e+00 0.0000000000e+00 C168 x² y¹⁵ −7.3130392854e−39  0.0000000000e+00 0.0000000000e+00 C170 y¹⁷ 3.6471651065e−39 0.0000000000e+00 0.0000000000e+00 C171 x¹⁸ −9.7570230254e−47  0.0000000000e+00 0.0000000000e+00 C173 x¹⁶ y² 1.7253794975e−45 0.0000000000e+00 0.0000000000e+00 C175 x¹⁴ y⁴ 3.9252476863e−44 0.0000000000e+00 0.0000000000e+00 C177 x¹² y⁶ 2.8356820694e−43 0.0000000000e+00 0.0000000000e+00 C179 x¹⁰ y⁸ 1.6315336561e−42 0.0000000000e+00 0.0000000000e+00 C181 x⁸ y¹⁰ 8.8647907278e−42 0.0000000000e+00 0.0000000000e+00 C183 x⁶ y¹² 4.1606048151e−41 0.0000000000e+00 0.0000000000e+00 C185 x⁴ y¹⁴ 9.7787962384e−41 0.0000000000e+00 0.0000000000e+00 C187 x² y¹⁶ 1.4659596257e−40 0.0000000000e+00 0.0000000000e+00 C189 y¹⁸ 4.5429779474e−41 0.0000000000e+00 0.0000000000e+00 Coefficient Formular M04 M05 M06 C7 x² y  4.2976128008e−09 −8.4721247266e−08  3.2559812326e−08 C9 y³  1.6399728434e−07 −1.9350411901e−08  −1.8491510018e−08  C10 x⁴  7.5477922263e−13 2.6263100265e−12 6.1496968703e−11 C12 x² y²  1.9030164590e−11 −1.1582036123e−10  −2.7929091473e−11  C14 y⁴ −4.4816461964e−10 5.8552323513e−11 −3.9058953587e−11  C16 x⁴ y  7.1415669162e−15 2.8379754825e−16 1.6540377106e−14 C18 x² y³ −7.8222159788e−15 −1.3332039251e−13  −5.8669388442e−14  C20 y⁵  1.3607541627e−12 2.1423774057e−13 −8.8401079945e−14  C21 x⁶  1.5724050029e−18 −1.6956474433e−16  −1.0547082495e−15  C23 x⁴ y² −5.7690175797e−18 3.6535111096e−17 −3.6115132158e−16  C25 x² y⁴ −1.1605397348e−17 −3.4552540902e−16  −3.2208239930e−16  C27 y⁶ −2.8288275301e−15 6.6902997154e−16 −1.2511715438e−16  C29 x⁶ y  5.1337391035e−21 −1.5095081092e−18  −3.6422935048e−17  C31 x⁴ y³  4.0692212644e−20 −4.8461035153e−19  −1.0032921889e−18  C33 x² y  2.3849423414e−18 −1.4719760677e−18  −5.5535732062e−19  C35 y⁷  2.2876004513e−18 1.7965603386e−18 −8.0931363711e−20  C36 x⁸  1.5427191208e−24 −4.6734351121e−21  2.5218548097e−19 C38 x⁶ y² −4.8329271920e−23 −8.0787879400e−21  1.9321765511e−19 C40 x⁴ y⁴ −6.6176392110e−22 3.7375381514e−21 1.3233786672e−20 C42 x² y⁶ −9.3808675869e−21 −6.5688435878e−21  1.6808564734e−21 C44 y⁸  5.9741515849e−19 6.8873405681e−21 −3.1240882156e−21  C46 x⁸ y −4.0180795691e−26 1.1342724045e−23 3.0864397333e−20 C48 x⁶ y³ −1.7011816597e−24 5.7689726822e−23 −2.7658496333e−22  C50 x⁴ y⁵ −1.4983857203e−23 7.2740796822e−23 1.3128634371e−22 C52 x² y⁷  1.4226500274e−22 −1.3400063282e−23  1.7136973176e−24 C54 y⁹ −3.8435800315e−21 1.3258785709e−22 −1.7933288366e−23  C55 x¹⁰  1.9858556431e−29 1.2766086903e−25 −1.9706712299e−22  C57 x⁸ y²  5.2508811113e−28 7.6951828924e−25 −1.0170431589e−22  C59 x⁶ y⁴  2.1984385954e−26 4.6402289184e−25 −8.4357039958e−24  C61 x⁴ y⁶  2.9174164467e−25 −1.4598383159e−25  2.6874112292e−25 C63 x² y⁸ −4.8450497710e−24 3.2852643857e−25 −7.3534405345e−26  C65 y¹⁰ −9.1999124033e−23 1.1420183220e−24 2.4609028572e−26 C67 x¹⁰ y  5.5197836208e−31 1.1931849928e−27 −1.3767613643e−23  C69 x⁸ y³  4.3225638935e−29 1.5945256288e−27 2.6617314077e−25 C71 x⁶ y⁵  7.3371605266e−28 −4.6095257248e−27  −4.6728851084e−26  C73 x⁴ y⁷  3.0182344874e−27 −5.1467873298e−27  −1.1460185058e−27  C75 x² y⁹ −1.2473989454e−26 2.0389267256e−27 −2.0007382256e−28  C77 y¹¹  9.2555180421e−25 −1.7445301156e−28  6.0479928643e−28 C78 x¹² −2.6949571260e−34 −3.6954090523e−30  9.2196674509e−26 C80 x¹⁰ y² −2.5214037132e−33 −2.9716068254e−29  3.6256501908e−26 C82 x⁸ y⁴ −1.5424497393e−31 −3.7997478028e−29  4.5540652048e−27 C84 x⁶ y⁶ −5.8653002683e−30 −2.5152039288e−29  −3.4869248731e−28  C86 x⁴ y⁸ −5.6787910670e−29 −9.8033561171e−30  8.1484624125e−30 C88 x² y¹⁰  8.7426444451e−28 −1.7612913184e−29  1.4552154751e−30 C90 y¹²  8.7178688186e−27 −6.6031561170e−29  2.7807446305e−30 C92 x¹² y −4.9486290336e−36 −9.0229807336e−32  3.0160477707e−27 C94 x¹⁰ y³ −5.6109539293e−34 −2.9455415390e−31  −7.0573180575e−29  C96 x⁸ y⁵ −1.4675191908e−32 −9.4408810960e−32  1.5460209155e−29 C98 x⁶ y⁷ −1.2443693800e−31 2.7819608974e−31 −1.5751489916e−30  C100 x⁴ y⁹ −4.2679832736e−31 1.3465219616e−31 1.3828126962e−31 C102 x² y¹¹ −3.0062505961e−31 −2.5305117513e−31  1.0563656730e−32 C104 y¹³ −1.2817122333e−28 −4.9044875249e−31  6.7092305744e−33 C105 x¹⁴  2.8100623101e−39 7.5744804666e−35 −2.0772264830e−29  C107 x¹² y² −1.3111378826e−38 2.3395431083e−35 −8.1647876933e−30  C109 x¹⁰ y⁴ −1.6326631935e−36 −2.2358998140e−34  −8.7452658144e−31  C111 x⁸ y⁶  1.7859581533e−35 8.0857524485e−34 6.0189071070e−32 C113 x⁶ y⁸  8.3048777075e−34 2.7587702950e−33 −3.1984547552e−33  C115 x⁴ y¹⁰  6.2176098172e−33 7.2147714905e−34 5.6881749232e−34 C117 x² y¹² −8.0286447187e−32 −1.1786600241e−33  2.7996729050e−35 C119 y¹⁴ −3.7568917952e−31 −1.7175006116e−33  9.3565076415e−36 C121 x¹⁴ y  2.2746406372e−41 1.6722560947e−36 −2.5223142310e−31  C123 x¹² y³  3.6348346328e−39 5.2381577828e−36 4.0996325606e−33 C125 x¹⁰ y⁵  1.3730079748e−37 1.1629843985e−36 −1.3816318235e−33  C127 x⁸ y⁷  1.6840494545e−36 4.5693363911e−36 1.9271121788e−34 C129 x⁶ y⁹  9.4427974322e−36 8.6668275684e−36 −2.8932760638e−36  C131 x⁴ y¹¹  3.7666987798e−35 1.1179085609e−36 9.8981996853e−37 C133 x² y¹³  1.3180785553e−34 −2.4846452556e−36  3.4922519339e−38 C135 y¹⁵  9.6952465355e−33 −3.0668577167e−36  7.1474857753e−39 C136 x¹⁶ −1.8523929465e−44 −5.3366426688e−40  1.7245149977e−33 C138 x¹⁴ y²  1.4815100640e−43 1.0320329665e−38 8.5926964041e−34 C140 x¹² y⁴  2.9886202644e−41 9.3911039809e−39 3.2057415698e−35 C142 x¹⁰ y⁶  4.8419727330e−40 1.1855251021e−39 4.6610701628e−38 C144 x⁸ y⁸ −1.2249331147e−39 6.9915920999e−39 2.1059697474e−37 C146 x⁶ y¹⁰ −6.3176565026e−38 9.4498033079e−39 −1.0794967322e−39  C148 x⁴ y¹² −4.2770877313e−37 2.2401449304e−40 6.4146236782e−40 C150 x² y¹⁴  3.2302040197e−36 −1.9892807033e−39  1.7092370308e−41 C152 y¹⁶ −1.2369634335e−35 −2.2556737669e−39  2.3201040390e−42 C154 x¹⁶ y −3.9204698077e−47 0.0000000000e+00 0.0000000000e+00 C156 x¹⁴ y³ −8.8689687444e−45 0.0000000000e+00 0.0000000000e+00 C158 x¹² y⁵ −4.7424409364e−43 0.0000000000e+00 0.0000000000e+00 C160 x¹⁰ y⁷ −8.2835386400e−42 0.0000000000e+00 0.0000000000e+00 C162 x⁸ y⁹ −6.0038203718e−41 0.0000000000e+00 0.0000000000e+00 C164 x⁶ y¹¹ −3.0426219154e−40 0.0000000000e+00 0.0000000000e+00 C166 x⁴ y¹³ −1.4967652886e−39 0.0000000000e+00 0.0000000000e+00 C168 x² y¹⁵ −8.6261859587e−39 0.0000000000e+00 0.0000000000e+00 C170 y¹⁷ −2.8663519501e−37 0.0000000000e+00 0.0000000000e+00 C171 x¹⁸  4.9500422895e−50 0.0000000000e+00 0.0000000000e+00 C173 x¹⁶ y² −2.6676630911e−49 0.0000000000e+00 0.0000000000e+00 C175 x¹⁴ y⁴ −1.1628501361e−46 0.0000000000e+00 0.0000000000e+00 C177 x¹² y⁶ −3.4080983750e−45 0.0000000000e+00 0.0000000000e+00 C179 x¹⁰ y⁸ −2.9678397842e−44 0.0000000000e+00 0.0000000000e+00 C181 x⁸ y¹⁰  7.8803192184e−44 0.0000000000e+00 0.0000000000e+00 C183 x⁶ y¹²  2.1039763373e−42 0.0000000000e+00 0.0000000000e+00 C185 x⁴ y¹⁴  1.4107255693e−41 0.0000000000e+00 0.0000000000e+00 C187 x² y¹⁶ −1.6619154849e−41 0.0000000000e+00 0.0000000000e+00 C189 y¹⁸  1.0923192488e−39 0.0000000000e+00 0.0000000000e+00 Coefficient Formular M07 M08 C7 x² y −1.5543693630e−06   2.4103020012e−08 C9 y³ −1.0737073011e−06   6.1769280966e−09 C10 x⁴ 1.5568619090e−09 −2.9108003221e−11 C12 x² y² 7.7231086542e−09 −7.6772118406e−11 C14 y⁴ 7.6755963510e−09 −3.8588343897e−11 C16 x⁴ y −1.0236346382e−11   4.2763149173e−14 C18 x² y³ −3.3692865233e−11   6.0148866826e−14 C20 y⁵ −1.9945434920e−11   1.5974446510e−14 C21 x⁶ 7.3020823490e−15 −5.6598045628e−17 C23 x⁴ y² 8.5867803799e−14 −2.0795247703e−16 C25 x² y⁴ 1.9452636563e−13 −2.3170200348e−16 C27 y⁶ 1.7982120989e−13 −8.8202856878e−17 C29 x⁶ y −9.3305728924e−17   7.0591601997e−20 C31 x⁴ y³ −5.7960281555e−16   1.7494039912e−19 C33 x² y⁵ −1.1000790009e−15   1.2909943186e−19 C35 y⁷ −4.6008853587e−16   2.1810900643e−20 C36 x⁸ 5.4342574101e−20 −9.4170252704e−23 C38 x⁶ y² 1.0392494090e−18 −4.5827851146e−22 C40 x⁴ y⁴ 4.3986512828e−18 −7.8371974930e−22 C42 x² y⁶ 7.6513245026e−18 −6.2169501356e−22 C44 y⁸ 3.2599798561e−18 −1.5044359069e−22 C46 x⁸ y −8.9100470789e−22   1.1749302257e−25 C48 x⁶ y³ −9.3980821951e−21   4.2113135902e−25 C50 x⁴ y⁵ −3.2593595273e−20   4.9662321789e−25 C52 x² y⁷ −4.0957128868e−20   2.7863533945e−25 C54 y⁹ −2.8670488876e−20   7.0393438493e−26 C55 x¹⁰ 5.8040655545e−25 −1.7680202369e−28 C57 x⁸ y² 1.4219977408e−23 −1.0528490090e−27 C59 x⁶ y⁴ 8.6975706852e−23 −2.3978487001e−27 C61 x⁴ y⁶ 1.9532521221e−22 −2.5997215751e−27 C63 x² y⁸ 1.1136271310e−22 −1.1785238811e−27 C65 y¹⁰ 3.2279082977e−22 −3.4230665177e−28 C67 x¹⁰ y −1.8887082592e−26   2.1811796914e−31 C69 x⁸ y³ −2.0696463615e−25   8.6773238689e−31 C71 x⁶ y⁵ −7.4626404354e−25   1.6587420220e−30 C73 x⁴ y⁷ −8.3801643630e−25   1.7758588650e−30 C75 x² y⁹ −2.8088505380e−25   4.8191768045e−31 C77 y¹¹ −8.7698133959e−25   2.4329776228e−31 C78 x¹² −1.0999078215e−30  −9.0886368951e−35 C80 x¹⁰ y² 1.9764717083e−28 −4.2538792169e−34 C82 x⁸ y⁴ 1.8284401583e−27 −1.2325632073e−33 C84 x⁶ y⁶ 9.4085348987e−27 −3.4797245150e−33 C86 x⁴ y⁸ 2.5572621660e−26 −5.6867848162e−33 C88 x² y¹⁰ 4.9111856328e−26 −4.5999915085e−33 C90 y¹² 2.5838514486e−27 −4.8182873417e−34 C92 x¹² y 2.2877422511e−31  5.3509148799e−37 C94 x¹⁰ y³ 1.6472011059e−30  3.5712174429e−36 C96 x⁸ y⁵ −1.1266338435e−29   6.7295415380e−36 C98 x⁶ y⁷ −1.1498992451e−28   4.5521755022e−36 C100 x⁴ y⁹ −3.7977718834e−28   6.5193257757e−38 C102 x² y¹¹ −4.9928062120e−28   3.0791652535e−36 C104 y¹³ −8.4950741805e−29  −5.2317697327e−37 C105 x¹⁴ 2.8594346904e−34 −1.5682511105e−39 C107 x¹² y² −1.2065391470e−33  −1.4324541281e−38 C109 x¹⁰ y⁴ 1.9042355621e−33 −5.2095750241e−38 C111 x⁸ y⁶ −2.0743409085e−32  −9.3255433895e−38 C113 x⁶ y⁸ −3.8777435449e−31  −8.4789602855e−38 C115 x⁴ y¹⁰ −1.0976016177e−30  −3.1566868276e−38 C117 x² y¹² −2.5471636403e−30  −2.2092444458e−40 C119 y¹⁴ −2.7123217883e−32  −3.4211959420e−40 C121 x¹⁴ y −1.1410098730e−35  −9.3595868924e−43 C123 x¹² y³ −2.1104396299e−34  −6.3207822622e−42 C125 x¹⁰ y⁵ −8.6716705420e−34  −1.2627019157e−41 C127 x⁸ y⁷ 1.3071876078e−33  2.9160014765e−42 C129 x⁶ y⁹ 1.7562153994e−32  1.8584133297e−41 C131 x⁴ y¹¹ 4.3325600631e−32  2.6485094631e−41 C133 x² y¹³ 4.0564313699e−32  2.5573606120e−42 C135 y¹⁵ −1.6568587771e−34   6.5970689238e−42 C136 x¹⁶ −4.8262692018e−39   3.6290990137e−45 C138 x¹⁴ y² 2.3988578901e−37  3.7910928570e−44 C140 x¹² y⁴ 2.6115505140e−36  1.6559616710e−43 C142 x¹⁰ y⁶ 1.2591162772e−35  3.7434301834e−43 C144 x⁸ y⁸ 3.2083597540e−35  4.5532463977e−43 C146 x⁶ y¹⁰ 6.0208760434e−35  2.9611756479e−43 C148 x⁴ y¹² 9.7852762241e−35  6.7485222868e−44 C150 x² y¹⁴ 1.8330012170e−34 −1.3280412846e−44 C152 y¹⁶ 1.0723637032e−34 −8.1860602572e−45 C154 x¹⁶ y 7.9245800701e−41  5.2362929884e−48 C156 x¹⁴ y³ 1.5073998009e−39  3.5554124054e−47 C158 x¹² y⁵ −2.7099890169e−40   1.1669546065e−46 C160 x¹⁰ y⁷ −1.0746964499e−37   1.7500249184e−46 C162 x⁸ y⁹ −8.1541868955e−37   1.7594384262e−46 C164 x⁶ y¹¹ −2.6934231610e−36   1.3083882133e−46 C166 x⁴ y¹³ −4.4256307603e−36   3.6145150726e−47 C168 x² y¹⁵ −3.5410439167e−36   1.1510616108e−47 C170 y¹⁷ −9.0790475418e−37  −1.2291396420e−47 C171 x¹⁸ 4.8997934907e−44 −8.3647085493e−51 C173 x¹⁶ y² −2.5639462991e−42  −9.9706804591e−50 C175 x¹⁴ y⁴ −2.6881775576e−41  −4.8484241552e−49 C177 x¹² y⁶ −6.5360388167e−41  −1.3173692320e−48 C179 x¹⁰ y⁸ 5.2584322264e−40 −2.1773359117e−48 C181 x⁸ y¹⁰ 4.3186506801e−39 −2.1765069762e−48 C183 x⁶ y¹² 1.2681371676e−38 −1.4035306109e−48 C185 x⁴ y¹⁴ 1.8089796604e−38 −5.4481956075e−49 C187 x² y¹⁶ 1.1406293050e−38 −1.1984484181e−49 C189 y¹⁸ 2.4634383811e−39  2.7120474752e−51

TABLE 35 for projection optical unit 800 of FIG. 8A: Coordinates of the stop edge x_(i) [mm] y_(i) [mm] x_(i+N/2) [mm] y_(i+N/2) [mm] −222.334185 7.352106 222.334185 7.352106 −221.396734 0.394465 222.962920 14.358886 −220.158646 −6.499245 223.276074 21.399499 −218.628044 −13.314266 223.269709 28.457417 −216.814638 −20.037350 222.940319 35.515934 −214.730220 −26.657228 222.285128 42.558369 −212.386722 −33.162766 221.305756 49.568217 −209.796103 −39.542910 220.005457 56.529033 −206.970898 −45.788633 218.387487 63.424375 −203.924262 −51.893056 216.455827 70.238099 −200.669377 −57.849405 214.218177 76.955599 −197.219362 −63.651172 211.683431 83.562761 −193.586816 −69.294028 208.860541 90.045537 −189.784089 −74.774698 205.760145 96.391723 −185.823525 −80.089913 202.394756 102.591166 −181.717039 −85.236957 198.776986 108.633820 −177.475135 −90.214904 194.919514 114.509825 −173.108034 −95.023188 190.835945 120.211807 −168.625956 −99.661247 186.540547 125.734170 −164.038918 −104.128725 182.047597 131.071354 −159.355700 −108.426535 177.371114 136.218702 −154.584621 −112.556064 172.524371 141.174125 −149.733993 −116.518702 167.520506 145.935987 −144.811446 −120.315983 162.372662 150.502656 −139.823038 −123.949772 157.093782 154.872796 −134.774607 −127.421982 151.695493 159.047100 −129.671990 −130.734524 146.188873 163.027106 −124.520950 −133.889334 140.584999 166.814352 −119.326332 −136.888633 134.894279 170.410615 −114.092363 −139.734835 129.125224 173.818346 −108.823258 −142.430359 123.286009 177.040117 −103.523174 −144.977610 117.384807 180.078498 −98.195466 −147.378857 111.429332 182.936250 −92.842928 −149.636273 105.425796 185.616744 −87.468341 −151.752026 99.380109 188.123478 −82.074488 −153.728285 93.298170 190.459946 −76.663905 −155.567108 87.185134 192.629411 −71.238446 −157.270235 81.044770 194.634706 −65.799846 −158.839351 74.880694 196.478614 −60.349842 −160.276145 68.696522 198.163920 −54.890114 −161.582273 62.495634 199.693311 −49.421977 −162.759207 56.280377 201.069052 −43.946597 −163.808343 50.052815 202.293296 −38.465141 −164.731074 43.815013 203.368192 −32.978751 −165.528751 37.569038 204.295891 −27.488298 −166.202248 31.316717 205.078281 −21.994500 −166.752162 25.059265 205.716568 −16.498071 −167.179084 18.797798 206.211847 −10.999725 −167.483607 12.533426 206.565194 −5.500161 −167.666246 6.267181 206.777186 0.000000 −167.727126 0.000000 206.847850 5.500161 −167.666246 −6.267181 206.777186 10.999725 −167.483607 −12.533426 206.565194 16.498071 −167.179084 −18.797798 206.211847 21.994500 −166.752162 −25.059265 205.716568 27.488298 −166.202248 −31.316717 205.078281 32.978751 −165.528751 −37.569038 204.295891 38.465141 −164.731074 −43.815013 203.368192 43.946597 −163.808343 −50.052815 202.293296 49.421977 −162.759207 −56.280377 201.069052 54.890114 −161.582273 −62.495634 199.693311 60.349842 −160.276145 −68.696522 198.163920 65.799846 −158.839351 −74.880694 196.478614 71.238446 −157.270235 −81.044770 194.634706 76.663905 −155.567108 −87.185134 192.629411 82.074488 −153.728285 −93.298170 190.459946 87.468341 −151.752026 −99.380109 188.123478 92.842928 −149.636273 −105.425796 185.616744 98.195466 −147.378857 −111.429332 182.936250 103.523174 −144.977610 −117.384807 180.078498 108.823258 −142.430359 −123.286009 177.040117 114.092363 −139.734835 −129.125224 173.818346 119.326332 −136.888633 −134.894279 170.410615 124.520950 −133.889334 −140.584999 166.814352 129.671990 −130.734524 −146.188873 163.027106 134.774607 −127.421982 −151.695493 159.047100 139.823038 −123.949772 −157.093782 154.872796 144.811446 −120.315983 −162.372662 150.502656 149.733993 −116.518702 −167.520506 145.935987 154.584621 −112.556064 −172.524371 141.174125 159.355700 −108.426535 −177.371114 136.218702 164.038918 −104.128725 −182.047597 131.071354 168.625956 −99.661247 −186.540547 125.734170 173.108034 −95.023188 −190.835945 120.211807 177.475135 −90.214904 −194.919514 114.509825 181.717039 −85.236957 −198.776986 108.633820 185.823525 −80.089913 −202.394756 102.591166 189.784089 −74.774698 −205.760145 96.391723 193.586816 −69.294028 −208.860541 90.045537 197.219362 −63.651172 −211.683431 83.562761 200.669377 −57.849405 −214.218177 76.955599 203.924262 −51.893056 −216.455827 70.238099 206.970898 −45.788633 −218.387487 63.424375 209.796103 −39.542910 −220.005457 56.529033 212.386722 −33.162766 −221.305756 49.568217 214.730220 −26.657228 −222.285128 42.558369 216.814638 −20.037350 −222.940319 35.515934 218.628044 −13.314266 −223.269709 28.457417 220.158646 −6.499245 −223.276074 21.399499 221.396734 0.394465 −222.962920 14.358886 

What is claimed is:
 1. An optical unit, comprising: a plurality of mirrors configured to guide imaging light along an imaging beam path from an object field located in an object plane to an image field in an image plane, wherein: the plurality of mirrors comprises at least three grazing incidence mirrors configured to deflect a chief ray of a central object field point with an angle of incidence of more than 45°; the optical unit is configured so that, during use of the optical unit, different polarized light beams passing the optical unit from the object field to the image field are rotated in their polarization direction by different angles of rotation due to a geometrical polarization rotation; the optical unit comprises a first group of mirrors and a second group of mirrors; the second group of mirrors consists of the final two mirrors of the plurality of mirrors at the image side; the optical unit is configured so that, during use of the optical unit, a linear portion in a pupil dependence of a total geometrical polarization rotation of the optical unit is less than 20% of a linear portion in a pupil dependence of a geometrical polarization rotation of the second group of mirrors; the optical unit has an image side numerical aperture that is greater than 0.5; and the optical unit is a microlithography projection optical unit.
 2. The optical unit of claim 1, wherein the optical unit is configured so that, during use of the optical unit, the linear portion in the pupil dependence of the total geometrical polarization rotation of the optical unit is less than 15% of the linear portion in the pupil dependence of the geometrical polarization rotation of the second group of mirrors.
 3. The optical unit of claim 1, wherein the optical unit is configured so that during use of the optical unit, for all light beams imaging a center of the object field to a center of the image field, an angle of rotation is less than 35°*NA^(4.5).
 4. The optical unit of claim 1, wherein the image side numerical aperture is greater than 0.6.
 5. The optical unit of claim 1, wherein the optical unit is configured so that during use of the optical unit, for all light beams imaging a center of the object field to a center of the image field, the angle of rotation is less than 7°.
 6. The optical unit of claim 1, wherein the optical unit is configured so that, during use of the optical unit, an imaging beam path from a center of the object field through a location of a pupil plane having relative pupil coordinates (−1,0) or (1,0) in an exit pupil, respectively, to a center of the image field has a geometrical polarization rotation of less than 5°*NA^(4.5).
 7. The optical unit of claim 1, wherein the optical unit is configured so that, during use of the optical unit, the geometrical polarization rotation averaged over all imaging beam paths that lie in a pupil plane inside a dipole of 20% pupil fill ratio is less than 5°*NA^(4.5).
 8. The optical unit of claim 1, wherein the optical unit is configured so that, during use of the optical unit, a circumferential distribution of an angle of rotation in a pupil plane of the optical unit exhibits at least four zero crossings of the value of the angle of rotation.
 9. The optical unit of claim 1, wherein the optical unit is an anamorphic microlithography projection optical unit.
 10. The optical unit of claim 1, wherein a last mirror in the imaging beam path of the imaging optical unit comprises an opening configured to pass the imaging light.
 11. An optical system, comprising: an optical unit according to claim 1; and an illumination optical unit configured to illuminate the object field.
 12. An apparatus, comprising: an EUV light source; a projection optical unit according to claim 1; and an illumination optical unit configured to illuminate the object field, wherein the EUV light source is configured to provide the illumination light.
 13. A method of using an optical comprising a projection optical unit and an illumination optical unit, the method comprising: using the illumination optical unit to illuminate a portion of a reticle in an object field of the projection optical unit; and using the projection optical unit to image the illuminated portion of the reticle onto a light sensitive material in the image field, wherein the projection optical unit is an optical unit according to claim
 1. 14. An optical unit, comprising: a plurality of mirrors configured to guide imaging light along an imaging beam path from an object field located in an object plane to an image field in an image plane, wherein: the plurality of mirrors comprise at least three grazing incidence mirrors configured to deflect a chief ray of a central object field point with an angle of incidence of more than 45°; the optical unit is configured so that, during use of the optical unit, different polarized light beams passing the optical unit from the object field to the image field are rotated in their polarization direction by different angles of rotation due to a geometrical polarization rotation; the optical unit is configured so that, during use of the optical unit, for all light beams imaging a center of the object field to a center of the image field, an angle of rotation is less than 35°*NA^(4.5); the optical unit has an image side numerical aperture that is greater than 0.5; and the optical unit is a microlithography projection optical unit.
 15. The optical unit of claim 14, wherein the optical unit is configured so that during use of the optical unit, for all light beams imaging a center of the object field to a center of the image field, the angle of rotation is less than 25°*NA⁴⁵.
 16. The optical unit of claim 15, wherein the optical unit is configured so that, during use of the optical unit, a circumferential distribution of an angle of rotation in an exit pupil of the optical unit exhibits a zero crossing within 30° of each of a positive x-axis and a negative x-axis.
 17. The optical unit of claim 15, wherein the optical unit is configured so that, during use of the optical unit, a circumferential distribution of an angle of rotation in an exit pupil of the optical unit exhibits a zero crossing within 10° of each of a positive y-axis and a negative y-axis.
 18. An optical unit, comprising: a plurality of mirrors configured to guide imaging light along an imaging beam path from an object field in an object plane to an image field in an image plane, wherein: the plurality of mirrors comprise at least three grazing incidence mirrors configured to deflect a chief ray of a central object field point with an angle of incidence of more than 45°; the optical unit is configured so that, during use of the optical unit, different polarized light beams passing the optical unit from the object field to the image field are rotated in their polarization direction by different angles of rotation due to a geometrical polarization rotation; the optical unit is configured so that, during use of the optical unit, a circumferential distribution of an angle of rotation in a pupil plane of the optical unit exhibits at least four zero crossings of the value of the angle of rotation; the optical unit has an image side numerical aperture that is greater than 0.5; and the optical unit is a microlithography projection optical unit.
 19. The optical unit of claim 18, wherein the optical unit is configured so that, during use of the optical unit, a circumferential distribution of an angle of rotation in an exit pupil of the optical unit exhibits a zero crossing within 30° of each of a positive x-axis and a negative x-axis.
 20. The optical unit of claim 18, wherein the optical unit is configured so that, during use of the optical unit, a circumferential distribution of an angle of rotation in an exit pupil of the optical unit exhibits a zero crossing within 10° of each of a positive y-axis and a negative y-axis. 